关键词: 动态特性, 高g值, 微机电系统, 微结构

Abstract: To study the dynamic characteristics of micro electro-mechanical systems (MEMS) microstructures in high-g acceleration environment, the dynamic testing technology in high-g acceleration environment is systematically studied and the dynamic testing equipment is developed. The base excitation device which uses piezoelectric ceramic as the driving source is established. The typical beam─mass block microstructure which integrates the piezoresistive element is prepared. The dynamic characteristic and its change law of the typical MEMS microstructure in 0g to 10 000g acceleration environment are studied through experiments. The experimental results show that under the action of high-g acceleration, when the microstructure has large deformation, thus being in the nonlinear state, the natural frequency of the microstructure gets higher with the increase of acceleration; when the microstructure only has small deformation and is in linear state, its natural frequency does not change with the action of external acceleration. Whether in large or small deformation state, the external high-g acceleration has no effects on the damping ratios of the microstructure. The experimental result is in good agreement with the analysis result of nonlinear finite element modal with stress stiffening effect.

Key words: Dynamic characteristic, High g, Microelectro-mechanical systems, Microstructure