光学相干成像技术在激光加工过程实时监测与控制中的应用研究进展

doi:10.3901/JME.2023.15.216

机械工程学报 ›› 2023, Vol. 59 ›› Issue (15): 216-231.doi: 10.3901/JME.2023.15.216

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光学相干成像技术在激光加工过程实时监测与控制中的应用研究进展

梅雪松^1,2,3, 孙涛^1,2,3, 赵万芹^1,2,3, 凡正杰^1,2,3, 张涛^1,2,3, 唐程^1,2,3, 崔健磊^1,2,3, 王文君^1,2,3

1. 西安交通大学机械工程学院西安 710049;
2. 西安交通大学机械制造系统工程重点实验室西安 710049;
3. 西安交通大学陕西省智能机器人重点实验室西安 710049

收稿日期:2022-11-09 修回日期:2023-04-24 出版日期:2023-08-05 发布日期:2023-09-27
通讯作者: 赵万芹(通信作者),女,1983年出生,博士,副研究员,硕士研究生导师。主要研究方向为激光光束调控精密加工及其监测技术等。E-mail:linazhao@xjtu.edu.cn
作者简介:梅雪松,男,1963年出生,博士,教授,博士研究生导师。主要研究方向为激光精密加工与视觉导航,智能工厂与数字孪生,人工智能与移动机器人等。E-mail:xsmei@xjtu.edu.cn
基金资助:
国家科技重大专项(2019-VII-0009-0149)、国家自然科学基金(52105465)、航空发动机及燃气轮机基础科学中心(P2022-A-IV-002-003)、中央高校基本科研业务费专项资金(xzd012022084)和西安交通大学基本科研业务费(xyz022022027)资助项目

Recent Advances of Optical Coherence Tomography Technology in Real-time Monitoring and Control of Laser Processing

MEI Xuesong^1,2,3, SUN Tao^1,2,3, ZHAO Wanqin^1,2,3, FAN Zhengjie^1,2,3, ZHANG Tao^1,2,3, TANG Cheng^1,2,3, CUI Jianlei^1,2,3, WANG Wenjun^1,2,3

1. School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an 710049;
2. State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049;
3. Shaanxi Key Laboratory of Intelligent Robots, Xi'an Jiaotong University, Xi'an 710049

Received:2022-11-09 Revised:2023-04-24 Online:2023-08-05 Published:2023-09-27

摘要/Abstract

摘要： 激光加工技术,主要包括激光焊接技术、激光增材制造技术和激光减材制造技术,具有高加工质量、效率、无工具磨损等优点,在航空航天、生物医疗、通讯电子等领域应用广泛。随着产品精度与性能要求的逐渐提升,对激光加工的精度、效率及可控性提出了更高要求。因此,激光加工过程实时监测及调控成为当前的研究重点。相比于传统的光声热电传感监测,光学相干成像技术可以与激光束同轴耦合,从而直接获取激光加工结构的尺寸和形貌特征,具有高成像速度、高测量分辨率以及长测量范围等优点,被广泛应用于激光加工过程实时监测中。系统介绍了光学相干成像系统的基本组成、成像原理以及系统指标,在此基础上综述了光学相干成像技术在激光焊接、激光增材制造和激光减材制造实时监测与控制中的应用。最后,归纳了目前光学相干成像技术在激光加工过程监测中存在的不足和发展趋势,为激光加工过程实时监测与控制的研究工作提供了坚实基础和发展方向。

关键词: 激光加工, 实时监测, 过程控制, 光学相干成像, 研究展望

Abstract: Laser processing technology, including laser welding, additive manufacturing, subtractive manufacturing, and so on, has the advantages of high machining quality, high efficiency, and no tool wear, which is widely used in aerospace, biomedicine, communication electronics and other fields. With the improvement of precision and performance requirements, higher requirements are put forward for the precision, efficiency and controllability of laser processing. Therefore, real-time monitoring and control of laser processing has been widely concerned. Compared with the traditional optical, acoustic, thermal, electric sensing monitoring, optical coherence tomography can directly obtain the depth and morphology of the structure in laser processing via coaxially coupled with the laser beam, which has the advantages of high imaging speed, high measurement resolution and long measurement range, and is widely used in the real-time monitoring of laser processing. The basic setup, imaging principle and index of optical coherence tomography are introduced systematically. And the application of optical coherence tomography technology in real-time monitoring of laser welding, laser additive manufacturing and laser subtractive manufacturing is reviewed. Finally, the disadvantages and development trend of optical coherence tomography in real-time monitoring and control of laser processing are summarized, which provides a solid foundation and development perspective for the study of real-time monitoring and control of laser processing.

