太赫兹段慢波结构的微细加工技术研究新进展

doi:10.3901/JME.2019.07.187

机械工程学报 ›› 2019, Vol. 55 ›› Issue (7): 187-198.doi: 10.3901/JME.2019.07.187

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太赫兹段慢波结构的微细加工技术研究新进展

吴春亚^1,2, 郭闯强^1,2, 裴旭东², 王廷章², 陈妮^2,3, 陈明君²

1. 哈尔滨工业大学机器人技术与系统国家重点实验室哈尔滨 150080;
2. 哈尔滨工业大学机电工程学院哈尔滨 150080;
3. 南京航空航天大学机电学院南京 210016

收稿日期:2018-04-18 修回日期:2018-10-06 出版日期:2019-04-05 发布日期:2019-04-05
通讯作者: 郭闯强(通信作者),男,1982年出生,博士,副研究员。主要研究方向为电机驱动与机器人控制技术。E-mail:chuangqiang.guo@hit.edu.cn
作者简介:吴春亚,女,1982年出生,博士,副教授,硕士研究生导师。主要研究方向微纳制造与材料界面特性评价。E-mail:chunya.wu@hit.edu.cn;陈明君,男,1971年出生,博士,教授,博士研究生导师。主要研究方向为超精密加工及微纳米制造技术。E-mail:chenmj@hit.edu.cn
基金资助:
“十三五”装备预研共用技术、国家重点研发计划（2017YFB0305903）和国家自然科学基金创新研究群体科学基金（51521003）资助项目。

New Progress of Microfabrication Techniques for Slow Wave Structures at THz Frequencies

WU Chunya^1,2, GUO Chuangqiang^1,2, PEI Xudong², WANG Tingzhang², CHEN Ni^2,3, CHEN Mingjun²

1. State Key Laboratory of Robotics and System, Harbin Institute of Technology, Harbin 150080;
2. School of Mechatronics Engineering, Harbin Institute of Technology, Harbin 150080;
3. College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016

Received:2018-04-18 Revised:2018-10-06 Online:2019-04-05 Published:2019-04-05

摘要/Abstract

摘要： 太赫兹波兼具穿透性强、使用安全性高、定向性好、带宽高等技术特性，在国防、深空通信、远程成像、安全检查和医疗诊断等领域具有重大应用前景。基于慢波结构的电真空器件是在太赫兹频段产生瓦级功率输出，同时实现太赫兹辐射源小型化和经济化最具潜力的一种解决方式。慢波结构作为此类电真空器件的核心零件，其物理设计及制造水平将直接影响器件的带宽和增益，因此，从适合工作在太赫兹频段的慢波结构类型、加工精度与表面质量要求，以及制备工艺3个方面出发，对慢波结构的微细加工技术研究现状进行综述，重点分析太赫兹频段慢波结构的关键制造技术水平及应用现状，并探讨其在发展过程中需要面临的挑战和仍需注重解决的问题，希望能为后续高频器件研究工作的推进提供参考。

关键词: 电真空器件, 慢波结构, 太赫兹波, 微细加工

Abstract: Since terahertz (THz) radiation is characterized with strong penetrability, high security, good directionality, and wide bandwidth, the potential applications of THz technology are becoming increasing widespread, including national defense, deep space communications, remote high resolution imaging, concealed weapon or threat detection, biomedical diagnostics, etc. Vacuum electron device (VED) based on slow wave structures (SWSs) is the most promising solution for the generation of watt-level power at THz frequencies in a compact and affordable way. As a key part of VED, the physical design and fabrication technique for SWSs will directly influence the bandwidth and gain of VED. Therefore, this work reviews the development of the available microfabrication techniques for SWSs from three aspects, i.e., the specific types of SWSs suitable for working at THz frequencies, the requirement of manufacturing precision and surface quality for SWSs, and the corresponding microfabrication processing. The respective capabilities and application status of fabrication technologies for SWSs in the THz regime have been analyzed, with the main challenges needing to be responded to and the problems needing to be solved discussed in detail. This work is expected to present reference background for advancing the development of high frequency devices.

Key words: microfabrication, slow wave structure, terahertz radiation, vacuum electron device

中图分类号:

TH161

吴春亚, 郭闯强, 裴旭东, 王廷章, 陈妮, 陈明君. 太赫兹段慢波结构的微细加工技术研究新进展[J]. 机械工程学报, 2019, 55(7): 187-198.

WU Chunya, GUO Chuangqiang, PEI Xudong, WANG Tingzhang, CHEN Ni, CHEN Mingjun. New Progress of Microfabrication Techniques for Slow Wave Structures at THz Frequencies[J]. Journal of Mechanical Engineering, 2019, 55(7): 187-198.

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太赫兹段慢波结构的微细加工技术研究新进展

New Progress of Microfabrication Techniques for Slow Wave Structures at THz Frequencies

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