二自由度并联压电粘滑定位平台

doi:10.3901/JME.2024.11.250

机械工程学报 ›› 2024, Vol. 60 ›› Issue (11): 250-258.doi: 10.3901/JME.2024.11.250

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二自由度并联压电粘滑定位平台

许锰¹, 杨依领¹, 吴高华¹, 崔玉国¹, 魏燕定²

1. 宁波大学浙江省零件轧制成形技术研究重点实验室宁波 315211;
2. 浙江大学浙江省先进制造技术重点实验室杭州 310027

收稿日期:2023-06-06 修回日期:2023-09-13 出版日期:2024-06-05 发布日期:2024-08-02
作者简介:许锰,男,1998年出生。主要研究方向为微/纳米定位技术。E-mail:2111081227@nbu.edu.cn
杨依领(通信作者),男,1987年出生,博士,副教授。主要研究方向为微纳驱动及精密控制、微型机器人、智能结构与振动控制。E-mail:yangyiling@nbu.edu.cn
基金资助:
浙江省自然科学基金(LY22E050002)、宁波市自然科学基金(2022J133)、国家自然科学基金(51805276,51975517)和宁波市重大科技攻关(2022Z062)资助项目。

Two-degree-of-freedom Parallel Piezoelectric Stick-slip Positioning Platform

XU Meng¹, YANG Yiling¹, WU Gaohua¹, CUI Yuguo¹, WEI Yanding²

1. Part Rolling Key Laboratory of Zhejiang Province, Ningbo University, Ningbo 315211;
2. Key Laboratory of Advanced Manufacturing Technology of Zhejiang Province, Zhejiang University, Hangzhou 310027

Received:2023-06-06 Revised:2023-09-13 Online:2024-06-05 Published:2024-08-02

摘要/Abstract

摘要： 针对粘滑运动的周期性循环应力易导致柔顺机构疲劳问题，设计低应力、高分辨率和无耦合的二自由度宏行程定位平台。采用双圆弧仿生柔性铰链设计柔顺驱动单元，减小应力并提高结构刚度。然后，结合压电粘滑驱动与正交导向机构，实现平台的高分辨率、大行程二维并联解耦运动。之后，采用有限元法和伪刚体模型对定位平台进行静力学与动力学分析，并通过Ansys Workbench软件对平台应力、频率和单步位移等进行仿真。最后，搭建实验平台并进行性能测试。实验结果表明：平台最大速度为9.03 mm/s，x和y向位移耦合率为0.89%和0.92%，分辨率为10 nm和11 nm，最大水平与垂直承载能力分别为1.4 N和40 N。实验结果验证了结构设计及理论模型的有效性。

关键词: 压电驱动, 粘滑运动, 低应力, 柔顺机构, 二自由度

Abstract: Regarding the fatigue problem of compliant mechanisms arising from the cyclic stress of viscous-slip motion, a low-stress, high-resolution, decoupled two-degree-of-freedom macro stroke positioning platform is designed. Bionic flexible hinges with double circular arcs are used in designing the compliant driving unit, thus reducing stress and improving structural stiffness. Then, piezoelectric stick-slip driving is combined with the orthogonal guidance mechanism to realize the platform's high-resolution, large-stroke two-dimensional parallel decoupled motion. After that, the finite element method and pseudo-rigid body model are used to analyze the positioning platform statically and dynamically, and the platform stress, frequency, and single-step displacement are simulated by ANSYS Workbench software. Finally, the experimental platform is built, and performances are tested. The experimental results show that the maximum velocity of the platform is 9.03 mm/s, the x- and y-directional displacement coupling rate is 0.89% and 0.92%, the resolution is 10 nm and 11 nm, and the maximum horizontal and vertical load capacity is 1.4 N and 40 N. The validity of the structural design and theoretical model is verified by experimental results.

Key words: piezoelectric actuation, stick-slip motion, low stress, compliant mechanism, two degrees of freedom

中图分类号:

TP242

许锰, 杨依领, 吴高华, 崔玉国, 魏燕定. 二自由度并联压电粘滑定位平台[J]. 机械工程学报, 2024, 60(11): 250-258.

XU Meng, YANG Yiling, WU Gaohua, CUI Yuguo, WEI Yanding. Two-degree-of-freedom Parallel Piezoelectric Stick-slip Positioning Platform[J]. Journal of Mechanical Engineering, 2024, 60(11): 250-258.

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二自由度并联压电粘滑定位平台

Two-degree-of-freedom Parallel Piezoelectric Stick-slip Positioning Platform

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