Fundamental Research on Laser-micro Milling Hybrid Processing of Alumina Co-fired Substrate

doi:10.3901/JME.2024.21.397

Abstract

Abstract: Based on the difficult processing problem of Al₂O₃ HTCC, a hybrid processing method of laser-micro milling is proposed. The morphology, dimensions and mechanical properties of the residual metamorphic layer of nanosecond laser-machined aluminum oxide co-fired substrates are investigated followed by milling tests. The results show that the tightly bound alumina particles form a loose metamorphic layer attached to the substrate surface under laser action. The etching depth of the grooves increases with the increase of laser power and the decrease of scanning speed and filling spacing in different degrees between 170-537 µm, 167-493 µm and 170-303 µm, respectively, while the etching width varies between 515-643 µm. The overall hardness of the residual metamorphic layer of the substrate after laser modification was reduced by 82%-96.2% down to 53.9 HV. Compared to pure milling, the laser-micro-milling resulted in improved tool serviceability, largely intact cutting edges and tool profiles, and a reduction in the post-processing surface roughness by 60%-65% down to 0.204 µm.

Key words: Al₂O₃HTCC, laser processing, micro milling, hybrid processing

CLC Number:

TG54
V261

WANG Ziming, HOU Qingjian, XU Lijiang, WANG Yuefei, XIAO He, CHEN Ni, LI Liang. Fundamental Research on Laser-micro Milling Hybrid Processing of Alumina Co-fired Substrate[J]. Journal of Mechanical Engineering, 2024, 60(21): 397-406.

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URL: http://www.cjmenet.com.cn/EN/10.3901/JME.2024.21.397

http://www.cjmenet.com.cn/EN/Y2024/V60/I21/397

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