基于硅酸镓镧的声表面波高温压力器件的微结构加工制造技术研究
梁晓瑞, 徐芳萌, 薛涛, 谭秋林, 董和磊, 熊继军
Microstructure Manufacturing Technology of Acoustic Surface Wave High Temperature Pressure Devices Based on Langasite
LIANG Xiaorui, XU Fangmeng, XUE Tao, TAN Qiulin, DONG Helei, XIONG Jijun
机械工程学报
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2021, (8): 81
-89
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DOI: 10.3901/JME.2021.08.081