Key words: laser processing, real-time monitoring, process control, optical coherence tomography, research prospect

中图分类号:

梅雪松, 孙涛, 赵万芹, 凡正杰, 张涛, 唐程, 崔健磊, 王文君. 光学相干成像技术在激光加工过程实时监测与控制中的应用研究进展[J]. 机械工程学报, 2023, 59(15): 216-231.

MEI Xuesong, SUN Tao, ZHAO Wanqin, FAN Zhengjie, ZHANG Tao, TANG Cheng, CUI Jianlei, WANG Wenjun. Recent Advances of Optical Coherence Tomography Technology in Real-time Monitoring and Control of Laser Processing[J]. Journal of Mechanical Engineering, 2023, 59(15): 216-231.

参考文献

[1] MAIMAN T H. Stimulated optical radiation in ruby[J]. Nature,1960,187:493-497.
[2] WU Di,ZHANG Peilei,YU Zhishui,et al. Progress and perspectives of in-situ optical monitoring in laser beam welding:Sensing,characterization and modeling[J]. Journal of Manufacturing Processes,2022,75:767-791.
[3] DUAN Wenqiang,MEI Xuesong,FAN Zhengjie,et al. Removal of recast layer in the laser drilled film cooling holes by a two-step inner streaming electrochemical technique[J]. Journal of Micromechanics and Microengineering,2021,31(7):075006.
[4] 姜澜,胡洁,王国燕,等. 电子动态调控超快激光微纳制造[J]. 中国基础科学,2016,18(705):11-27. JIANG Lan,HU jie,WANG Guoyan,et al.Ultrafast laser micro/nano fabrication based on electrons dynamics control[J]. China Basic Science,2016,18(705):11-27.
[5] ZHANG Yiming,ITO Y,SUN Huijun,et al. Investigation of multi-timescale processing phenomena in femtosecond laser drilling of zirconia ceramics[J]. Optics Express,2022,30(21):37394-406.
[6] ZHANG Jiaqi,YUAN Songmei,WEI Jiayong,et al. Spatio-temporal multi-scale observation of the evolution mechanism during millisecond laser ablation of SiCf/SiC[J]. Ceramics International,2022,48(16):23885-96.
[7] SUN Tao,MEI Xuesong,SUN Xiaomao,et al. Real-time monitoring and control of the breakthrough stage in ultrafast laser drilling based on sequential three-way decision[J]. IEEE Transactions on Industrial Informatics,2022,19(4):5422-32.
[8] WANG Rujia,WANG Kedian,DONG Xia,et al. An experimental investigation into the defects of laser-drilled holes in thermal barrier coated Inconel 718 superalloys[J]. The International Journal of Advanced Manufacturing Technology,2018,96(1-4):1467-81.
[9] YEUNG H,KIM F H,DONMEZ M A,et al. Keyhole pores reduction in laser powder bed fusion additive manufacturing of nickel alloy 625[J]. International Journal of Machine Tools and Manufacture,2022,183:103957.
[10] 丁烨,薛遥,庞继红,等. 激光加工在线监测技术研究进展[J]. 中国科学:物理学力学天文学,2019,49(4):60-78. DING Ye,XUE Yao,PANG Jihong,et al. Advances in in-situ monitoring technology for laser processing[J]. Sci Sin-Phys Mech Astron,2019,49(4):60-78.
[11] 曹龙超,周奇,韩远飞,等. 激光选区熔化增材制造缺陷智能监测与过程控制综述[J]. 航空学报,2021,42(10):199-233. CAO Longchao,ZHOU Qi,HAN Yuanfei,et al. Review on intelligent monitoring of defects and process control of selective laser melting additive manufacturing[J]. Acta Aeronautica et Astronautica Sinica,42(10):199-233.
[12] KONG Lingbao,PENG Xing,CHEN Yao,et al. Multi-sensor measurement and data fusion technology for manufacturing process monitoring:A literature review[J]. International Journal of Extreme Manufacturing,2020,2(2):022001.
[13] SING S L,KUO C N,SHIH C T,et al. Perspectives of using machine learning in laser powder bed fusion for metal additive manufacturing[J]. Virtual and Physical Prototyping,2021,16(3):372-86.
[14] HUSSAIN S,MUBEEN I,ULLAH N,et al. Modern diagnostic imaging technique applications and risk factors in the medical field:A review[J]. Biomed. Res. Int.,2022,2022:5164970.
[15] HEILES B,TERWIEL D,MARESCA D. The advent of biomolecular ultrasound imaging[J]. Neuroscience,2021,474:122-33.
[16] LAINS I,WANG J C,CUI Ying,et al. Retinal applications of swept source optical coherence tomography (OCT) and optical coherence tomography angiography (OCTA)[J]. Prog. Retin. Eye Res.,2021,84:100951.
[17] HUANG D,SWANSON E A,LIN C P,et al. Optical coherence tomography[J]. Science,1991,254(5035):1178-81.
