厚度渐变结构介电性能测试用变间距叉指型相邻电容传感器设计
焦敬品, 李亮, 何存富, 吴斌
Design of Improved Interdigital Capacitive Proximity Sensor Used for Dielectric Property Detection of Thickness Gradual Changed Structure
JIAO Jingpin, LI Liang, HE Cunfu, WU Bin
机械工程学报
.
2017, (18): 1
-9
.
DOI: 10.3901/JME.2017.18.001
