可测量法向力和剪切力的带屏蔽软体电容传感器

doi:10.3901/JME.2022.23.106

机械工程学报 ›› 2022, Vol. 58 ›› Issue (23): 106-113.doi: 10.3901/JME.2022.23.106

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可测量法向力和剪切力的带屏蔽软体电容传感器

郝雨飞¹, 李长胜²

1. 北京科技大学机械工程学院北京 100083;
2. 北京理工大学机电学院北京 100081

收稿日期:2022-03-08 修回日期:2022-08-23 出版日期:2022-12-05 发布日期:2023-02-08
通讯作者: 李长胜(通信作者),男,1986年出生,博士,副教授。主要研究方向为手术机器人、人机交互与智能控制、机构设计与系统集成。E-mail:lics@bit.edu.cn
作者简介:郝雨飞,男,1990年出生,博士,副教授。主要研究方向为软体机器人与智能材料、面向智能制造的特种末端执行器、软体传感器。E-mail:yufeihao@ustb.edu.cn
基金资助:
空间智能控制技术实验室开放基金课题(HTKJ2021KL502009)和北京科技大学人才启动经费(06500212)资助项目。

Shielded Soft Capacitive Sensor for the Measuring of Normal Force and Shear Force

HAO Yufei¹, LI Changsheng²

1. School of Mechanical Engineering, University of Science and Technology Beijing, Beijing 100083;
2. School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081

Received:2022-03-08 Revised:2022-08-23 Online:2022-12-05 Published:2023-02-08

摘要/Abstract

摘要： 软体电容传感器因其高柔顺性和高灵敏度等特征在人机交互、可穿戴设备和软体机器人中有很好的应用前景，然而电容检测很容易受到外界电磁场的干扰，因此提出了一种带屏蔽的软体电容传感器。为了能够同时检测法向压力和剪切压力，设计了一种三电极的双电容结构，同时在传感器上下表面添加屏蔽层来屏蔽外界电磁场干扰。为解决因屏蔽层变形产生的寄生电容对检测电容的影响，提出了一种刚度分层的方法，电极之间的电介质感知区域采用一种厚度仅约0.6mm的硅胶海绵结构，而电极和屏蔽层之间采用实心硅胶，从而保证按压传感器时感知区域的变形远大于屏蔽层。实验结果表明，传感器可以同时检测法向压力和剪切压力的变化，法向灵敏度可达到0.12kPa^-1，单位剪切压强的电容变化达10fF，与不带屏蔽的传感器相比，该传感器可将交流高压(1400 V)电场引起的噪声减小到9%。这种带屏蔽的传感器在电吸附皮肤、软体机器人、可穿戴医疗设备等电磁干扰较强的环境中具有潜在的应用价值。

关键词: 电容传感器, 带屏蔽软体传感器, 多维力检测, 超薄硅胶海绵

Abstract: Soft capacitive sensors have prospective applications in the areas such as human-machine interaction, wearable devices, and soft robots because of their high flexibility and sensitivity. However, the measurement is vulnerable to the environmental disturbing electromagnetic fields. Therefore, a shielded soft capacitive sensor is presented. To detect the normal pressure and shear pressure simultaneously, a two capacitors structure with three electrodes is proposed. Meanwhile, a shielding layer is added separately on the upper and lower surface of the sensor to shield the external electromagnetic field. To reduce the influence of parasite capacitance which is caused by the deformation of the shielding layer on the measuring capacitance, a stiffness layered method is proposed. The dielectric sensing region between the electrodes uses a silicone sponge with a thickness of only about 0.6 mm, while solid silicone rubber is filled between the electrodes and the shielding layers. The special design ensures that the deformation of the sensing region is much larger than that of the shielding layer when pressing the sensor. The experimental results show that the sensor can simultaneously detect the changes of normal pressure and shear pressure, the normal sensitivity can reach 0.12 kPa^-1, and the capacitance change per shear pressure can reach 10 fF. Compared with the sensor without shielding layers, this sensor can reduce the noise caused by the external AC voltage (1400V) to 9%. This shielded sensor is promising in the scenarios with strong electromagnetic interference, such as electro adhesion skin, wearable medical devices, and soft robots.

Key words: capacitive sensor, shielded soft sensor, multi-axis force measuring, ultrathin silicone sponge

中图分类号:

TP242

郝雨飞, 李长胜. 可测量法向力和剪切力的带屏蔽软体电容传感器[J]. 机械工程学报, 2022, 58(23): 106-113.

HAO Yufei, LI Changsheng. Shielded Soft Capacitive Sensor for the Measuring of Normal Force and Shear Force[J]. Journal of Mechanical Engineering, 2022, 58(23): 106-113.

