• CN:11-2187/TH
  • ISSN:0577-6686

机械工程学报 ›› 2021, Vol. 57 ›› Issue (8): 81-89.doi: 10.3901/JME.2021.08.081

• 特邀专栏:庆祝厦门大学机电工程系建系80周年:微纳制造与智能制造 • 上一篇    下一篇

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基于硅酸镓镧的声表面波高温压力器件的微结构加工制造技术研究

梁晓瑞1,2, 徐芳萌1,2, 薛涛1,2, 谭秋林1,2, 董和磊1,2, 熊继军1,2   

  1. 1. 中北大学电子测试技术国防重点实验室 太原 030051;
    2. 中北大学仪器科学与动态测试教育部重点实验室 太原 030051
  • 收稿日期:2020-12-01 修回日期:2021-03-22 出版日期:2021-04-20 发布日期:2021-06-15
  • 通讯作者: 谭秋林(通信作者),男,1979年出生,博士,教授,博士研究生导师。主要研究方向为特种微传感器与集成系统。E-mail:tanqiulin@nuc.edu.cn
  • 作者简介:梁晓瑞,女,1993年出生,博士研究生。主要研究方向为高温恶劣环境下微纳器件。E-mail:B1906058@st.nuc.edu.cn
  • 基金资助:
    国家自然科学基金航天联合基金重点资助项目(U1837209)。

Microstructure Manufacturing Technology of Acoustic Surface Wave High Temperature Pressure Devices Based on Langasite

LIANG Xiaorui1,2, XU Fangmeng1,2, XUE Tao1,2, TAN Qiulin1,2, DONG Helei1,2, XIONG Jijun1,2   

  1. 1. National Defense Key Laboratory of Science and Technology on Electronic Test and Measurement, North University of China, Taiyuan 030051;
    2. Key Laboratory of Instrumentation Science and Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051
  • Received:2020-12-01 Revised:2021-03-22 Online:2021-04-20 Published:2021-06-15

摘要: 采用硅酸镓镧(Langasite,LGS)压电材料制备声表面波(Surface acoustic wave,SAW)高温压力传感器可解决高温、高压等恶劣环境下温度、压力等参数的实时原位测试的问题,但由于硅酸镓镧是一种高硬度难加工的硬脆性压电材料,因此开展了硅酸镓镧压电材料在高温等恶劣环境下的微结构加工制造技术的研究。通过分析LGS的化学与物理特性,利用湿法腐蚀工艺实现LGS的微纳成形制造和控制;以及利用高温热压直接键合工艺实现密封空腔的制造,研制出一套适用于LGS等硬脆性材料的微纳结构成形制造技术,并探究了微结构加工制造工艺的实用性。利用微结构加工制造技术实现的压力敏感微结构制备了基于LGS的SAW高温压力传感器样机并进行了测试,样机在25~1 000℃、20~500 kPa环境下能稳定工作,验证了LGS微纳结构成形制造技术在高温等恶劣环境下应用的可行性。

关键词: 硅酸镓镧, 声表面波, 湿法刻蚀, 热压键合, 高温压力

Abstract: A surface acoustic wave pressure sensor based on Langasite(LGS) can solve the problem of real-time in-situ measurement of temperature, pressure, and other parameters in harsh environments such as high temperature and high pressure. However, as the Langasite is a kind of hard and brittle piezoelectric material with high hardness and difficult to machine, the research on fabrication technology of microstructure of Langasite piezoelectric material in harsh environment such as high temperature is carried out. By analyzing the chemical and physical properties of LGS, the wet etching process is used to realize micro-nano fabrication and control of LGS. A sealed cavity microstructure is realized by high temperature hot pressing direct bonding process. A set of micro nanostructure forming technology suitable for LGS hard and brittle materials are developed, and the practicability of the microstructure processing and manufacturing process is explored. The SAW high-temperature pressure sensor prototype based on LGS is fabricated and tested by using pressure-sensitive microstructure realized by microstructure machining technology. The prototype can work stably at 25-1 000 ℃, 20-500 kPa, which verifies the feasibility of LGS microstructure forming technology in other harsh environments.

Key words: Langasite, surface acoustic wave, wet etching, thermocompression bonding, high temperature and pressure

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