柔顺精密定位与操作机构研究进展

doi:10.3901/JME.2023.19.024

摘要/Abstract

摘要： 柔顺机构是一种利用柔顺元件的弹性变形来传递或转换运动、力或能量的新型机构。与传统的刚性机构相比，柔顺机构具有高精度、无间隙、无摩擦磨损、免装配及易于小型化等特点，是机构学研究领域的一个重要分支。以精密定位和精密操作两类代表性的柔顺机构为研究对象，从分析与设计、传感与控制等方面介绍了该领域国内外的研究现状、存在的主要问题和发展趋势。

关键词: 柔顺机构, 精密定位, 微纳操作, 传感与控制

Abstract: Compliant mechanism is a new type of mechanism that uses the elastic deformation of compliant elements to transmit or convert motion, force or energy. Compared with the traditional rigid mechanism, the compliant mechanism has many advantages such as high precision, no gap, no friction and wear, no assembly and easy miniaturization, etc. It is an important branch of the field of mechanism science. Taking two types of representative compliant mechanisms, i.e., compliant positioning mechanism and compliant operating mechanism, as the objects, the basic scientific and technical problems faced by compliant mechanism research are summarized from the aspects of design and analysis, sensing and control. The development status of this field is analyzed, and the challenges and development trends that may be faced in the future are prospected.

Key words: compliant mechanisms, precision positioning, micro/nano-manipulation, sensing and control

中图分类号:

TG156

张宪民, 朱本亮, 李海, 陈忠, 王日鑫, 臧浩延. 柔顺精密定位与操作机构研究进展[J]. 机械工程学报, 2023, 59(19): 24-43.

ZHANG Xianmin, ZHU Benliang, LI Hai, CHEN Zhong, WANG Rixin, ZANG Haoyan. Recent Advances in Compliant Precision Positioning and Manipulating Mechanisms[J]. Journal of Mechanical Engineering, 2023, 59(19): 24-43.

参考文献

[1] HOWELL L L. Compliant mechanisms. In 21st century kinematics:The 2012 NSF Workshop[M]. Springer,2013
[2] LOBONTIU N. Compliant mechanisms:Design of flexure hinges[M]. Boca Raton:CRC press,2002.
[3] ZHANG X,ZHU B. Topology optimization of compliant mechanisms[M]. London:Springer London,2018.
[4] PAROS J M,WEISBORO L. How to design flexure hinges[J]. Machine Design,1965,37:151-157.
[5] MIDHA A. A compliance number concept for compliant mechanisms,and type synthesis[J]. Journal of Mechanisms Transmissions and Automation in Design,1987,109:348-355.
[6] WANG H,ZHANG X. Input coupling analysis and optimal design of a 3-DOF compliant micro-positioning stage[J]. Mechanism and Machine Theory,2008,43(4):400-410.
[7] SARDAN S O,EICHHORN V,PETERSEN D,et al. Rapid prototyping of nanotube-based devices using topology-optimized microgrippers[J]. Nanotechnology,2008,19:495503.
[8] HOWELL L L. Compliant mechanisms[M]. New York:Wiley,2001.
[9] 勾燕洁,张守银,陈贵敏. 一种全柔顺六稳态机构的设计[J]. 机械工程学报,2015,51(7):61-66. GOU Yanjie,ZHANG Shouyin,CHEN Guimin. Design approach for a fully compliant sexastable mechanism[J]. Journal of Mechanical Engineering,2015,51(7):61-66.
[10] ZHANG C,YU H,YANG M,et al. Nonlinear stiffness and kinetostatic modeling of a large-range 3-degree-of-freedom planar compliant parallel mechanism[J]. Proceedings of the Institution of Mechanical Engineers,Part C:Journal of Mechanical Engineering Science,2022,236(7):3672-3682.
[11] HOPKINS J B,CULPEPPER M L. Synthesis of multi-degree of freedom,parallel flexure system concepts via freedom and constraint topology (FACT)-Part I:Principles[J]. Precision Engineering,2010,34(2),259-270.
[12] TURKKAN O A,VENKITESWARAN V K,SU H J. Rapid conceptual design and analysis of spatial flexure mechanisms[J]. Mechanism and Machine Theory,2018,121650-668.
[13] 李守忠,于靖军,宗光华. 基于旋量理论的并联柔性机构构型综合与主自由度分析[J]. 机械工程学报,2010,46(13):54-60. LI Shouzhong,YU Jingjun,ZONG Guanghua. Type synthesis and principal freedom analysis of parallel flexure mechanisms based on screw theory[J]. Journal of Mechanical Engineering,2010,46(13):54-60.
[14] JIN M,ZHANG X. A new topology optimization method for planar compliant parallel mechanisms[J]. Mechanism and Machine Theory,2016,95:42-58.
[15] CHEN Z,SHI J,LI Z,et al. A damped decoupled XY nanopositioning stage embedding graded local resonators[J]. IEEE/ASME Transactions on Mechatronics,2022,27(1):256-267.
