• CN:11-2187/TH
  • ISSN:0577-6686

机械工程学报 ›› 2018, Vol. 54 ›› Issue (6): 32-40.doi: 10.3901/JME.2018.06.032

• 特邀专栏:表面工程先进技术及其服役行为(下) • 上一篇    下一篇

TiSiN/AlCrN纳米多层涂层高温热稳定性及摩擦学特性研究

黎海旭1, 唐鹏1, 吴正涛1, 代伟1, 王启民1, 祁正兵2   

  1. 1. 广东工业大学机电工程学院 广州 510006;
    2. 厦门理工学院材料科学与工程学院 厦门 361024
  • 收稿日期:2017-05-08 修回日期:2017-08-14 出版日期:2018-03-20 发布日期:2018-03-20
  • 通讯作者: 吴正涛(通信作者),男,1990年出生,博士。主要研究方向为刀具涂层技术与金属加工。E-mail:wuzhengtao5@163.com
  • 作者简介:黎海旭,男,1991年出生。主要研究方向为涂层刀具。E-mail:942366314@qq.com
  • 基金资助:
    国家自然科学基金(51522502,51275095,U1201245,51601163)、中国博士后科学基金(2016M600641)和广东省自然科学基金(2014A030311002,2016A050502056)资助项目。

High-temperature Thermal Stability and Tribological Property of TiSiN/AlCrN Nano-multilayer Coatings

LI Haixu1, TANG Peng1, WU Zhengtao1, DAI Wei1, WANG Qimin1, QI Zhengbing2   

  1. 1. School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006;
    2. School of Materials Science and Engineering, Xiamen University of Technology, Xiamen 361024
  • Received:2017-05-08 Revised:2017-08-14 Online:2018-03-20 Published:2018-03-20

摘要: 采用电弧离子镀技术于硬质合金基体上沉积TiSiN/AlCrN纳米多层涂层,利用扫描电子显微镜(Scanning electron microscope,SEM)、透射电子显微镜(Transmission electron microscope,TEM)、X射线衍射仪(X-ray diffraction,XRD)、能谱仪(Energy dispersive spectrometer,EDS)、纳米硬度计、划痕仪以及摩擦磨损试验机对TiSiN/AlCrN涂层的结构、高温热稳定性能和高温摩擦磨损性能进行研究。结果表明,TiSiN/AlCrN涂层呈现出纳米多层结构,由c-Cr(Al)N与c-Ti(Si)N相构成,涂层硬度为49.7 GPa±0.83 GPa,结合力达到83 N。经800℃和950℃真空退火后涂层微观结构变得更加致密,缺陷密度下降,而涂层硬度和结合力没有明显变化,TiSiN/AlCrN纳米多层涂层经950℃真空退火处理后未发生相变。摩擦磨损测试结果表明,随着温度由室温增加至400℃,涂层摩擦因数急剧升高,继续增加温度至600~800℃,涂层摩擦因数降低,然而涂层磨损率随着测试温度的升高先降低后增加。在室温摩擦磨损测试中TiSiN/AlCrN涂层磨损机制主要以磨粒磨损、塑性磨损为主,400℃时涂层处于二体摩擦转三体摩擦的过渡阶段,主要磨损机制为磨粒磨损和粘着磨损,600~800℃下涂层磨损机制主要为粘着磨损以及氧化磨损。

关键词: TiSiN/AlCrN涂层, 电弧离子镀, 高温热稳定性, 摩擦学性能, 组织结构

Abstract: TiSiN/AlCrN multilayer coatings are deposited on cemented carbide substrate by arc ion plating. The microstructure, high-temperature thermal stability and tribological properties of the TiSiN/AlCrN coatings are investigated by scanning electron microscopy (SEM), transmission electron microscope(TEM), X-ray differaction (XRD), energy dispersive X-ray spectroscopy (EDS), revetest scratch test, nano-indentatio, tribology and vacuum annealing tests. The results indicate that the TiSiN/AlCrN coatings consist of c-Cr(Al)N and c-Ti(Si)N phases, exhibiting a typical columnar microstructure. The TiSiN/AlCrN illustrates a hardness of 49.7 GPa±0.83 GPa and adhesion strength of 83 N. After 800℃ and 900℃ vacuum annealing, the coating microstructure become more dense and the defect density decreased. However, both the coating hardness and bonding strength are not significantly changed. The high-temperature tribology tests suggest that the friction coefficient of the coating increases as the temperature increases from RT to 400℃. The friction coefficient decreases with further improving the temperature to 600-800℃. The wear rate of the coating increase monotonously as the test temperature increases. Both abrasive wear and plastic deformation produce the wear of the TiSiN/AlCrN coating at RT. However, adhesive wear and abrasive wear dominate the wear occurre at 400℃. As the test temperature increases to 600-800℃, the wear of the TiSiN/AlCrN coating is ascribed to the adhesive wear and the oxidation wear.

Key words: arc ion plating, microstructure, thermal stability, TiSiN/AlCrN coating, tribological properties

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