参考文献

[1] 汪延成,鲁映彤,丁文,等. 柔性触觉传感器的三维打印制造技术研究进展[J]. 机械工程学报,2020,56(19):1-14. WANG Yancheng,LU Yingtong,DING Wen,et al. Recent progress on three-dimensional printing processes to fabricate flexible tactile sensors[J]. Journal of Mechanical Engineering,2020,56(19):1-14.
[2] HAO Yufei,ZHANG Shixin,FANG Bin,et al. A review of smart materials for the boost of soft actuators,soft sensors,and robotics applications[J]. Chinese Journal of Mechanical Engineering,2022,35(1):1-16.
[3] VIRY L,LEVI A,TOTARO M,et al. Flexible three-axial force sensor for soft and highly sensitive artificial touch[J]. Advanced Materials,2014,26(17):2659-2664.
[4] BOUTRY C,NEGRE M,JORDA M,et al. A hierarchically patterned,bioinspired e-skin able to detect the direction of applied pressure for robotics[J]. Science Robotics,2018,3(24):eaau6914.
[5] 刘会聪,杨梦柯,袁鑫,等. 液态金属柔基性感知的人机交互软体机械手[J]. 中国机械工程,2021,32(12):1470-1478. LIU Huicong,YANG Mengke,YUAN Xin,et al. Liquid metal based flexible sensors for soft manipulator towards human-machine interaction[J]. Chinese Mechanical Engineering,2021,32(12):1470-1478.
[6] CHORSI M,CURRY E,CHORSI H,et al. Piezoelectric biomaterials for sensors and actuators[J]. Advanced Materials,2018,31(1):1802084.
[7] RAMUZ M,TEE B,TOK J,et al. Transparent,optical,pressure-sensitive artificial skin for large-area stretchable electronics[J]. Advanced Materials,2012,24(24):3223-3227.
[8] ZHANG Yujing,LI Xiyuan,KIM J,et al. Thermally drawn stretchable electrical and optical fiber sensors for multimodal extreme deformation sensing[J]. Advanced Optical Materials,2021,9(6):2001815.
[9] ZHANG Fan,YANG Kun,PEI Zhen,et al. A highly accurate flexible sensor system for human blood pressure and heart rate monitoring based on graphene/sponge[J]. RSC Advances,2022,12(4),2391-2398.
[10] YIN J,SANTOS V,POSNER J. Bioinspired flexible microfluidic shear force sensor skin[J]. Sensors & Actuators:A Physical,2017,264,289-297.
[11] YAN Youcan,HU Zhe,YANG Zhengbao,et al. Soft magnetic skin for super-resolution tactile sensing with force self-decoupling[J]. Science Robotics,2021,6(51):eabc8801.
[12] SHI Hongyang,MOHAMMED A,HOLBROOK C,et al. Screen-printed soft capacitive sensors for spatial mapping of both positive and negative pressures[J]. Advanced Functional Materials,2019,29(23):1809116.
[13] 李雪萍,杨晓锋,卿新林. 一种柔性电容传感器的压力传感特性及其机理研究[J]. 传感技术学报,2019,32(8):1189-1193. LI Xueping,YANG Xiaofeng,QING Xinlin. Pressure sensing characteristics and mechanism of a flexible capacitive sensor[J]. Chinese Journal of Sensors and Actuators,2019,32(8):1189-1193.
[14] SHINTAKE J,PISKAREV E,JEONG S,et al. Ultrastretchable strain sensors using carbon black-filled elastomer composites and comparison of capacitive versus resistive sensors[J]. Advanced Materials Technologies,2018,3(3):1700284.
[15] KANG Subin,LEE J,LEE S,et al. Highly sensitive pressure sensor based on bioinspired porous structure for real-time tactile sensing[J]. Advanced Electronic Materials,2016,2(12):1600356.
[16] NODA K,MATSUMOTO K,SHIMOYAMA I. Stretchable tri-axis force sensor using conductive liquid[J]. Sensors and Actuators A:Physical,2014,215:123-129.
[17] LEE H,CHUNG J,CHANG S,et al. Normal and shear force measurement using a flexible polymer tactile sensor with embedded multiple capacitors[J]. Journal of Microelectromechanical Systems,2008,17(4):934-942.
[18] VANDEPARRE H,WATSON D,LACOUR S. Extremely robust and conformable capacitive pressure sensors based on flexible polyurethane foams and stretchable metallization[J]. Applied Physics Letters,2013,103(20):204103.
[19] 易艺,宋爱国,李会军,等. 电容式柔性触觉传感器设计[J]. 传感技术学报,2019,32(8):1123-9. YI Yi,SONG Aiguo,LI Huijun,et al. Design of capacitive flexible tactile sensor[J]. Chinese Journal of Sensors and Actuators,2019,32(8):1123-9.
[20] 徐雪杰,朱子才,罗斌,等. CNT/PDMS柔性传感材料的打印工艺及性能研究[J]. 机械工程学报,2020,56(15):97-103. XU Xuejie,ZHU Zicai,LUO Bin,et al. Research on printing process and perfomance of CNT/PDMS soft sensing material[J]. Journal of Mechanical Engineering,2020,56(15):97-103.
[21] 田小永,闫万权,黄兰,等. 石墨烯/柔性聚乳酸自传感复合材料结构3D打印与性能研究[J]. 机械工程学报,2021,57(7):215-23. TIAN Xiaoyong,YAN Wanquan,HUANG Lan,et al. Graphene/flexible polylactic acid self-sensing composite structures 3D printing and performance[J]. Journal of Mechanical Engineering,2021,57(7):215-23.
[22] ROBERTS P,DAMIAN D,SHAN W,et al. Soft-matter capacitive sensor for measuring shear and pressure deformation[C]//2013 IEEE International Conference on Robotics and Automation. IEEE,2013:3529-3534.
[23] BILENT S,DINH T,MARTINCIC E,et al. Influence of the porosity of polymer foams on the performances of capacitive flexible pressure sensors[J]. Sensors,2019,19(9):1968.
[24] LI Guozhen,LIU Shiqiang,WANG Liangqi,et al. Skin-inspired quadruple tactile sensors integrated on a robot hand enable object recognition[J]. Science Robotics,2020,5(49):eabc8134.
[25] YANG Jiayi,TANG D,AO Jinping,et al. Ultrasoft liquid metal elastomer foams with positive and negative piezopermittivity for tactile sensing[J]. Advanced Functional Materials,2020,30(36):2002611.

可测量法向力和剪切力的带屏蔽软体电容传感器

Shielded Soft Capacitive Sensor for the Measuring of Normal Force and Shear Force

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