[16] LI Y,XIAO S,XI L,et al. Design,modeling,control and experiment for a 2-DOF compliant micro-motion stage[J]. International Journal of Precision Engineering And Manufacturing,2014,15(4):735-744.
[17] ZHOU A,ZHANG X,LIU M. A new kind of multi-notched flexure hinges based 3-RRR micro-positioning stage[C]//Advances in Mechanism and Machine Science:Proceedings of the 15th IFToMM World Congress on Mechanism and Machine Science 15. Springer International Publishing,2019:1589-1598.
[18] WANG R,ZHANG X. Parameters optimization and experiment of a planar parallel 3-DOF nanopositioning system[J]. IEEE Transactions on Industrial Electronics,2018,65(3):2388-2397.
[19] 王保兴,孟刚,林苗,等. 3-PPP型柔性并联微定位平台的设计与分析[J]. 北京航空航天大学学报,2020,46(4):798-807. WANG Baoxing,MENG Gang,LIN Miao,et al. Design and analysis of a 3-PPP compliant parallel micro-positioning stage[J]. Journal of Beijing University of Aeronautics and Astronautics,2020,46(4):798-807
[20] LIN J,QI C,GAO F,et al. Modeling and verification for a three-degree-of-freedom flexure-based planar parallel micro manipulator[J]. Journal of Mechanisms and Robotics,2023,15(4):041006.
[21] QI C,LIN J,LIU X,et al. A Modeling method for a 6-SPS perpendicular parallel micro-manipulation robot considering the motion in multiple nonfunctional directions and nonlinear hysteresis[J]. Journal of Mechanical Design,2023,145(5):053301.
[22] WU T,CHEN J,CHANG S. A six-DOF prismatic-spherical-spherical parallel compliant nanopositioner[J]. IEEE Trans Ultrason Ferroelectr Freq Control,2008,55(12):2544-2551.
[23] 王念峰,张志远,张宪民,等. 三种两自由度柔顺精密定位平台的性能对比与分析[J]. 机械工程学报,2018,54(13):102-109. WANG Nianfeng,ZHANG Zhiyuan,ZHANG Xianmin,et al. Performance comparison and analysis of three 2-DOF compliant precision positioning stages[J]. Journal of Mechanical Engineering,2018,54(13):102-109.
[24] WANG R,WU H,WANG H,et al. Design and stiffness modeling of a four-degree-of-freedom nanopositioning stage based on six-branched-chain compliant parallel mechanisms[J]. Review of Scientific Instruments,2020,91(6):65002.
[25] GAO J,HAN X,HAO L,et al. Design and analysis of a novel large-range 3-DOF compliant parallel micromanipulator[J]. Advances in Mechanical Engineering,2021,13(12):16878140211034444.
[26] 黄真,李秦川. 少自由度并联机器人机构的型综合原理[J]. 中国科学E辑,2003,33(9):813-819. HUANG Zhen,LI Qinchuan. The principle of type synthesis of parallel robotic mechanism with less degrees of freedom[J]. Science in China (Series E),2003,33(9):813-819.
[27] LIU Y,LI Y,YAO Y et al. Type synthesis of multi-mode mobile parallel mechanisms based on refined virtual chain approach[J]. Mechanism and Machine Theory,2020,152:103908.
[28] SUN T,HUO X. Type synthesis of 1T2R parallel mechanisms with parasitic motions[J]. Mechanism and Machine Theory,2018,128:412-428.
[29] WEI J,QIU C,DAI J. Configuration switch and path selection between Schönflies motion and non-Schönflies motion based on quotient manifold of novel reconfigurable parallel mechanisms[J]. Mechanism and Machine Theory,2023,180:105153.
[30] HE J,GAO F,MENG X,et al. Type synthesis for 4-DOF parallel press mechanism using GF set theory[J]. Chinese Journal of Mechanical Engineering,2015,28(4):851-859.
[31] LI H,LIU Y,WANG Z,et al. A constraint-flow based method of synthesizing XYθ compliant parallel mechanisms with decoupled motion and actuation characteristics[J]. Mechanism and Machine Theory,2022,178:105085.
[32] WANG R,ZHANG X. Optimal design of a planar parallel 3-DOF nanopositioner with multi-objective[J]. Mechanism and Machine Theory,2017,112:61-83.
[35] SCIRE F E,TEAGUE E C. Piezodriven 50-μm range stage with subnanometer resolution[J]. Review of Scientific Instruments,1978,49(12):1735-1740.
[34] LUM G,TEO T,YEO S,et al. Structural optimization for flexure-based parallel mechanisms-towards achieving optimal dynamic and stiffness properties[J]. Precision Engineering,2015,42:195-207.
[35] WANG R,ZHANG X. A planar 3-DOF nanopositioning platform with large magnification[J]. Precision Engineering,2016,46:221-231.