[18] DREXLER W,FUJIMOTO J G. Optical coherence tomography technology and applications[M]. Switzerland:Springer Cham,2015.
[19] 李培,杨姗姗,丁志华,等. 傅里叶域光学相干层析成像技术的研究进展[J]. 中国激光,2018,45(2):153-63. LI Pei,YANG Shanshan,DING Zhihua,et al. Research progress in Fourier domain optical coherence tomography[J]. Chinese Journal of Lasers,2018,45(2):153-63.
[20] CHOMA M A,SARUNIC M V,YANG C,et al. Sensitivity advantage of swept source and Fourier domain optical coherence tomography[J]. Optics Express,2003,11(18):2183-9.
[21] WOJTKOWSKI M,SRINIVASAN V J,KO T H,et al. Ultrahigh-resolution,high-speed,Fourier domain optical coherence tomography and methods for dispersion compensation[J]. Optics Express,2004,12(11):2404-22.
[22] YASUNO Y,MADJAROVA V D,MAKITA S,et al. Three-dimensional and high-speed swept-source optical coherence tomography for in vivo investigation of human anterior eye segments[J]. Optics Express,2005,13(26):10652-64.
[23] 靖志成,胡建明,郭袁俊. 光学相干层析成像的原理、应用与发展[J]. 重庆师范大学学报,2021,38(4):107-120. JING Zhicheng,HU Jianming,GUO Yuanjun. The principle,application and development of optical coherence tomography[J]. Journal of Chongqing Normal University,2021,38(4):107-120.
[24] BUNAZIV I,AKSELSEN O M,REN X,et al. Laser beam and laser-arc hybrid welding of aluminium alloys[J]. Metals,2021,11(8):1150.
[25] WANG Zhiming,OLIVEIRA J P,ZENG Zhi,et al. Laser beam oscillating welding of 5A06 aluminum alloys:Microstructure,porosity and mechanical properties[J]. Optics & Laser Technology,2019,111:58-65.
[26] YUSOF M F M,ISHAK M,GHAZALI M F. Classification of weld penetration condition through synchrosqueezed-wavelet analysis of sound signal acquired from pulse mode laser welding process[J]. Journal of Materials Processing Technology,2020,279:116559.
[27] ZHANG Zhehao,LI Bin,ZHANG Weifeng,et al. Real-time penetration state monitoring using convolutional neural network for laser welding of tailor rolled blanks[J]. Journal of Manufacturing Systems,2020,54:348-60.
[28] NGO A K,KOLLIAS N,SHARMA U,et al. Laser welding of urinary tissues,ex vivo,using a tunable Thulium fiber laser[C]//Proceeding of SPIE-Photonic Therapeutic and Diagnostics II. San Jose,California,United States,February 2006:60781B,
[29] WEBSTER P J L,MULLER M S,FRASER J M. High speed in situ depth profiling of ultrafast micromachining[J]. Optics Express,2007,15(23):14967-72.
[30] MULLER M S,WEBSTER P J L,FRASER J M. Time-gated Fourier-domain optical coherence tomography[J]. Optics Letters,2007,32(22):3336-8.
[31] WEBSTER P J,WRIGHT L G,JI Y,et al. Automatic laser welding and milling with in situ inline coherent imaging[J]. Opt. Lett.,2014,39(21):6217-20.
[32] BLECHER J J,GALBRAITH C M,VAN VLACK C,et al. Real time monitoring of laser beam welding keyhole depth by laser interferometry[J]. Science and Technology of Welding and Joining,2014,19(7):560-4.
[33] SCHMOELLER M,STADTER C,LIEBL S,et al. Inline weld depth measurement for high brilliance laser beam sources using optical coherence tomography[J]. Journal of Laser Applications,2019,31(2):022409.
[34] STADTER C,SCHMOELLER M,ZEITLER M,et al. Process control and quality assurance in remote laser beam welding by optical coherence tomography[J]. Journal of Laser Applications,2019,31(2):022408.
[35] STADTER C,SCHMOELLER M,VON RHEIN L,et al. Real-time prediction of quality characteristics in laser beam welding using optical coherence tomography and machine learning[J]. Journal of Laser Applications,2020,32(2):022406.
[36] SCHMOELLER M,WEISS T,GOETZ K,et al. Inline weld depth evaluation and control based on OCT keyhole depth measurement and fuzzy control[J]. Processes,2022,10(7):1422.
[37] MA Deyuan,JIANG Ping,SHU Leshi,et al. Real-time porosity monitoring during laser welding of aluminum alloys based on keyhole 3D morphology characteristics[J]. Journal of Manufacturing Systems,2022,65:70-87.
[38] MA D,JIANG P,SHU L,et al. Multi-sensing signals diagnosis and CNN-based detection of porosity defect during Al alloys laser welding[J]. Journal of Manufacturing Systems,2022,62:334-46.
