MEMS起爆器研究现状与发展趋势

doi:10.3901/JME.2021.22.359

摘要/Abstract

摘要： 随着微纳技术的广泛应用，以MEMS技术为支撑的新一代起爆器成为含能器件领域的研究热点。MEMS起爆器可以实现大规模高密度的集成制造，并且器件输出性能一致性较好，具有微型化、集成化、高能化的特征。MEMS起爆器按结构不同，可以分为爆炸箔结构、半导体桥结构以及多孔硅结构三大类。爆炸箔起爆器主要采用电爆炸原理，结构简单，安全性能较高。半导体桥起爆器起爆电压低，应用领域广泛，可通过增加含能材料来提高器件的能量输出。多孔硅起爆器反应活性高，与由碳氢氮氧组成的传统含能药剂相比，多孔硅含能材料的环境友好性更好。通过分析与对比MEMS起爆器的结构组成、起爆方式、制作工艺以及输出能量等方面，指出MEMS起爆器结构微型化、输出高能化、起爆可控化的特征，并提出能够兼顾高能性与安全性的MEMS起爆系统为未来重要的发展方向。

关键词: MEMS起爆器, 爆炸箔, 半导体硅桥, 含能材料, 多孔硅

Abstract: In recent years, surface dielectric barrier discharge plasma actuator(SDBD-PA) has become a research hotspot in the field of flow control. In order to study the breakdown characteristics of SDBD-PA and provide a reference for the selection of parameter interval of SDBD-PA related research, the control variable method is used to study the influence of the actuator parameters on SDBD-PA breakdown voltage and discharge stability, select the actuator parameters that have an effect on the breakdown voltage, experiment based on DOE method, use the Isight software to establish the quadratic regression model and analyze the effect of actuator parameters on the breakdown voltage. The results show that the parameters affecting the breakdown voltage and discharge stability of SDBD-PA are as follows:frequency f, electrode gap d₁ and the length of the actuator L; the fitting ternary quadratic regression model is proved to have good accuracy and can be used as the prediction model of SDBD-PA breakdown voltage; f is the most influential parameter to SDBD-PA breakdown voltage, followed by L and d₁;f and L have a negative effect on the breakdown voltage, while d₁ has a positive effect; the interaction between d₁ and f and between f and L also have a great influence on the breakdown voltage, but the interaction between d₁ and L has a very small influence on the breakdown voltage.

Key words: MEMS detonator, explosive foil, semiconductor bridge, energetic material, porous silicon

中图分类号:

TJ45

胡腾江, 任炜, 赵玉龙. MEMS起爆器研究现状与发展趋势[J]. 机械工程学报, 2021, 57(22): 359-368.

HU Tengjiang, REN Wei, ZHAO Yulong. Research Status and Development Trend of MEMS Detonators[J]. Journal of Mechanical Engineering, 2021, 57(22): 359-368.

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