[36] 李佳杰,陈贵敏. 柔性二级差动式微位移放大机构优化设计[J]. 机械工程学报,2019,55(21):21-28. LI Jiajie,CHEN Guimin. Optimal design of a compliant two-stage differential displacement amplification mechanism[J]. Journal of Mechanical Engineering,2019,55(21):21-28.
[37] PHAM M,YEO S,TEO T,et al. Design and optimization of a three degrees-of-freedom spatial motion compliant parallel mechanism with fully decoupled motion characteristics[J]. Journal of Mechanisms and Robotics-Transactions of the ASME,2019,11(5):051010.
[38] DANG M,DAO T,GIANG L. Optimal design of a new compliant XY micro positioning stage for nanoindentation tester using efficient approach of taguchi method,response surface method and NSGA-II[A] [C]//Proceedings 20184th International Conference on Green Technology and Sustainable Development,GTSD 2018. Ho Chi Minh City,Viet nam:Institute of Electrical and Electronics Engineers Inc.,2018:1-6.
[39] HUANG S,DAO T. Multi-objective optimal design of a 2-DOF flexure-based mechanism using hybrid approach of grey-taguchi coupled response surface methodology and entropy measurement[J]. Arabian Journal for Science and Engineering,2016,41(12):5215-5231.
[40] LING M,SONG D,ZHANG X,et al. Analysis and design of spatial compliant mechanisms using a 3-D dynamic stiffness model[J]. Mechanism And Machine Theory,2022,168:104581.
[41] HUANG S,DAO T. Design and computational optimization of a flexure-based XY positioning platform using FEA-based response surface methodology[J]. International Journal of Precision Engineering and Manufacturing,2016,17(8):1035-1048.
[42] KIM H,GWEON D. Development of a compact and long range XYθz nano-positioning stage[J]. Review of Scientific Instruments,2012,83(8):18-28.
[43] 胡俊峰,张宪民. 3自由度精密定位平台的运动特性和优化设计[J]. 光学精密工程,2012,20(12):2686-2695. HU Junfeng,ZHANG Xianmin. Kinematical properties and optimal design of 3-DOF precision positioning stage[J]. Optics and Precision Engineering,2012,20(12):2686-2695.
[44] TSAI L W,JOSHI S. Kinematics and optimization of a spatial 3-UPU parallel manipulator[J]. Journal of Mechanical Design,2000,122(4):439-446.
[45] JIA X,TIAN Y,ZHANG D. Design and kinematics analysis of a 3-DOF precision positioning stage[C]//2009 International Conference on Mechatronics and Automation,IEEE,2009:3324-3329.
[46] 李仕华,龚文,姜珊,等. 一种新型3-RPC柔性精密平台设计与分析[J]. 机械工程学报,2013,49(23):53-58. LI Shihua,GONG Wen,JIANG Shan,et al. Design and analysis of novel 3-RPC flexible precision platform[J]. Journal of Mechanical Engineering,2013,49(23):53-58.
[47] DANG M,LE H,TRAN N,et al. Optimal design and analysis for a new 1-DOF compliant stage based on additive manufacturing method for testing medical specimens[J]. Symmetry,2022,14(6):1234.
[48] YU S,MA J,WU H,et al. Robust precision motion control of piezoelectric actuators using fast nonsingular terminal sliding mode with time delay estimation[J]. Measurement and Control,2019,52(1-2):11-19.
[49] TANG H,LI Y. Design,analysis,and test of a novel 2-DOF nanopositioning system driven by dual mode[J]. IEEE Transactions on Robotics,2013,29(3):650-662.
[50] WANG C N,TRUONG K P,HUYNH N T. Optimization effects of design parameter on the first frequency modal of a Bridge-type compliant mechanism flexure hinge by using the Taguchi method[C]//Journal of Physics:Conference Series. IOP Publishing,2019,1303(1):012063.
[51] LING M,ZHANG C,CHEN L. Optimized design of a compact multi-stage displacement amplification mechanism with enhanced efficiency[J]. Precision Engineering,2022,77:77-89.
[52] LEE H,KIM H,KIM H,et al. Optimal design and experiment of a three-axis out-of-plane nano positioning stage using a new compact bridge-type displacement amplifier[J]. Review of Scientific Instruments,2013,84(11):115103.
[53] SUN X,WANG Z,YANG Y. Design and experimental investigation of a novel compliant positioning stage with low-frequency vibration isolation capability[J]. Sensors And Actuators A-Physical,2019,295:439-449.
[54] 林苗,孟刚,居勇健,等. 大行程解耦三平动微定位平台的设计与优化[J]. 北京航空航天大学学报,2022,48(7):1252-1262. LIN Miao,MENG Gang,JU Yongjian,et al. Design and optimization of large-stroke decoupled three-translational micro-positioning platform[J]. Journal of Beijing University of Aeronautics and Astronautics,2022,48(7):1252-1262
[55] 林盛隆,张宪民,朱本亮. 高带宽两自由度并联柔顺精密定位平台的优化设计与实验[J]. 光学精密工程,2019,27(8):1774-1782. LIN Shenglong,ZHANG Xianmin,ZHU Benliang. Optimal design and experiment of a high-bandwidth two-degree of freedom parallel nanopositioning stage[J]. Optics and Precision Engineering,2019,27(8):1774-1782.
