大中型光学元件高效精密磨削技术研究综述

doi:10.3901/JME.2016.09.165

摘要/Abstract

摘要： 近年来,大中型光学元件(包括平面、球面、非球面及自由曲面)在大型天文望远镜、高功率激光核聚变装置及精密光学测量装置的应用日益广泛,其大批量生产需求驱动了高效精密磨削技术的长足发展。然而,超精密大中型光学元件的短周期、大批量生产对现阶段光学制造能力提出了巨大挑战,同时也推动着其磨削装备技术和磨削工艺技术向更高效率、更高精度及更高自动化水平的方向发展。系统总结大中型光学元件磨削装备技术中机床整机、主轴单元、进给工作台、数控系统和磨削工艺技术中脆性材料塑性去除机理、磨削工具、磨削液及其注入方式、工艺路线规划、检测、误差建模及补偿、环境监控等技术的研究现状,并对上述关键技术问题进行详尽的分析。同时,提出解决上述问题的可能性对策,预测和展望大中型光学元件高效精密磨削技术未来发展趋势。

关键词: 大中型光学元件, 高效精密磨削技术, 磨削工艺, 磨削装备

Abstract: Precision grinding technology oriented to achieve high process efficiency has been developed largely in recent years, driven by the mass production requirements for making the large and middle-scale optics of plane, spherical, aspherical and freeform surfaces used in large astronomical telescopes, high power laser fusion devises and precision optical metrology devices. The grand challenge for providing extraordinary massive numbers of these large and middle-scale optics of ultra-precision in short time has pushed the grinding equipment and grinding process technology move towards much higher efficiency, higher precision and higher automation level. The research status of grinding equipment and grinding process for large and middle-scale optic are systematically summarized and detailed analyzed from the aspects of complete machine, spindle unit, feed table, NC system, brittle-ductile transition mechanism, grinding tools, grinding fluid and its injection, process route planning, measuring, error modeling and compensation, as well as environmental monitoring and so on. Meanwhile, the feasible countermeasures to solve the key technology problems mentioned are presented. And the future development tendency of precision grinding technology oriented to achieve high process efficiency for large and middle-scale optic is predicted and prospected.

Key words: grinding equipment, grinding process, large and middle-scale optic, precision grinding technology oriented to achieve high process efficiency

中图分类号:

TG58

金滩, 李平, 肖航, 吴耀. 大中型光学元件高效精密磨削技术研究综述[J]. 机械工程学报, 2016, 52(9): 165-375.

JIN Tan, LI Ping, XIAO Hang, WU Yao. Research Summary on Precision Grinding Technology Oriented to Achieve High Process Efficiency for Large and Middle-scale Optic[J]. Journal of Mechanical Engineering, 2016, 52(9): 165-375.

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