电磁-抗磁混合悬浮式倾角传感器设计研究

doi:10.3901/JME.260374

机械工程学报 ›› 2026, Vol. 62 ›› Issue (7): 234-243.doi: 10.3901/JME.260374

• 机械动力学 • 上一篇

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电磁-抗磁混合悬浮式倾角传感器设计研究

徐园平¹, 张迎澳¹, 江琦琦¹, 周瑾¹, 王鸣昕²

1. 南京航空航天大学机电学院南京 210016;
2. 中电鹏程智能装备有限公司南京 210016

收稿日期:2025-03-29 修回日期:2025-12-13 发布日期:2026-05-25
作者简介:徐园平(通信作者)，男，1989年出生，博士，副教授，博士研究生导师。主要研究方向为磁悬浮技术、智能传感与驱动、转子动力学。E-mail:ypxu@nuaa.edu.cn
张迎澳，男，1999年出生，硕士研究生。主要研究方向为抗磁悬浮倾角传感器。E-mail:2205153@nuaa.edu.cn
江琦琦，男，1998年出生，博士研究生。主要研究方向为神经网络，电机，抗磁悬浮倾角传感器。E-mail:qqj77@nuaa.edu.cn
周瑾，女，1972年出生，博士，教授，博士研究生导师。主要研究方向为磁悬浮技术、转子动力学、机电系统控制。E-mail:zhj@nuaa.edu.cn
王鸣昕，男，1985年出生，博士研究生。主要研究方向为半导体芯片设计。E-mail:mingxinwang@cecpie.com
基金资助:
国家自然科学基金(52275537)和南京市级重大科技专项(202209011)资助项目。

Design Study of Electromagnetic-diamagnetic Hybrid Levitation Inclination Sensor

XU Yuanping¹, ZHANG Yingao¹, JIANG Qiqi¹, ZHOU Jin¹, WANG Mingxin²

1. College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016;
2. Zhongdian Pengcheng Intelligent Equipment Co., Ltd., Nanjing 210016

Received:2025-03-29 Revised:2025-12-13 Published:2026-05-25

摘要/Abstract

摘要： 倾角传感器广泛应用于装备姿态监测、山体滑坡预警等领域。抗磁悬浮技术具有被动稳定悬浮的特点，可突破接触式机械摩擦的局限性，实现敏感元件的快速自由响应，在高精度倾角传感器的设计上具备天然优势。现有研究主要聚焦于自稳定区域内的敏感元件的输入输出映射关系，导致传感器工作量程较小(±1.1°)。基于此，结合光学测量手段提出了一种可调灵敏度大量程单轴电磁-抗磁混合悬浮式倾角传感器设计方法。该倾角传感器采用抗磁性物质石墨板与感应线圈构成的新型敏感元件结构作为检测单元，通过“Opposite1D”式永磁体排列布局实现了敏感元件非测量轴的被动稳定悬浮，引入轴向交流感应电磁驱动技术使得传感器工作区间不再局限于自稳定区域。基于敏感元件悬浮位置随倾角变化而变化的特点，采用光学测量手段提出了自稳定区域外的倾角测量方法并搭建了实验平台，对各参数下的感应驱动力及倾角位移进行了测量实验。实验表明该倾角传感器可实现±10.8°角度范围的测量，灵敏度可达1.168 mm/(°)；并且传感器灵敏度可在1.168 mm/(°)至2.623 mm/(°)的范围内进行调节。具有无摩擦、大量程及可调灵敏度的特点，在微小倾角的精密测量领域具有很大的应用价值。

关键词: 倾角传感器, 抗磁悬浮, 交变磁场, 大量程

Abstract: Inclination sensors are widely used in equipment attitude monitoring and other fields. Diamagnetic levitation technology has the characteristics of passive stable levitation, which can break through the limitations of contact mechanical friction and realize the fast and free response of the sensitive element, and has a natural advantage in the design of high-precision inclination sensor. Existing studies mainly focus on the input-output mapping relationship of the sensitive element in the self-stabilized region, resulting in a small sensor operating range (±1.1°). Based on this, an adjustable sensitivity and large range single-axis electromagnetic-Diamagnetic hybrid levitated inclination sensor design method is proposed in combination with optical measurement means. The inclination sensor adopts a new type of sensitive element structure composed of diamagnetic graphite plate and induction coil as the detection unit, realizes the passive and stable levitation of the sensitive element in the non-measuring axis through the layout of the “Opposite1D” type permanent magnet arrangement, and introduces the axial AC induction electromagnetic drive technology so that the sensor working range is no longer limited to the self-stabilized region. The experimental verification, experiments show that the inclination sensor can realize the measurement of ±10.8° angular range, and the sensitivity can reach 1.168 mm/(°); and the sensor sensitivity can be adjusted in the range of 1.168 mm/(°) to 2.623 mm/(°). With the characteristics of frictionless, large range and adjustable sensitivity, it is of great value in the field of precision measurement of small inclination angle.

Key words: inclination sensor, diamagnetic levitation, alternating magnetic field, large range

中图分类号:

TP212

徐园平, 张迎澳, 江琦琦, 周瑾, 王鸣昕. 电磁-抗磁混合悬浮式倾角传感器设计研究[J]. 机械工程学报, 2026, 62(7): 234-243.

XU Yuanping, ZHANG Yingao, JIANG Qiqi, ZHOU Jin, WANG Mingxin. Design Study of Electromagnetic-diamagnetic Hybrid Levitation Inclination Sensor[J]. Journal of Mechanical Engineering, 2026, 62(7): 234-243.

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链接本文: http://www.cjmenet.com.cn/CN/10.3901/JME.260374

http://www.cjmenet.com.cn/CN/Y2026/V62/I7/234

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电磁-抗磁混合悬浮式倾角传感器设计研究

Design Study of Electromagnetic-diamagnetic Hybrid Levitation Inclination Sensor

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