关键词: 超精密加工, 环境监控, 精密检测, 磨削加工工艺, 磨削加工装备, 气囊抛光, 中频误差评价

Abstract: The ultra-precision machining technology of large size optic is a comprehensive application of various sciences, which promotes the development for civil and national defense use. Under the processing of national optical project, our country makes great progress in this field. The development of ultra-precision machining technology for large size optic in micro/nano machining and measuring laboratory of Xiamen University is introduced, particularly in grinding equipment, grinding process, precise measuring, controlled bonnet polishing, environment monitoring, mid-spatial frequency error assessing and et al. From the requirement of the ultra-precision machining, the laboratory uses the experience of other countries for reference and integrates the above technology, then forms an intellectual property of grinding and polishing system independently for large size optic manufacture.

Key words: Bonnet polishing, Environment monitoring, Grinding equipment, Grinding process, Mid-spatial frequency error assessing, Precise measuring, Ultra-precision machining