关键词: Si3N4, 调Q脉冲CO2激光, 切割, 数学模型

Abstract: Cutting of Si3N4 engineering ceramics with Q-switched pulse CO2 laser. Considering the effective shape of the cut front that has influence to the absorption of the laser beam，a mathematics model considering a simplified 2D geometry based on the geometry of a pulsed laser cut during vaporization cutting process is developed. This model is based on the energy balance. The experiment results show that it would realize crack-free cutting by using high speed and multi-pass cutting.

Key words: Cutting, Mathematics model, Q-switched pulse CO2 laser, Si3N4