关键词: 半球谐振子, 高性能制造, 敏度分析, 制造公差分析, 不确定性分析, 性能修调

Abstract: The hemispherical resonator gyroscope (HRG) represents one of the most precise gyroscopes available in present times. The manufacturing accuracy of its core component, the hemispherical resonator (HR), directly governs the operational performance of the gyroscope. Due to limitations inherent in the grinding and polishing processing, the production of high performance resonators cannot be accomplished in a single manufacturing step. Instead, localized tuning becomes necessary based on the results of performance deviation tests. The uncertainties associated with the tuning process significantly impact the yield of resonators. Imposing excessively stringent precision requirements on the tuning process would result in exorbitant manufacturing costs and substantial expenses. This study adopts the methodology of high performance manufacturing in the fabrication of hemispherical resonators with superior capabilities. It investigates the influence of uncertainty in the tuning process on the frequency splitting of the resonator’s core parameter. The sensitivity analysis demonstrates that the low-frequency axis and its orthogonal direction on the rim exhibit the highest demands for process uncertainty. Tolerance analysis reveals that the aforementioned tuning methods can solely achieve the production of high performance hemispherical resonators through reduction in mass removal and enhancement of processing stability. Conversely, employing a four-position orthogonal tuning on the surface of the hemisphere demonstrates low sensitivity and wide tolerances, thereby diminishing the requirements for minimal mass removal and uncertainty in performance arising from the manufacturing processes. Building upon these findings, a spherical adjustment method is proposed that takes into account the uncertainties inherent in the process, and its efficacy is validated through numerical simulations of the frequency splitting adjustment processing. This research holds significant importance in enhancing the efficiency of hemispherical resonator tuning and identifying the most appropriate requirements for tuning processes based on performance specifications.

Key words: hemispherical resonator, high performance manufacturing, sensitivity analysis, tolerance analysis, uncertainty analysis, performance tuning