[56] 王华,张宪民,欧阳高飞. 平面三自由度微动工作台的输入耦合分析[J]. 中国机械工程,2005,16(5):377-380. WANG Hua,ZHANG Xianmin,OUYANG Gaofei. Coupled input analysis of a planar 3-DOF micro-positioning stage[J]. China Mechanical Engineering,2005,16(5):377-380.
[57] 王华,张宪民. 整体式空间3自由度精密定位平台的优化设计与试验[J]. 机械工程学报,2007,43(3):66-71. WANG Hua,ZHANG Xianmin. Optimal design and experimental research for monolithic space 3-DOF precise positioning stage[J]. Journal of Mechanical Engineering,2007,43(3):66-71.
[58] 闫鹏,张立龙,刘鹏博. 具有耦合补偿功能的大行程二维柔性平台[J]. 光学精密工程,2016,24(4):804-811. YAN Peng,ZHANG Lilong,LIU Pengbo. Flexure-based XY micro-positioning stage with large stroke and coupling compensation[J]. Optics and Precision Engineering,2016,24(4):804-811.
[59] LI Y,XU Q. A Totally decoupled piezo-driven xyz flexure parallel micropositioning stage for micro/nanomanipulation[J]. IEEE Transactions on Automation Science and Engineering,2011,8(2):265-279.
[60] LI Y,XU Q. Design and analysis of a totally decoupled flexure-based XY parallel micromanipulator[J]. IEEE Transactions on Robotics,2009,25(3):645-657.
[61] LI Y,XU Q. A Novel piezoactuated xy stage with parallel,decoupled,and stacked flexure structure for micro-/nanopositioning[J]. IEEE Transactions on Industrial Electronics,2011,58(8):3601-3615.
[62] ELMUSTAFA A,LAGALLY M. Flexural-hinge guided motion nanopositioner stage for precision machining:Finite element simulations[J]. Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology,2001,25(1):77-81.
[63] LI S,ZHOU Y,SHAN Y,et al. Synthesis method of two translational compliant mechanisms with redundant actuation[J]. Mechanical Sciences,2021,12(2):983-995.
[64] 王勇,刘和亮,刘正士,等. 二级杠杆式微牛级微力发生机构[J]. 光学精密工程,2018,26(10):2527-2535. WANG Yong,LIU Heliang,LIU Zhengshi,et al. Design and functional analysis of a micro-Newton force generator[J]. Optics and Precision Engineering,2018,26(10):2527-2535.
[65] 占金青,龙良明,刘敏,等. 基于最大应力约束的柔顺机构拓扑优化设计[J]. 机械工程学报,2018,54(23):32-38. ZHAN Jinqing,LONG Liangming,LIU Min,et al. Topological design of compliant mechanisms with maximum stress constraint[J]. Journal of Mechanical Engineering,2018,54(23):32-38.
[66] XU Z,HUANG X,XU F,et al. Parameters optimization of vibration isolation and mitigation system for precision platforms using non-dominated sorting genetic algorithm[J]. Mechanical Systems and Signal Processing,2019,128:191-201.
[67] 田俊,张宪民. 基于柔顺机构的两自由度微动精密定位平台的分析与设计[J]. 机械设计与制造,2009(5):205-207. TIAN Jun,ZHANG Xianmin. Design and analysis of a two degree of freedom micro-positioning stage[J]. Machinery Design and Manufacture. 2009(5):205-207.
[68] 曹毅,王保兴,孟刚,等. 大行程三平动柔性微定位平台的设计分析及优化[J]. 机械工程学报,2020,56(17):71-81. CAO Yi,WANG Baoxing,MENG Gang,et al. Design analysis and optimization of large range spatial translational compliant micro-positioning stage[J]. Journal of Mechanical Engineering,2020,56(17):71-81.
[69] FLEMING A J. Nanopositioning system with force feedback for high-performance tracking and vibration control[J]. IEEE/ASME Transactions on Mechatronics,2010,15(3):433-47.
[70] CHEN Z,ZHONG X,SHI J,et al. Damping-enabling technologies for broadband control of piezo-stages:A survey[J]. Annual Reviews in Control,2021,52:120-34.
[71] CHEN Z,CHEN G,ZHANG X. Damping-enabling technologies for broadband[J]. Review of Scientific Instruments,2015,86(5):1.
[72] CHEN Z,JIANG X,ZHANG X. Damped circular hinge with integrated comb-like substructures[J]. Precision Engineering,2018,53:212-20.
