基于液态金属传感的自感知软体机械手制备及性能测试

doi:10.3901/JME.2024.23.130

机械工程学报 ›› 2024, Vol. 60 ›› Issue (23): 130-139.doi: 10.3901/JME.2024.23.130

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基于液态金属传感的自感知软体机械手制备及性能测试

王权岱, 董文斌, 黄乐, 高广明, 杨振朝, 赵仁峰, 李言

西安理工大学机械与精密仪器工程学院西安 710048

收稿日期:2023-12-10 修回日期:2024-06-19 出版日期:2024-12-05 发布日期:2025-01-23
作者简介:王权岱，男，1969年出生，博士，教授，博士研究生导师。主要研究方向为3D打印工艺及应用、软体机器人、机械表面科学。E-mail：quandaiw@163.com
基金资助:
国家自然科学基金资助项目(51775431，52075439)。

Fabrication and Its Performance Test of Soft Manipulator Embeded with Sensors Based on Liquid Metal Alloy

WANG Quandai, DONG Wenbin, HUANG Le, GAO Guangming, YANG Zhenchao, ZHAO Renfeng, LI Yan

School of Mechanical and Precision Instrument Engineering, Xi'an University of Technology, Xi'an 710048

Received:2023-12-10 Revised:2024-06-19 Online:2024-12-05 Published:2025-01-23

摘要/Abstract

摘要： 传统刚性机械手在人-机交互的场合存在潜在的安全性问题。在本体嵌入传感器的软体机械手凭借其柔性材料天然的柔顺性以及对自身状态和环境变化的感知能力，在非结构化工作环境的人机交互、易碎及不规则外形物品分拣以及医疗康复助力器械等方面具有良好的应用前景。然而传统传感器属于刚性体，无法匹配软体机械手反复拉伸弯曲工作条件下的大变形。论文采用镓铟锡液态金属合金代替传统电线作为导电体，通过纳秒激光对柔性基底表面处理改变液态金属在表面的润湿性实现液态金属图形化，从而制备出压力和弯曲传感元件；通过实验对所制备的柔性传感器的灵敏性和稳定性进行了测试；基于上述传感器制备工艺，制备了具有压力和弯曲状态自感知的软体机械手，通过实验测试了其对复杂形状物体的抓取能力以及操作过程中的自感知能力。提出一种具有自感知能力的软体机械手的设计制备方法，研究结果在软体机器人、康复辅助器械以及可穿戴柔性皮肤等方面也具有借鉴意义。

关键词: 软体机械手, 柔性传感器, 液态金属合金, 纳秒激光处理

Abstract: Traditional rigid manipulator is impeded by the potential safety issues in the context of human-machine interaction. Due to the natural compliance of its flexible materials and the ability to perceive the variation in its own action state and environment, the soft manipulator embedded with the sensors shows broad potential applications in man-machine interaction in unstructured working environment, sorting of fragile items or items with irregular shape, and medical rehabilitation assist equipment, etc. However，conventional sensors are rigid bodies and cannot match the large deformation under working conditions of repeated stretching and bending of soft manipulators. Gallium indium tin liquid metal alloy is used as conductors instead of traditional wires and the liquid metal patterning have been implemented by modifying the wettability of liquid metal on the substrate through surface treatment with nanosecond laser. Then the pressure and bending sensing elements have been prepared and the sensitivity and stability of the prepared flexible sensor were tested through experiments. Based on the sensor fabrication process mentioned above, a soft manipulator with self-perception of pressure and bending state was prepared and its grasping ability of complex shape objects and self-perception ability during operation are tested by experiments. This study provides a design and preparation method for soft manipulators with self-perception ability and the research results also have reference significance in soft robots, rehabilitation aids and wearable flexible skin.

Key words: soft manipulators, flexible sensors, liquid metal alloys, nanosecond laser processing

中图分类号:

TP241

王权岱, 董文斌, 黄乐, 高广明, 杨振朝, 赵仁峰, 李言. 基于液态金属传感的自感知软体机械手制备及性能测试[J]. 机械工程学报, 2024, 60(23): 130-139.

WANG Quandai, DONG Wenbin, HUANG Le, GAO Guangming, YANG Zhenchao, ZHAO Renfeng, LI Yan. Fabrication and Its Performance Test of Soft Manipulator Embeded with Sensors Based on Liquid Metal Alloy[J]. Journal of Mechanical Engineering, 2024, 60(23): 130-139.

