关键词: MEMS, 玻璃, 湿法刻蚀, 微流控器件

Abstract: The microfabrication process flow of glass is proposed, the glass wet etching as the priority research area is discussed and demonstrated. A series of comparable experiments are done to observe the etching effects with different etching solutions, at the same time the effects of different etching conditions, such as etching temperature, rabbling mechanism, cleaning interval on the etching results are investigated and studied experimentally. The research targets are mainly for two typical applications, high etching rate for deep etching such for micro pumps and high surface quality etching for capillary channels. The results are also compared and analyzed to determine the scope of applications of different etching solutions and conditions, which provides basic scheme and experience curves for fabrication of microfluidic devices with glass.

Key words: Glass, MEMS, Microfluidic devices, Wet etching