[73] 神光- II"主机间接驱动冷冻演示实验靶的研制[EB/OL].[2018-11-19]. https://www.caep.ac.cn/doc/2020/01/06/721.shtml.Development of indirect drive refrigeration demonstration experimental target for Shenguang II Host[EB/OL].[2018-11-19] Https://www.caep.ac.cn/doc/2020/01/06/721.shtml.
[74] DECHEV N,CLEGHORN W,MILLS J. Construction of a 3d mems microcoil using sequential robotic microassembly operations[C]//ASME International Mechanical Engineering Congress and Exposition,2003:125-131.
[75] 王日鑫. 柔顺机构与驱动位姿显式拓扑优化方法研究[D].广州:华南理工大学,2021 WANG Rixin. Integrated layout design of compliant mechanisms and actuators using explicit topology optimization method[D]. Guangzhou:South China University of Technology,2021.
[76] NAH S,ZHONG Z. A microgripper using piezoelectric actuation for micro-object manipulation[J]. Sensors and Actuators A:Physical,2007,133(1):218-224.
[77] DAS T,SHIRINZADEH B,GHAFARIAN M,et al. Characterization of a compact piezoelectric actuated microgripper based on double-stair bridge-type mechanism[J]. Journal of Micro-Bio Robotics,2020,16(1):79-92.
[78] SHI Q,YU Z,WANG H,et al. Development of a highly compact microgripper capable of online calibration for multisized microobject manipulation[J]. IEEE Transactions on Nanotechnology,2018,17(4):657-661.
[79] CECIL J,POWELL D,VASQUEZ D. Assembly and manipulation of micro devices-A state of the art survey[J]. Robotics and Computer-Integrated Manufacturing,2007,23(5):580-588.
[80] GAN J,XU H,ZHANG X,et al. Design of a compliant adjustable constant-force gripper based on circular beams[J]. Mechanism and Machine Theory,2022,173:104843.
[81] LIU Y,ZHANG Y,XU Q. Design and control of a novel compliant constant-force gripper based on buckled fixed-guided beams[J]. IEEE/ASME Transactions on Mechatronics,2017,22(1):476-486.
[82] WANG J,LAN C. A constant-force compliant gripper for handling objects of various sizes[J]. Journal of Mechanical Design,2014,136(7):1.
[83] SIGMUND O. Design of multiphysics actuators using topology optimization-part i:One-material structures[J]. Computer Methods in Applied Mechanics and Engineering,2001,190(49-50):6577-6604.
[84] SIGMUND O. Design of multiphysics actuators using topology optimization-part ii:Two-material structures[J]. Computer Methods in Applied Mechanics and Engineering,2001,190(49-50):6605-6627.
[85] WANG R,ZHANG X,ZHU B,et al. Hybrid explicit-implicit topology optimization method for the integrated layout design of compliant mechanisms and actuators[J]. Mechanism and Machine Theory,2022,171:104750.
[86] WANG N,CHEN B,GUO H,et al. Design of dielectric elastomer grippers using Bezier curves[J]. Mechanism and Machine Theory,2021,158:104216.
[87] WANG Y,LUO Z,ZHANG X,et al. Topological design of compliant smart structures with embedded movable actuators[J]. Smart Materials and Structures,2014,23(4):045024.
[88] LI H,CHEN Y,DAI L. Concentrated-mass cantilever enhances multiple harmonics in tapping-mode atomic force microscopy[J]. Applied Physics Letters,2008,92(15):151903.
[89] ZHU B,ZIMMERMANN S,ZHANG X,et al. A systematic method for developing harmonic cantilevers for atomic force microscopy[J]. Journal of Mechanical Design,2017,139(1):012303.
[90] SRIRAMSHANKAR R,JAYANTH G. Design and evaluation of torsional probes for multifrequency atomic force microscopy[J]. IEEE/ASME Transactions on Mechatronics,2014,20(4):1843-1853.
[91] SONG J,MENG X,ZHANG H,et al. Probing multidimensional mechanical phenotyping of intracellular structures by viscoelastic spectroscopy[J]. ACS Applied Materials & Interfaces,2019,12(1):1913-1923.
[92] ZHANG W,CHEN Y,LIU H,et al. Subsurface imaging of cavities in liquid by higher harmonic atomic force microscopy[J]. Applied Physics Letters,2018,113(19):193105.
[93] HOU Y,MA C,WANG W,et al. Binary coded cantilevers for enhancing multi-harmonic atomic force microscopy[J]. Sensors and Actuators A:Physical,2019,300:111668.
[94] CAI J,XIA Q,LUO Y,et al. A variable-width harmonic probe for multifrequency atomic force microscopy[J]. Applied Physics Letters,2015,106(7):071901.
[95] GAO F,ZHANG Y. Enhancing the multiple harmonics by step-like cantilever[J]. AIP Advances,2018,8(4):045108.
[96] ZHANG H,GAO H,GENG J,et al. Torsional harmonic kelvin probe force microscopy for high-sensitivity mapping of surface potential[J]. IEEE Transactions on Industrial Electronics,2021,69(2):1654-1662.
