光学元件全口径抛光中温度分布对元件面形的影响规律及其控制方法研究

doi:10.3901/JME.2022.15.046

机械工程学报 ›› 2022, Vol. 58 ›› Issue (15): 46-54.doi: 10.3901/JME.2022.15.046

• 特邀专栏：先进磨粒加工技术 • 上一篇下一篇

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光学元件全口径抛光中温度分布对元件面形的影响规律及其控制方法研究

张飞虎¹, 王乙任¹, 廖德锋^1,2, 任乐乐¹, 李琛¹

1. 哈尔滨工业大学机电工程学院哈尔滨 150001;
2. 中国工程物理研究院激光聚变研究中心绵阳 621900

收稿日期:2021-08-02 修回日期:2022-04-06 发布日期:2022-10-13
通讯作者: 王乙任(通信作者),男,1994年出生,博士。主要研究方向为精密超精密加工与纳米加工技术。E-mail:hitwyr@foxmail.com
作者简介:张飞虎,男,1964年出生,博士,教授,博士研究生导师。主要研究方向为精密超精密加工与纳米加工技术。E-mail:zhangfh@hit.edu.cn
基金资助:
国家自然科学基金（52005134）资助项目。

Study on the Influence of Temperature Distribution in the Optical Elements on the Surface Shape and Its Control Method during Full Aperture Polishing

ZHANG Feihu¹, WANG Yiren¹, LIAO Defeng^1,2, REN Lele¹, LI Chen¹

1. College of Mechanical and Electrical Engineering, Harbin Institute of Technology, Harbin 150001;
2. Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900

Received:2021-08-02 Revised:2022-04-06 Published:2022-10-13

摘要/Abstract

摘要： 大口径平面光学元件，尤其是热膨胀系数较大的材料，极易在全口径抛光中受到温度的影响导致面形精度难以控制。建立抛光过程中光学元件温度场的有限元模型，模拟分析全口径抛光过程中空气、抛光液对元件上下表面的温度分布的影响规律；基于接触力学理论和有限元方法建立光学元件与抛光盘的接触力学模型，分析元件变形对抛光压力分布的影响。基于Preston方程探索压力分布对元件表面材料去除分布和面形精度的影响规律；提出控制元件内温度分布、进而提高元件面形精度的方法。结果表明，对于610 mm口径的K9元件，低频面形PV可以达到0.2λ（1λ=0.632 8μm）。

关键词: 全口径抛光, 多物理场, 低频面形, 光学元件

Abstract: Large aperture planar optical elements, especially the materials with large thermal expansion coefficient, are easily affected by temperature in full aperture polishing, which makes the surface shape accuracy difficult to control.The finite element model of the thermal-flow field of the optical element in the polishing process is established, and the influence of air and slurry on the temperature distribution of the top and bottom surfaces of the optical element in the full aperture polishing process are analyzed.Based on the theory of contact mechanics and finite element method, the contact mechanics model of optical element and polishing lap is established, and the influence of element deformation on polishing pressure distribution is analyzed.Based on Preston's equation, the influence of pressure distribution on the surface material removal distribution and surface shape accuracy is explored.A method to control the temperature distribution in the element and improve the surface shape accuracy of the element is proposed.The results show that for the K9 element with 610 mm aperture, the low frequency surface shape precision, PV can reach 0.2 λ(1λ=0.632 8 μm).

Key words: full-aperture polishing, multi physical field, low frequency surface shape, optical elements

中图分类号:

TG356

张飞虎, 王乙任, 廖德锋, 任乐乐, 李琛. 光学元件全口径抛光中温度分布对元件面形的影响规律及其控制方法研究[J]. 机械工程学报, 2022, 58(15): 46-54.

ZHANG Feihu, WANG Yiren, LIAO Defeng, REN Lele, LI Chen. Study on the Influence of Temperature Distribution in the Optical Elements on the Surface Shape and Its Control Method during Full Aperture Polishing[J]. Journal of Mechanical Engineering, 2022, 58(15): 46-54.

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光学元件全口径抛光中温度分布对元件面形的影响规律及其控制方法研究

Study on the Influence of Temperature Distribution in the Optical Elements on the Surface Shape and Its Control Method during Full Aperture Polishing

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