Abstract: A micromachining system based on diamond tool is built, which can process micro structure in solution. The system is used to scribe the silicon surface in aryldiazonium salt solution (NO2 C6H4N2BF4). Arenes can be connected with silicon atom with covalent bonds. Functionalizing and patterning silicon surface are realized simultaneously. This approach will be employed to build nano-scale functional structures. To obtain microstructures with better quality which will act as a good substrate for the following functionalizing and patterning processes, scanning electron microscopy (SEM) is used to characterize the surface morphology with different cutting force. X-ray photoelectron spectroscopy (XPS) as well as atomic force microscopy (AFM) are used to verify the self-assembly monolayers. Effects of the scribed speed and assembly time on the quality of self-assembled monolayer (SAMs) are discussed, which results in suitable testing parameters (20 mN cutting force, 12 h assembly time and 500 nm/s scribing speed) to produce better films. Atomic force microscopy (AFM) is used to characterize the surface frictional performance. The chemical composition of silicon surface changes after self-assembly, and the friction force of SAMs surface becomes greater.

Key words: Aryl diazonium salts, Mechanochemical method, Monolayer, Silicon