[97] DHARMASENA S,YANG Z,KIM S,et al. Ultimate decoupling between surface topography and material functionality in atomic force microscopy using an inner-paddled cantilever[J]. ACS Nano,2018,12(6):5559-5569.
[98] FENG K,GAO J,ZHU B,et al. Force modulation mode harmonic atomic force microscopy for enhanced image resolution of cell[C]//2022 IFToMM China InternationalConference on Mechanism and Machine Science & Engineering (CCMMS2022),July 30- August 1,Yantai,China,2022:1
[99] BALANTEKIN M,ONARAN A,DEGERTEKIN F. Quantitative mechanical characterization of materials at the nanoscale through direct measurement of time-resolved tip-sample interaction forces[J]. Nanotechnology,2008,19(8):085704.
[100] SAHIN O,ERINA N. High-resolution and large dynamic range nanomechanical mapping in tapping-mode atomic force microscopy[J]. Nanotechnology,2008,19(44):445717.
[101] GARCIA R,HERRUZO E. The emergence of multifrequency force microscopy[J]. Nature Nanotechnology,2012,7(4):217-226.
[102] MANDRIOTA N,FRIEDSAM C,JONES-MOLINA J,et al. Cellular nanoscale stiffness patterns governed by intracellular forces[J]. Nature Materials,2019,18(10):1071-1077.
[103] GARCIA R,PROKSCH R. Nanomechanical mapping of soft matter by bimodal force microscopy[J]. European Polymer Journal,2013,49(8):1897-1906.
[104] AMO C A,PERRINO A P,PAYAM A F,et al. Mapping elastic properties of heterogeneous materials in liquid with angstrom-scale resolution[J]. ACS Nano,2017,11(9):8650-8659.
[105] NGUYEN H,LIANG X,ITO M,et al. Direct mapping of nanoscale viscoelastic dynamics at nanofiller/polymer interfaces[J]. Macromolecules,2018,51(15):6085-6091.
[106] SPITZNER E,RIESCH C,MAGERLE R. Subsurface imaging of soft polymeric materials with nanoscale resolution[J]. ACS Nano,2011,5(1):315-320.
[107] ZANG H,ZHANG X,ZHU B,et al. Recent advances in non-contact force sensors used for micro/nano manipulation[J]. Sensors and Actuators A:Physical,2019,296:155-177.
[108] ABBASI A,AHMADIAN M. Force controlled manipulation of biological cells using a monolithic mems based nano-micro gripper[C]//ASME International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers,2012:193-201.
[109] WANG D,YANG Q,DONG H. A monolithic compliant piezoelectric-driven microgripper:Design,modeling,and testing[J]. IEEE/ASME Transactions on Mechatronics,2011,18(1):138-147.
[110] KIM K,LIU X,ZHANG Y,et al. Nanonewton force-controlled manipulation of biological cells using a monolithic MEMS microgripper with two-axis force feedback[J]. Journal of Micromechanics and Microengineering,2008,18(5):055013.
[111] XU Q. Design,fabrication,and testing of a MEMS microgripper with dual-axis force sensor[J]. IEEE Sensors Journal,2015,15(10):6017-6026.
[112] WEI Y,XU Q. Design of a PVDF-MFC force sensor for robot-assisted single cell microinjection[J]. IEEE Sensors Journal,2017,17(13):3975-3982.
[113] PIRIYANONT B,FOWLER A G,MOHEIMANI S O R. Force-controlled MEMS rotary microgripper[J]. Journal of Microelectromechanical Systems,2015,24(4):1164-1172.
[114] 陈忠,张宪民,周晓峰. 基于散斑数字图像相关的柔顺结构力传感单元设计与试验研究[J]. 机械工程学报,2013,49(9):12-16. CHEN Zhong,ZHANG Xianmin,ZHOU Xiaofeng. Design and experimental study of compliant structural force cell based on digital image correlation[J]. Journal of Mechanical Engineering,2013,49(9):12-16.
[115] DSOUZA R,NAVIN K,THEODORIDIS T,et al. Design,fabrication and testing of a 2 DOF compliant flexural microgripper[J]. Microsystem Technologies,2018,24:3867-3883.
[116] ZANG H,ZHANG X,ZHANG H,et al. A novel force sensor based on optical fibers used for semicircular flexure beam unit[J]. IEEE Transactions on Instrumentation and Measurement,2022,71:1-10.
[117] CHEN W,ZHANG X,LI H,et al. Nonlinear analysis and optimal design of a novel piezoelectric-driven compliant microgripper[J]. Mechanism and Machine Theory,2017,118:32-52.
[118] LIANG J,ZHANG X,ZHU B. Nonlinear topology optimization of parallel-grasping microgripper[J]. Precision Engineering,2019,60:152-159.
