微通道结构带状电极电火花加工方法研究

doi:10.3901/JME.2022.19.283

机械工程学报 ›› 2022, Vol. 58 ›› Issue (19): 283-292.doi: 10.3901/JME.2022.19.283

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微通道结构带状电极电火花加工方法研究

褚旭阳, 周可升, 庄伟煌, 周伟

厦门大学机电工程系厦门 361005

收稿日期:2021-11-01 修回日期:2022-06-28 出版日期:2022-10-05 发布日期:2023-01-05
作者简介:褚旭阳，男，1981年出生，博士，副教授。主要研究方向为微细电火花加工技术、微通道反应器技术等。E-mail：chuxy@xmu.edu.cn
基金资助:
国家自然科学基金(51975496)、福建省对外合作(2021I0004)和厦门市青年创新基金(3502Z20206035)资助项目。

Study on EDM Method Based on Strip Electrode for Micro-channel Structure

CHU Xuyang, ZHOU Kesheng, ZHUANG Weihuang, ZHOU Wei

Department of Mechanical and Electrical Engineering, Xiamen University, Xiamen 361005

Received:2021-11-01 Revised:2022-06-28 Online:2022-10-05 Published:2023-01-05

摘要/Abstract

摘要： 针对大厚度、高深宽比金属微通道结构加工的难题，提出一种带状电极电火花加工方法，利用厚度30～100 μm的带状电极，在金属基体上高效制造微通道结构。研究了带状电极电火花加工机理，建立了带状电极在加工间隙中的运动模型，分析了影响带状电极运动的主要因素，搭建了带状电极电火花加工装置，开展了微通道结构带状电极加工实验研究，获得了带状电极电火花加工基础工艺规律。利用带状电极电火花加工方法成功加工出的具有200条微通道的反应器结构和44×45微换热器阵列结构，表明带状电极电火花加工可以实现窄宽度(100 μm以下)、大厚度(35 mm以上)、高深宽比(10以上)和高精度(缝宽标准差3 μm以内)的大批量微通道结构的高效加工，相关方法和技术有望在微模具、微散热器、微反应器等领域获得推广和应用。

关键词: 带状电极, 电火花线切割加工, 微通道

Abstract: To address the challenges of machining metal microchannel structures with large thickness and high aspect ratio, a strip electrode EDM method is proposed to efficiently fabricate microchannel structures on metal substrates using a strip electrode with a thickness of 30-100 μm. The mechanism of strip electrode EDM is investigated, the motion model of the strip electrode in the machining gap is established, the main factors affecting the motion of the strip electrode are analysed, a strip electrode EDM wire processing device is built, experimental studies on the machining of microchannel structures with strip electrodes are carried out, and the basic process laws of strip electrode EDM is obtained. The successful machining of a reactor structure with 200 microchannels and a 44×45 microheater array structure using the strip electrode EDM method demonstrates that strip electrode EDM can achieve efficient machining of high-volume microchannel structures with narrow width (below 100 μm), large thickness (above 35 mm), high depth to width ratio (above 10) and high accuracy (standard deviation of seam width within 3 μm), and the related method and technology are expected to be promoted and applied in the fields of micro moulds, micro radiators and micro reactors.

Key words: strip electrode, wire-EDM, microchannel

中图分类号:

TG661

褚旭阳, 周可升, 庄伟煌, 周伟. 微通道结构带状电极电火花加工方法研究[J]. 机械工程学报, 2022, 58(19): 283-292.

CHU Xuyang, ZHOU Kesheng, ZHUANG Weihuang, ZHOU Wei. Study on EDM Method Based on Strip Electrode for Micro-channel Structure[J]. Journal of Mechanical Engineering, 2022, 58(19): 283-292.

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微通道结构带状电极电火花加工方法研究

Study on EDM Method Based on Strip Electrode for Micro-channel Structure

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