熔石英光学元件的CO2激光加工技术研究新进展

doi:10.3901/JME.2020.11.202

机械工程学报 ›› 2020, Vol. 56 ›› Issue (11): 202-218.doi: 10.3901/JME.2020.11.202

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熔石英光学元件的CO₂激光加工技术研究新进展

赵林杰^1,2, 程健¹, 陈明君¹, 袁晓东², 廖威², 杨浩¹, 刘启¹, 王海军²

1. 哈尔滨工业大学机电工程学院哈尔滨 150001;
2. 中国工程物理研究院激光聚变研究中心绵阳 621900

收稿日期:2019-08-16 修回日期:2019-12-04 出版日期:2020-06-05 发布日期:2020-06-12
通讯作者: 陈明君(通信作者),男,1971年出生,博士,教授,博士研究生导师。主要研究方向精密超精密加工、先进制造技术及微纳米制造技术。E-mail:chenmj@hit.edu.cn
作者简介:赵林杰,男,1992年出生,博士研究生。主要研究方向为精密超精密加工及先进制造技术。E-mail:zhaolinjie_hit@163.com;程健,男,1987年出生,博士,副教授。主要研究方向为精密超精密加工及表面完整性评价技术。E-mail:cheng.826@hit.edu.cn
基金资助:
国家自然科学基金（51775147,51705105）、科学挑战计划（TZ2016006-0503-01）、哈尔滨工业大学机器人技术与系统国家重点实验室自主课题（SKLRS201718A,SKLRS201803B）、中国科协“青年人才托举工程”（No.2018QNRC001）资助项目。

New Progress of CO₂ Laser Processing Techniquesfor Fused Silica Optics

ZHAO Linjie^1,2, CHENG Jian¹, CHEN Mingjun¹, YUAN Xiaodong², LIAO Wei², YANG Hao¹, LIU Qi¹, WANG Haijun²

1. School of Mechatronics Engineering, Harbin Institute of Technology, Harbin 150001;
2. Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900

Received:2019-08-16 Revised:2019-12-04 Online:2020-06-05 Published:2020-06-12

摘要/Abstract

摘要： 熔石英元件是一种典型的硬脆性且难加工的材料，在传统机械加工中的加工效率极低，并且加工过程中引入的机械弱化层，严重影响了熔石英元件在强冲击、高载荷、高能量环境下的使用寿命。和传统机械加工方法相比，CO₂激光加工技术的优点在于可实现非接触式加工，并且去除精度高和去除效率高。尤其重要的是，CO₂激光加工后的熔石英光学元件无表面/亚表面裂纹、划痕等缺陷，使得CO₂激光加工技术在熔石英元件的加工中得到了重要且广泛的应用。因此，从熔石英元件的CO₂激光加工理论、大口径器件CO₂激光加工工艺、局部区域CO₂激光损伤修复，以及表面微结构加工4个方面出发，对熔石英光学元件的CO₂激光加工技术研究现状进行综述，重点分析了CO₂激光加工技术在熔石英元件大口径器件/局部区域加工的工艺水平现状以及微结构加工的应用现状，并探讨了CO₂激光加工过程中引入的负面效应以及仍需解决的问题，希望为推动CO₂激光加工技术在熔石英元件加工的进一步应用提供参考。

关键词: 熔石英元件, 激光加工, 微结构, 表面改性, 损伤修复

Abstract: Fused silica optics is a typical hard and brittle material, which is inefficient in traditional mechanical processing for the difficult-to-process materials. And the mechanical weakening layer produced on processed surface seriously affects the service life of fused silica optics in the conditions of strong impact, high load, and high energy. Compared with traditional mechanical processing, the advantages of CO₂ laser processing technique are non-contact processing, high removal accuracy and high removal efficiency. Especially, the surface/subsurface cracks and scratches of fused silica optics processed by CO₂ laser do not exist. CO₂ laser processing technique has been widely used in processing of fused silica optics for these advantages. Therefore, this work reviews the development of CO₂ laser processing technique for fused silica optics from four aspects, i.e., the CO₂ laser processing theory of fused silica optics, the CO₂ laser processing technology for large-aperture optical elements, the CO₂ laser mitigating damages in local regions, and the CO₂ laser processing of surface microstructures. The respective capabilities and application status of CO₂ laser processing techniques for large-aperture or local region fused silica optics and surface microstructures have been analyzed. And the negative effects induced in CO₂ laser processing and the problems needing to be solved discussed in detail. This work is expected to provide reference for further application of CO₂ laser processing techniques for fused silica optics.

Key words: fused silica optics, laser processing, microstructure, surface modification, damage mitigation

中图分类号:

TN249

赵林杰, 程健, 陈明君, 袁晓东, 廖威, 杨浩, 刘启, 王海军. 熔石英光学元件的CO₂激光加工技术研究新进展[J]. 机械工程学报, 2020, 56(11): 202-218.

ZHAO Linjie, CHENG Jian, CHEN Mingjun, YUAN Xiaodong, LIAO Wei, YANG Hao, LIU Qi, WANG Haijun. New Progress of CO₂ Laser Processing Techniquesfor Fused Silica Optics[J]. Journal of Mechanical Engineering, 2020, 56(11): 202-218.

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熔石英光学元件的CO₂激光加工技术研究新进展

New Progress of CO₂ Laser Processing Techniquesfor Fused Silica Optics

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