[119] ZHU B,CHEN Q,LI H,et al. Design of planar large-deflection compliant mechanisms with decoupled multi-input-output using topology optimization[J]. Journal of Mechanisms and Robotics,2019,11(3):031015.
[120] GAO W,KIM S,BOSSE H,et al. Measurement technologies for precision positioning[J]. CIRP Annals,2015,64(2):773-796.
[121] OIWA T,KATSUKI M,KARITA M,et al. Questionnaire survey on ultra-precision positioning[J]. International Journal of Automation Technology,2011,5(6):766-772.
[122] YAO S,LI H,PANG S,et al. A review of computer microvision-based precision motion measurement:Principles,characteristics,and applications[J]. IEEE Transactions on Instrumentation and Measurement,2021,70:1-28.
[123] LU C P,HAGER G D,MJOLSNESS E. Fast and globally convergent pose estimation from video images[J]. IEEE Transactions on Pattern Analysis and Machine Intelligence,2000,22(6):610-622.
[124] LEPETIT V,MORENO-NOGUER F,FUA P. EP n P:An accurate O(n) solution to the P n P problem[J]. Inter national Journal of Computer Vision,2009,81(2):155-166.
[125] HARRIS C,STEPHENS M. A combined corner and edge detector[C]//Alvey Vision Conference,1988,23:1-26.
[126] LI H,ZHANG X,ZENG L,et al. A monocular vision system for online pose measurement of a 3RRR planar parallel manipulator[J]. Journal of Intelligent & Robotic Systems,2018,92:3-17.
[127] WU H,ZHANG X,GAN J,et al. Displacement measurement system for inverters using computer micro-vision[J]. Optics and Lasers in Engineering,2016,81:113-118.
[128] WU H,ZHANG X,GAN J,et al. High-precision displacement measurement method for three degrees of freedom-compliant mechanisms based on computer micro-vision[J]. Applied Optics,2016,55(10):2594-2600.
[129] PAN B,QIAN K,XIE H,et al. Two-dimensional digital image correlation for in-plane displacement and strain measurement:A review[J]. Measurement Science and Technology,2009,20(6):062001.
[130] LI H,ZHANG X,ZHU B,et al. Micro-motion detection of the 3-DOF precision positioning stage based on iterative optimized template matching[J]. Applied Optics,2017,56(34):9435-9443.
[131] LI H,ZHANG X,ZHU B,et al. Online precise motion measurement of 3-DOF nanopositioners based on image correlation[J]. IEEE Transactions on Instrumentation and Measurement,2018,68(3):782-790.
[132] LI H,ZHANG X,YAO S,et al. An improved template-matching-based pose tracking method for planar nanopositioning stages using enhanced correlation coefficient[J]. IEEE Sensors Journal,2020,20(12):6378-6387.
[133] LI H,ZHU B,CHEN Z,et al. Realtime in-plane displacements tracking of the precision positioning stage based on computer micro-vision[J]. Mechanical Systems and Signal Processing,2019,124:111-123.
[134] LI H,VON KLEIST-RETZOW F T,HAENSSLER O C,et al. Multi-target tracking for automated RF on-wafer probing based on template matching[C]//2019 International Conference on Manipulation,Automation and Robotics at Small Scales (MARSS). IEEE,2019:1-6.
[135] REDDY B S,CHATTERJI B N. An FFT-based technique for translation,rotation,and scale-invariant image registration[J]. IEEE Transactions on Image Processing,1996,5(8):1266-1271.
[136] ANDRÉ A N,SANDOZ P,MAUZÉ B,et al. Sensing one nanometer over ten centimeters:A microencoded target for visual in-plane position measurement[J]. IEEE/ASME Transactions on Mechatronics,2020,25(3):1193-1201.
[137] GUELPA V,SANDOZ P,VERGARA M A,et al. 2D visual micro-position measurement based on intertwined twin-scale patterns[J]. Sensors and Actuators A Physical,2016,248:272-280.
[138] YAO S,ZHANG X,ZHU B,et al. A microvision-based motion measurement system for nanopositioners using the feature-to-phase method[J]. IEEE Transactions on Instrumentation and Measurement,2023,72:1-11.
[139] LUCAS B D,KANADE T. An iterative image registration technique with an application to stereo vision[C]//Proceedings of the 7th International Joint Conference on Artificial Intelligence. In:International Joint Conference on Artificial Intelligence,1981:674-679.
[140] BOUGUET J Y. Pyramidal implementation of the affine lucas kanade feature tracker description of the algorithm[J]. Intel Corporation,2001,5(1-10):4.
[141] FARNEBÄCK G. Two-frame motion estimation based on polynomial expansion[C]//Image Analysis:13th Scandinavian Conference,SCIA 2003 Halmstad,Sweden,June 29-July 2,2003 Proceedings 13. Springer Berlin Heidelberg,2003:363-370.
[142] DEVASIA S,ELEFTHERIOU E,MOHEIMANI S O R. A survey of control issues in nanopositioning[J]. IEEE Transactions on Control Systems Technology,2007,15(5):802-823.