[39] 刘伟,李能,周标,等. 复杂结构与高性能材料增材制造技术进展[J]. 机械工程学报,2019,55(20):128-159. LIU Wei,LI Neng,ZHOU Biao,et al. Progress in additive manufacturing on complex structures and high-performance materials[J]. Journal of Mechanical Engineering,2019,55(20):128-159.
[40] CHEN Qiang,GUILLEMOT G,GANDIN C A,et al. Three-dimensional finite element thermomechanical modeling of additive manufacturing by selective laser melting for ceramic materials[J]. Additive Manufacturing,2017,16:124-37.
[41] PANWISAWAS C,TANG Y T,REED R C. Metal 3D printing as a disruptive technology for superalloys[J]. Nat Commun,2020,11(1):2327.
[42] 卢秉恒. 增材制造技术——现状与未来[J]. 中国机械工程,2020,31(1):19-23. LU Bingheng. Additive manufacturing-current situation and future[J]. China Mechanical Engineering,2020,31(1):19-23.
[43] NEEF A,SEYDA V,HERZOG D,et al. Low coherence interferometry in selective laser melting[J]. Physics Procedia,2014,56:82-9.
[44] KANKO J A,SIBLEY A P,FRASER J M. In situ morphology-based defect detection of selective laser melting through inline coherent imaging[J]. Journal of Materials Processing Technology,2016,231:488-500.
[45] FLEMING T G,NESTOR S G L,ALLEN T R,et al. Tracking and controlling the morphology evolution of 3D powder-bed fusion in situ using inline coherent imaging[J]. Additive Manufacturing,2020,32:100978.
[46] HIRSCH M,PATEL R,LI W,et al. Assessing the capability of in-situ nondestructive analysis during layer based additive manufacture[J]. Additive Manufacturing,2017,13:135-42.
[47] GUAN Guangying,HIRSCH M,LU Zenghai,et al. Evaluation of selective laser sintering processes by optical coherence tomography[J]. Materials & Design,2015,88:837-46.
[48] GUAN Guangying,LU Zenghai,MATTHIAS H,et al. Towards in-situ process monitoring in selective laser sintering using optical coherence tomography[C]//Proceedings of SPIE-the Laser 3D Manufacturing III,San Francisco,California,United States,April 6,2016:97380Q
[49] GUAN Guangying,HIRSCH M,SYAM W P,et al. Loose powder detection and surface characterization in selective laser sintering via optical coherence tomography[J]. Proc. Math. Phys. Eng. Sci.,2016,472(2191):20160201.
[50] YANG Shanshan,WANG Ling,CHEN Qi,et al. In situ process monitoring and automated multi-parameter evaluation using optical coherence tomography during extrusion-based bioprinting[J]. Additive Manufacturing,2021,47:102251.
[51] ZVAGELSKY R,MAYER F,BEUTEL D,et al. Towards in-situ diagnostics of multi-photon 3D laser printing using optical coherence tomography[J]. Light:Advanced Manufacturing,2022,3(2):466-480.
[52] 梅雪松,杨子轩,赵万芹. 电子陶瓷基板表面激光孔加工综述[J]. 中国激光,2020,47(5):187-202. MEI Xuesong,YANG Zixuan,ZHAO Wanqin. Laser hole drilling on surface of electronic ceramic substrates[J]. Chinese Journal of Lasers,2020,47(5):187-202.
[53] WANG Rujia,DONG Xia,WANG Kedian,et al. Investigation on millijoule femtosecond laser spiral drilling of micro-deep holes in thermal barrier coated alloys[J]. The International Journal of Advanced Manufacturing Technology,2021,114(3-4):857-69.
[54] 翟兆阳,梅雪松,王文君,等. 碳化硅陶瓷基复合材料激光刻蚀技术研究进展[J]. 中国激光,2020,47(6):24-34. ZHAI Zhaoyang,MEI Xuesong,WANG Wenjun,et al. Research advancement on laser etching technology of silicon carbide ceramic matrix composite[J]. Chinese Journal of Lasers,2020,47(6):24-34.
[55] SUN Tao,FAN Zhengjie,SUN Xiaomao,et al. Femtosecond laser drilling of film cooling holes:quantitative analysis and real-time monitoring[C]//Proceedings of the 15th International Conference on Frontiers of Design and Manufacturing,Changchun,China,Aug 17-19,2022.
[56] KAMIYA M,SHIN-ICHIRO A. Real-time monitoring of processed hole depth under femtosecond laser processing[J]. The Review of Laser Engineering,2005,33(10):685-689.
