• CN:11-2187/TH
  • ISSN:0577-6686

机械工程学报 ›› 2017, Vol. 53 ›› Issue (18): 1-9.doi: 10.3901/JME.2017.18.001

• 仪器科学与技术 •    下一篇

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厚度渐变结构介电性能测试用变间距叉指型相邻电容传感器设计

焦敬品1,2, 李亮1, 何存富1,2, 吴斌1,2   

  1. 1. 北京工业大学机械工程与应用电子技术学院 北京 100124;
    2. 北京工业大学北京市精密测控技术与仪器工程技术研究中心 北京 100124
  • 收稿日期:2016-11-17 修回日期:2017-05-27 出版日期:2017-09-20 发布日期:2017-09-20
  • 通讯作者: 焦敬品(通信作者),女,1973年出生,博士,教授,博士研究生导师.主要研究方向为现代测控技术与方法、无损检测新技术、现代信号分析与处理技术、新型传感器技术.E-mail:jiaojp@bjut.edu.cn
  • 基金资助:
    国家自然科学基金(11572010,11272017)和国家重点研发计划(2016YFF0203002)资助项目。

Design of Improved Interdigital Capacitive Proximity Sensor Used for Dielectric Property Detection of Thickness Gradual Changed Structure

JIAO Jingpin1,2, LI Liang1, HE Cunfu1,2, WU Bin1,2   

  1. 1. College of Mechanical Engineering and Applied Electronics Technology, Beijing University of Technology, Beijing 100124;
    2. Beijing Engineering Research Center of Precision Measurement Technology and Instruments, Beijing University of Technology, Beijing 100124
  • Received:2016-11-17 Revised:2017-05-27 Online:2017-09-20 Published:2017-09-20

摘要: 针对厚度渐变高分子结构介电性能检测问题,设计一种变间距叉指型相邻电容传感器。研究不同叉指个数和极板覆盖率对等间距叉指相邻电容传感器信号强度和穿透深度的影响,确定了单对叉指单元的宽度范围|研究单对叉指单元参数对相邻电容传感器性能的影响,得到单对叉指单元传感器的穿透深度|根据待测结构厚度变化规律,对组成叉指传感器电极的单个叉指单元的宽度和间距进行了优化设计,设计出变间距叉指型相邻电容传感器。仿真和试验结果表明,变间距叉指型相邻电容传感器的信号强度和灵敏度优于等间距传感器,该传感器更适合渐变厚度结构材料的介电性能检测。

关键词: 变间距叉指传感器, 穿透深度, 高分子材料, 厚度渐变结构, 相邻电容传感器

Abstract: Aiming at the problem of dielectric property detection of polymer materials with thickness gradual changes structure, an improved interdigital capacitive proximity sensor is designed. Finite element simulation method is proposed to investigate the effects of different number of fingers and metallization ratio on the signal strength and penetration depth, and the scope of the single pair interdigital unit width is determined. The influence of different interdigital unit width and metallization ratio for the sensor performances are carried out, the penetration depth curves are acquired. Based on the structure characteristics of the materials under test, the width of each finger which composed the interdigital sensor electrodes is optimized individually. An improved interdigital capacitive proximity sensor is designed. The results of simulation and experimental indicate that the signal strength and sensitivity are better than the traditional interdigital sensors, thus the improved interdigital sensor is more suitable for the dielectric property detection of the gradual change thickness structure.

Key words: interdigital sensors, penetration depth, polymermaterials, proximity capacitive sensor, thickness gradual changed structure

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