[143] XU Q S. Precision position/force interaction control of a piezoelectric multimorph microgripper for microassembly[J]. IEEE Transactions on Automation Science and Engineering,2013,10(3):503-514.
[144] GAN J,ZHANG X. A review of nonlinear hysteresis modeling and control of piezoelectric actuators[J]. AIP Advances,2019,9(4):040702.
[145] GAN J,ZHANG X,WU H. Tracking control of piezoelectric actuators using a polynomial-based hysteresis model[J]. AIP Advances,2016,6(6):065204.
[146] YANG C,VERNEEK N,XIA F,et al. Modeling and control of piezoelectric hysteresis:A polynomial-based fractional order disturbance compensation approach[J]. IEEE Transactions on Industrial Electronics,2021,68(4):3348-3358.
[147] YANG C,YOUCEF-TOUMI K. Decoupled tracking and damping control of piezo-actuated nanopositioner enabled by multimode charge sensing[J]. Mechanical Systems and Signal Processing,2022,173:109046.
[148] XIE Y,TAN Y,DONG R. Nonlinear modeling and decoupling control of XY micropositioning stages with piezoelectric actuators[J]. IEEE/ASME Transactions on Mechatronics,2013,18(3):821-832.
[149] GAN J,ZHANG X,LI H,et al. Full closed-loop controls of micro/nano positioning system with nonlinear hysteresis using micro-vision system[J]. Sensors and Actuators A:Physical,2017,257:125-133.
[150] ZHU W,YANG F,RUI X. Robust independent modal space control of a coupled nano-positi oning piezo-stage[J]. Mechanical Systems and Signal Processing,2018,106:466-478.
[151] YANG Y,WEI Y,LOU J,et al. Development and precision position/force control of a new flexurebased microgripper[J]. Journal of Micromechanics and Microengineering,2016,26(1):015005.
[152] LIANG C,WANG F,TIAN Y,et al. Development of a high speed and precision wire clamp with both position and force regulations[J]. Robotics and Computer- Integrated Manufacturing,2017,44:208-217.
[153] XU Q. Robust impedance control of a compliant microgripper for high-speed position/force regulation[J]. IEEE Transactions on Industrial Electronics,2015,62(2):1201-1209.
[154] CHOW Y,CHEN S,LIU C,et al. A high-throughput automated microinjection system for human cells with small size[J]. IEEE/ASME Transactions on Mechatronics,2015,21(2):838-850.
[155] BAKTHAVATCHALAM M,TAHRI O,CHAUMETTE F. A direct dense visual servoing approach using photometric moments[J]. IEEE Transactions on Robotics,2018:1-14.
[156] BATEUX Q,MARCHAND E. Histograms-based visual servoing[J]. IEEE Robotics and Automation Letters,2017,2(1):80-87.
[157] SHA X,SUN H,ZHAO Y,et al. A review on microscopic visual servoing for micromanipulation systems:Applications in micromanufacturing,biological injection,and nanosensor assembly[J]. Micromachines,2019,10(12):843.
[158] ZIMMERMANN S,TIEMERDING T,FATIKOW S. Automated robotic manipulation of individual colloidal particles using vision-based control[J]. IEEE/ASME Transactions on Mechatronics,2015,20(5):2031-2038.
[159] SHI Q,YANG Z,GUO Y,et al. A vision-based automated manipulation system for the pick-up of carbon nanotubes[J]. IEEE/ASME Transactions on Mechatronics,2017,22(2):845-854
[160] YAO S,LI H,ZENG L,et al. Vision-based adaptive control of a 3-RRR parallel positioning system[J]. Science China Technological Sciences,2018,61:1253-1264.
[161] 周丽平,张泉,孙志峻. 直线超声电动机驱动的平面3-PRR并联平台视觉精密定位[J]. 机械工程学报,2014,50(19):18-23. ZHOU Liping,ZHANG Quan,SUN Zhijun. Precision positioning of a 3-PRR planar parallel manipulator driven by linear ultrasonic motors based on machine vision[J]. Journal of Mechanical Engineering,2014,50(19):18-23.
[162] TAMADAZTE B,LE-FORT P,MARCHAND E. A direct visual servoing scheme for automatic nanopositioning[J]. Mechatronics IEEE/ASME Transactions on,2012,17(4):728-736
[163] MARTURI N,TAMADAZTE B,DEMBELE S,et al. Image-guided nanopositioning scheme for SEM[J]. IEEE Transactions on Automation Science and Engineering,2016,15(1):45-56.
[164] MARTURI N,TAMADAZTE B,DEMBELE S,et al. Visual servoing schemes for automatic nanopositioning under scanning electron microscope[C]//IEEE International Conference on Robotics and Automation,2014:981-986.
[165] CUI L. Robust micro/nano-positioning by visual servoing[D]. Rennes:University Rennes,2016.