[57] MAHER M A,WEBSTER P J L,CHIAO J C,et al. Coaxial real-time metrology and gas assisted laser micromachining:Process development,stochastic behavior,and feedback control[C]//Proceeding of SPIE-Micromachining and Microfabrication Process Technology XV. San Francisco,California,United States,Februrary 16,2010:759003.
[58] WEBSTER P J L,YU J X Z,LEUNG B Y C,et al. In situ 24 kHz coherent imaging of morphology change in laser percussion drilling[J]. Optics Letters,2010,35(5):646-8.
[59] WEBSTER P J L,WRIGHT L G,MORTIMER K D,et al. Automatic real-time guidance of laser machining with inline coherent imaging[J]. Journal of Laser Applications,2011,23(2):022001.
[60] LEUNG B Y,WEBSTER P J,FRASER J M,et al. Real-time guidance of thermal and ultrashort pulsed laser ablation in hard tissue using inline coherent imaging[J]. Lasers Surg. Med.,2012,44(3):249-56.
[61] JI Y,VLACK C V,WEBSTER P J L,et al. Real-time depth monitoring of galvo-telecentric laser machining by inline coherent imaging[C]//CLEO:QELS_Fundamental Science. San Jose,California,United States; June 9-14,2013:2013.10.1364/CLEO_QELS.2013. JTh2A.05
[62] JI Yang,GRINDAL A W,WEBSTER P J L,et al. Real-time depth monitoring and control of laser machining through scanning beam delivery system[J]. Journal of Physics D:Applied Physics,2015,48(15):155301.
[63] YIN Chenman,RUZZANTE S W,FRASER J M. Automated 3D bone ablation with 1,070 nm ytterbium-doped fiber laser enabled by inline coherent imaging[J]. Lasers Surg. Med.,2016,48(3):288-98.
[64] WIESNER M,IHLEMANN J,MULLER H H,et al. Optical coherence tomography for process control of laser micromachining[J]. Rev. Sci. Instrum.,2010,81(3):033705.
[65] HOLDER D,BOLEY S,BUSER M,et al. In-process determination of fiber orientation for layer accurate laser ablation of CFRP[J]. Procedia CIRP,2018,74:557-61.
[66] HOLDER D,BUSER M,LEIS A,et al. High-precision laser ablation using OCT closed-loop control[C]//Proceeding of SPIE-the Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXV. San Francisico,California,United States,March 2,2020:1126710.
[67] HOLDER D,BUSER M,BOLEY S,et al. Image processing based detection of the fibre orientation during depth-controlled laser ablation of CFRP monitored by optical coherence tomography[J]. Materials & Design,2021,203:109567.
[68] HOLDER D,WEBER R,GRAF T,et al. Analytical model for the depth progress of percussion drilling with ultrashort laser pulses[J]. Applied Physics A,2021,127(5):302.
[69] YAMANARI M,UEMATSU S,ISHIHARA K,et al. Parallel detection of Jones-matrix elements in polarization-sensitive optical coherence tomography[J]. Biomed Opt Express,2019,10(5):2318-36.
[70] SEONG D,LEE C,JEON M,et al. Doppler optical coherence tomography for otology applications:from phantom simulation to in vivo experiment[J]. Applied Sciences,2021,11(12):5711.
[71] ZAITSEV V Y,MATVEYEV A L,MATVEEV L A,et al. Strain and elasticity imaging in compression optical coherence elastography:The two-decade perspective and recent advances[J]. Jounal of Biophotonics,2021,14(2):e202000257.
[72] LIU Rongrong,WINKELMANN J A,SPICER G,et al. Single capillary oximetry and tissue ultrastructural sensing by dual-band dual-scan inverse spectroscopic optical coherence tomography[J]. Light Sci Appl,2018,7:57.
[73] HUO Tiancheng,WANG Chengming,ZHANG Xiao,et al. Ultrahigh-speed optical coherence tomography utilizing all-optical 40 MHz swept-source[J]. J. Biomed. Opt.,2015,20(3):030503.
[74] GUO Baoshan,SUN Jingya,LU Yongfeng,et al. Ultrafast dynamics observation during femtosecond laser-material interaction[J]. International Journal of Extreme Manufacturing,2019,1(3):032004.
[75] 赵圆圆,罗海超,梁紫鑫,等. 光聚合微纳3D打印技术的发展现状与趋势[J]. 中国激光,2022,49(10):330-59. ZHAO Yuanyuan,LUO Haichao,LIANG Zixin,et al. micro-nano 3D printing based on photopolymerization and its development status and trends[J]. Chinese Journal of Lasers,2022,49(10):330-59.
[76] 薛平. 高性能光学相干层析成像的研究[J]. 中国激光,2021,48(15):398-408. XUE Ping. Development of high-performance optical coherence tomography[J]. Chinese Journal of Lasers,2021,48(15):398-408.