参考文献

[1] 张进华，王韬，洪军，等. 软体机械手研究综述[J]. 机械工程学报，2017，53(13)：19-28. ZHANG Jinhua，WANG Tao，HONG Jun，et al. Review of soft-bodied manipulator[J]. Journal of Mechanical Engineering，2017，53(13)：19-28.
[2] TAWK C，ALICI G. A review of 3D-printable soft pneumatic actuators and sensors：Research challenges and opportunities[J]. Advanced Intelligent Systems，2021，3(6)：2640-4567.
[3] 蔡世波，陶志成，万伟伟，等. 机器人多指灵巧手的研究现状、趋势与挑战[J]. 机械工程学报，2021，57(15)：1-14. CAI Shibo，TAO Zhicheng，WANG Weiwei，et al. Robots mostly refer to the research status，trends and challenges of dexterous hands[J]. Journal of Mechanical Engineering，2021，57(15)：1-14.
[4] XAVIER S M，TAWKD. C，ZOLFAGHARIAN A，et al. Soft pneumatic actuators：A review of design，fabrication，modeling，sensing，control and applications[J]. IEEE Access，2022，10：59442-59485.
[5] SHINTAKE J，CACUCCIOLO V，FLOREANO D，et al. Soft robotic grippers[J]. Advanced Materials，2018，30(29)：1707035.1-1707035.33.
[6] 鲍官军，张亚琪，许宗贵，等. 软体机器人气压驱动结构研究综述[J]. 高技术通讯，2019，29(5)：13. BAO Guanjun，ZHANG Yaqi，XU Zonggui，et al. A review of the research on pneumatic drive structure of soft robots[J]. High Technology Letters，2019，29(5)：13.
[7] GALLOWAY K C，BECKER K P，PHILLIPS B，et al. Soft robotic grippers for biological sampling on deep reefs[J]. Soft robotics，2016，3(1)：23-33.
[8] XIE M，ZHU M，YANG Z，et al. Flexible self-powered multifunctional sensor for stiffness-tunable soft robotic gripper by multimaterial 3D printing[J]. Nano Energy，2021，79：105438.
[9] LIU F，SUN F，FANG B，et al. Hybrid robotic grasping with a soft multimodal gripper and a deep multistage learning scheme[J]. IEEE Transactions on Robotics，2023，39(3)： 2379-2399.
[10] WONG PONCE R D，POSNER J D，SANTOS V J. Flexible microfluidic normal force sensor skin for tactile feedback[J]. Sensors and Actuators A： Physical，2012，179(1)：62-69.
[11] PARK Y L，CHEN R，WOOD J. Design and fabrication of soft artificial skin using embedded microchannels and liquid conductors[J]. IEEE Sensors Journal，2012，12(8)：2711-2718.
[12] PARK Y L，TEPAYOTL-RAMIREZ D，WOOD R J，et al. Influence of cross-sectional geometry on the sensitivity and hysteresis of liquid-phase electronic pressure sensors[J]. Applied Physics Letters，2012，101(19)：1097-1104.
[13] LU S，CHEN D，HAO R，et al. Design，fabrication and characterization of soft sensors through EGaIn for soft pneumatic actuators[J]. Measurement，2020，164：107996.
[14] 张福林，何建国，刘洋，等. 树脂/石墨复合材料激光烧蚀与累积效应研究[J]，机械工程学报，2022，25(15)：302-312. ZHANG Fulin，HE Jianguo，LIU Yang，et al. Study on laser ablation and cumulative effect of resin/graphite composites[J]. Journal of Mechanical Engineering，2022，25(15)：302-312.
[15] ZHANG J，ZHANG K，YONG J，et al. Femtosecond laser preparing patternable liquid-metal-repellent surface for flexible electronics[J]. Journal of Colloid and Interface Science，2020，578.
[16] DOUDRICK K，LIU S，MUTUNGA E M，et al. Different shades of oxide： From nanoscale wetting mechanisms to contact printing of gallium-based liquid metals[J]. Langmuir，2014，30(23)： 6867-6877.
[17] JOHNSON K，KENDALL K. Surface energy and the contact of elastic solids[J]. Proc. R. Soc. London，A. 1971，324(58)：301−313.
[18] ISRAELACHVILI J N. Intermolecular and surface forces[M]. California： Intermolecular And Surface Forces，2011.
[19] DICKEY M D，CHIECHI R C，LARSEN R J，et al. Eutectic Gallium-Indium (EGaIn)：A liquid metal alloy for the formation of stable structures in microchannels at room temperature[J]. Advanced Functional Materials，2008，18(7)：1097-1104.
[20] DOUDRICK K，LIU S，MUTUNGA E M，et al. Different shades of oxide：From nanoscale wetting mechanisms to contact printing of gallium-based liquid metals[J]. Langmuir，2014，30(23)：6867-6877.
[21] TAKADOUM J. Materials and surface engineering in tribology[M]. France：Materials Science，2008.
[22] PAXSON A T，VARANASI K K. Self-similarity of contact line depinning from textured surfaces[J]. Nature Communications，2013，4：1492.
[23] 顾秦铭，张朝阳，周晖，等. 激光-电化学沉积制备超疏水铜表面及其Cassie状态稳定性研究[J]，机械工程学报，2020，56(1)：223-232. GU Qinming，ZHANG Chaoyang，ZHOU Hui，et al. Preparation of superhydrophobic copper surface by laser-electrochemical deposition and its Cassie state stability study[J]. Journal of Mechanical Engineering，2020，56(1)：223-232.

基于液态金属传感的自感知软体机械手制备及性能测试

Fabrication and Its Performance Test of Soft Manipulator Embeded with Sensors Based on Liquid Metal Alloy

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