高性能光学制造

doi:10.3901/JME.2023.21.001

机械工程学报 ›› 2023, Vol. 59 ›› Issue (21): 1-14.doi: 10.3901/JME.2023.21.001

• 特邀专栏：高性能超精密制造 • 上一篇下一篇

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高性能光学制造

戴一帆^1,2,3, 彭小强^1,2,3, 薛帅^1,2,3, 蒋庄德^4,5,6

1. 国防科技大学智能科学学院长沙 410073;
2. 国防科技大学超精密加工技术湖南省重点实验室长沙 410073;
3. 国防科技大学装备综合保障技术重点实验室长沙 410073;
4. 西安交通大学机械工程学院西安 710049;
5. 西安交通大学机械制造系统工程国家重点实验室西安 710054;
6. 西安交通大学微纳制造与测试技术国际合作联合实验室西安 710049

收稿日期:2023-04-06 修回日期:2023-07-18 出版日期:2023-11-05 发布日期:2024-01-15
通讯作者: 戴一帆(通信作者)，男，1965年出生，博士，教授，博士研究生导师。主要研究方向为超精密制造技术。E-mail：daiyifan@nudt.edu.cn
作者简介:彭小强，男，1977年出生，博士，研究员，博士研究生导师。主要研究方向为超精密制造技术。E-mail：pxq2000@vip.sina.com；薛帅，男，1990年出生，博士，副研究员，硕士研究生导师。主要研究方向为超精密制造技术。E-mail：shuaixue1990@163.com；蒋庄德，男，1955年出生，博士，教授，博士研究生导师。主要研究方向为精密超精密加工与测试技术及装备、微纳制造与先进传感技术。E-mail：zdjiang@mail.xjtu.edu.cn
基金资助:
国家自然科学基金(51991371,51835013,52293404,52293405,52105567)资助项目。

High-performance Optical Manufacturing

DAI Yifan^1,2,3, PENG Xiaoqiang^1,2,3, XUE Shuai^1,2,3, JIANG Zhuangde^4,5,6

1. College of Intelligent Science, National University of Defense Technology, Changsha 410073;
2. Hunan Key Laboratory of Ultra-Precision Machining Technology, National University of Defense Technology, Changsha 410073;
3. Laboratory of Science and Technology on Integrated Logistics Support, National University of Defense Technology, Changsha 410073;
4. School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an 710049;
5. State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710054;
6. International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technology, Xi'an Jiaotong University, Xi'an 710049

Received:2023-04-06 Revised:2023-07-18 Online:2023-11-05 Published:2024-01-15

摘要/Abstract

摘要： 聚变点火、同步辐射、光刻机、深空探测、侦察预警等高端装备要实现一系列前所未有的极端性能，并朝着多样化和复杂化的方向发展。强光元件、同步辐射反射镜、掩膜版和光刻物镜、深空探测X射线反射镜等关键光学元件是这些系统实现聚焦、极高能量输出、极高峰值功率、极端尺寸光束聚焦和纳米尺度精确图案转印等极端性能的关键。要实现这些高端装备的极端性能，对核心关键元件的光学制造提出了高精度、低损伤、低应力、洁净制造和功构一体等要求，要求实现的是多物理参数约束下的高性能。元件的性能不仅由设计约束，更受到制造水平的制约，传统的以提升精度为目标的光学制造方法面临挑战，亟待实现从高精度制造到高性能制造的跃升。高性能光学制造是指面向极端性能高端制造装备发展对材料/结构特殊、高功率/高能辐照、低缺陷和洁净制造等关键光学元件的制造需求，以服役性能精准调控为目标，通过高性能光学制造装备、工具、检测和工艺等方面的技术创新，制造特殊材料/结构或者极高功能的元件，可作业于极端性能服役环境的制造。将近年来国内外围绕光学元件和超精密零件高性能光学制造的工作进行初步凝练，总结高性能光学制造典型元件的特点、光学制造要求和光学制造技术，尝试阐明高性能光学制造的内涵，介绍高性能光学制造的关键技术和发展趋势，并给出了高性能光学制造的应用实例。

关键词: 光学制造, 高性能, 低缺陷, 超精密加工

Abstract: High-end equipment such as fusion ignition, synchrotron radiation, lithography machine, space exploration, reconnaissance and warning require to achieve a series of unprecedented extreme, various and complex performance. The key optical components, such as high energy/power laser elements, synchrotron radiation mirrors, mask plates and photolithographic objective, space exploration X-ray mirrors, are fatal to these systems to achieve the extreme performance of focusing, extremely high energy output, extremely high peak power, extreme size of beam focusing and pattern transfer with nano scale accuracy. In order to realize the extreme performance of these high-end equipment, the optical manufacturing of the key components is required to be high accuracy, low damage, low stress, clean manufacturing and integration of function and structure, and it is required to achieve high performance under the constraints of multiple physical parameters. The traditional optical manufacturing methods aiming at improving the accuracy are faced with challenges. It is urgent for optical manufacturing methods to realize the transformation from manufacturing accuracy to manufacturing performance. The study preliminarily summarizes the recent work of high performance optical manufacturing of optical components and ultra-precision parts. The characteristics of typical components made by high performance optical manufacturing techniques, optical manufacturing requirements and optical manufacturing technologies have been summarized. The connotation, key technologies and development trend of high performance optical manufacturing have been tried to be clarified. At the end of the paper, application examples of high performance optical manufacturing have been given.

Key words: optical manufacturing, high-performance, low damage, ultra-precision fabrication

中图分类号:

TG156

戴一帆, 彭小强, 薛帅, 蒋庄德. 高性能光学制造[J]. 机械工程学报, 2023, 59(21): 1-14.

DAI Yifan, PENG Xiaoqiang, XUE Shuai, JIANG Zhuangde. High-performance Optical Manufacturing[J]. Journal of Mechanical Engineering, 2023, 59(21): 1-14.

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高性能光学制造

High-performance Optical Manufacturing

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