光学相干成像技术在激光加工过程实时监测与控制中的应用研究进展

Recent Advances of Optical Coherence Tomography Technology in Real-time Monitoring and Control of Laser Processing

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[3]	袁松梅, 陈博川, 邵梦博. 微小孔钻削刀具制造技术研究进展综述[J]. 机械工程学报, 2023, 59(3): 265-282.
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[5]	刘强, 张海军, 刘献礼, 高大湧, 张明鉴. 智能刀具研究综述[J]. 机械工程学报, 2021, 57(21): 248-268.
[6]	聂祥樊, 李应红, 何卫锋, 罗思海, 周留成. 航空发动机部件激光冲击强化研究进展与展望[J]. 机械工程学报, 2021, 57(16): 293-305.
[7]	赵林杰, 程健, 陈明君, 袁晓东, 廖威, 杨浩, 刘启, 王海军. 熔石英光学元件的CO₂激光加工技术研究新进展[J]. 机械工程学报, 2020, 56(11): 202-218.
[8]	徐钢, 张晓彤, 黎敏, 徐金梧. 基于统计过程控制的流程工业工艺规范制定方法[J]. 机械工程学报, 2019, 55(8): 208-215.
[9]	汤勇, 刘辉龙, 陆龙生, 谢颖熙, 袁伟, 万珍平, 李宗涛, 丁鑫锐. 激光加工平面型微超级电容器的研究进展与发展趋势[J]. 机械工程学报, 2019, 55(4): 189-206.
[10]	蒋凡, 李元锋, 陈树君. 焊接电弧监测技术研究现状及展望[J]. 机械工程学报, 2018, 54(2): 16-26.
[11]	常秋英, 齐烨, 王斌, 乔姣飞. 激光表面织构对45钢干摩擦性能的影响[J]. 机械工程学报, 2017, 53(3): 148-154.
[12]	李果;马士华;龚凤美;王兆华. 基于Supply-Hub的供应物流协同运作研究综述与展望[J]. , 2011, 47(20): 23-33.
[13]	张宇;杨慕升;李晓沛. 面向质量目标的尺寸链和统计公差设计方法[J]. , 2007, 43(4): 1-6.
[14]	刘荷辉;虞钢. 汽车模具复杂棱脊和沟槽的数字化及激光加工轨迹规划[J]. , 2004, 40(12): 155-159.
[15]	李迪;曾安;叶峰;赖乙宗. 短路GMAW焊在线质量监测的多变量统计过程控制方法?[J]. , 2003, 39(8): 86-90.