动磁场磁流变效应抛光垫抛光力特性试验研究

doi:10.3901/JME.2018.06.010

机械工程学报 ›› 2018, Vol. 54 ›› Issue (6): 10-17.doi: 10.3901/JME.2018.06.010

• 特邀专栏：表面工程先进技术及其服役行为（下） • 上一篇下一篇

动磁场磁流变效应抛光垫抛光力特性试验研究

潘继生¹, 于鹏², 阎秋生¹

1. 广东工业大学机电工程学院广州 510006;
2. 飞亚达(集团)股份有限公司深圳 518057

收稿日期:2017-05-17 修回日期:2017-10-12 出版日期:2018-03-20 发布日期:2018-03-20
通讯作者: 阎秋生(通信作者),男,1962年出生,博士,教授,博士研究生导师。主要研究方向为超精密加工和金属板材精密分切。E-mail:qsyan@gdut.edu.cn
作者简介:潘继生,男,1980年出生,博士,副教授,硕士研究生导师。主要研究方向为超精密加工。E-mail:panjisheng@gdut.edu.cn;于鹏,男,1991年出生,工程师。主要研究方向为机械自动化和标准化试验。E-mail:yupeng@fiyta.com.cn
基金资助:
国家自然科学基金（51375097）、广东省科技计划（2016A010102014）和广东省自然科学基金重点（2015A030311044）资助项目。

Experimental Investigations on the Polishing Forces Characteristics of Dynamic Magnetic Field Magnetorheological Effect Polishing Pad

PAN Jisheng¹, YU Peng², YAN Qiusheng¹

1. School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006;
2. Fiyta Holdings Ltd., Shenzhen 518057

Received:2017-05-17 Revised:2017-10-12 Online:2018-03-20 Published:2018-03-20

摘要/Abstract

摘要： 基于动磁场磁流变效应抛光方法，采用微型压电式传感器测试分析动磁场磁流变效应抛光垫法向抛光力特性，研究磁极转速、加工间隙、工件运动方式对动磁场磁流变效应抛光力的影响。结果表明，动磁场磁流变效应平面抛光法向力在抛光垫中心区域最大，pv值在抛光垫的半径6 mm处最大；相对静磁场，在磁极转动的动磁场作用下磁流变抛光力和扭矩呈现大幅度波动的动态行为；动磁场磁流变效应抛光力受到磁极转速影响，大于15 r/min开始产生动磁场，在试验所测得的范围内，磁极转速30 r/min左右有最好效果；工件运动方式是影响磁流变抛光作用力的因素，当工件沿抛光盘径向往复偏摆时扭矩剧烈变化，沿抛光盘法向运动加工间隙减小时抛光法向力会瞬间急剧增大，最大峰值达到稳态值的25倍。

关键词: 磁流变抛光, 动态磁场, 法向力, 扭矩, 抛光垫

Abstract: Based on the dynamic magnetic field magnetorheological effect(DMFME) polishing technology, the characteristics of polishing normal force of DMFME polishing pad is tested and analyzed by the micro piezoelectric sensor. The influences of the revolving speeds of magnetic pole, the machining gaps, the movement methods of workpiece on the polishing force are researched. It is found that the maximal MR effect plane polishing normal force of DMFME appeared on the central zone, but the maximal pv value came up in the radius of 6 mm. Compared with the static magnetic field, the MR polishing force and the torque presented significant dynamic behavior under the dynamic magnetic field formed by the rotating magnetic pole. The dynamic magnetic field became more remarkable when the revolving speed of magnetic pole greater than 15 r/min, and the best DMFME is acquired when the speed is 30 r/min. The movement methods of workpiece also affected the DMFME polishing force. The torque is varied violently when the workpiece oscillated along the polishing plate. The normal force of DMFME polishing drastically increased when the machining gaps is reduced, its maximum peak reached 25 times of the steady state value.

Key words: dynamic magnetic field, magnetorheological finishing, normal force, polishing pad, torque

中图分类号:

TH161

潘继生, 于鹏, 阎秋生. 动磁场磁流变效应抛光垫抛光力特性试验研究[J]. 机械工程学报, 2018, 54(6): 10-17.

PAN Jisheng, YU Peng, YAN Qiusheng. Experimental Investigations on the Polishing Forces Characteristics of Dynamic Magnetic Field Magnetorheological Effect Polishing Pad[J]. Journal of Mechanical Engineering, 2018, 54(6): 10-17.

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动磁场磁流变效应抛光垫抛光力特性试验研究

Experimental Investigations on the Polishing Forces Characteristics of Dynamic Magnetic Field Magnetorheological Effect Polishing Pad

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