• CN:11-2187/TH
  • ISSN:0577-6686

›› 2006, Vol. 42 ›› Issue (2): 6-11.

• 论文 • 上一篇    下一篇

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同面多电极电容传感器的仿真与试验研究

董恩生;董永贵;吕文尔;贾惠波   

  1. 清华大学精密测试技术及仪器国家重点实验室
  • 发布日期:2006-02-15

SIMULATION AND EXPERIMENT FOR A UNIPLANAR CAPACITANCE SENSOR WITH MULTI-ELECTRODE

DONG Ensheng;DONG Yonggui;Lü Wener;JIA Huibo   

  1. State Key Laboratory of Precision Measurement Technology and Instruments, Tsinghua University
  • Published:2006-02-15

摘要: 针对非金属材料表面下异常或损伤的检测,提出一个同面8电极电容传感器。采用二维有限元法对该传感器的电势分布、灵敏度分布、电容测量及材料内部发生异常改变时的电容变化进行了仿真计算,用一种工程塑料作为样本,对同面多电级电容传感器用于检测非金属材料表面下的损伤或异常的可行性和有效性进行了试验研究。用主元分析方法对仿真计算的电容值和实测的电容值进行了异常识别,主元分析方法能很好地识别出非金属材料表面下的异常或损伤。仿真和初步的试验结果表明,当非金属材料表面下发生异常变化或损伤时,与材料的健康状态相比,测得的电容值减小了;用同面多电极电容传感器能有效的检测出非金属材料表面下的异常或损伤,该方法可用于实际的非金属材料表面下异常检测和健康状态监测。

关键词: 电容传感器, 电势分布, 非金属材料, 灵敏度分布, 有限元法, 主元分析

Abstract: A uniplanar capacitive sensor, with 8-electrode on one plane substrate, is designed to detect the subsurface anomalies or damage of non-metallic materials. A 2D finite-element method is employed to simulate the electric potential distribution, the sensitivity distribution, capacitance measurements and capacitance variations for the sensor. A kind of engineering plastic slab is used as a sample for the experiment of detecting the subsurface anomalies of nonmetallic material. A principal component analysis is employed for anomaly discrimination according to the simulated capacitances and the measured capacitances, and the subsurface anomaly or damage of non-metallic materials can be well distinguished by principal component analysis. Both of the simulation and the preliminary experimental results show that, compared with the healthy material, the measured capacitances decrease after anomaly or damage occurs in the subsurface of nonmetallic material, and that the proposed approach can effectively detect the subsurface anomalies of nonmetallic material and can be practically used for anomaly detection and health monitoring of nonmetallic materials.

Key words: Nonmetallic materials, Principal component analysis, Sensitivity distribution, Capacitive sensor, distribution, Electric potential, Finite element method

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