基于电场驱动熔融沉积直写和微转印大面积透明电极制造

doi:10.3901/JME.2019.23.216

机械工程学报 ›› 2019, Vol. 55 ›› Issue (23): 216-225.doi: 10.3901/JME.2019.23.216

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基于电场驱动熔融沉积直写和微转印大面积透明电极制造

许权, 兰红波, 赵佳伟, 杨昆, 朱晓阳

青岛理工大学山东省增材制造工程技术研究中心青岛 266520

收稿日期:2018-07-20 修回日期:2019-01-13 出版日期:2019-12-05 发布日期:2020-02-18
通讯作者: 兰红波(通信作者),男,1970年出生,博士,教授,博士研究生导师。主要研究方向为微纳尺度3D打印、大面积纳米压印、增材制造、光电子器件制造。E-mail:hblan99@126.com
作者简介:许权,男,1994年出生。主要研究方向为微纳制造、大面积纳米压印、微纳尺度3D打印、光电子器件制造。
基金资助:
国家自然科学基金（51775288，51705271）和山东省重点研发计划（2018GGX103022）资助项目。

Large-area Transparent Electrodes Fabricated by Combining the Electric-field-driven Fusion Deposition Direct Writing and Micro-transfer

XU Quan, LAN Hongbo, ZHAO Jiawei, YANG Kun, ZHU Xiaoyang

Shandong Engineering Research Center for Additive Manufacturing, Qingdao University of Technology, Qingdao 266520

Received:2018-07-20 Revised:2019-01-13 Online:2019-12-05 Published:2020-02-18

摘要/Abstract

摘要： 透明导电电极在触控屏、OLED、有机太阳能电池、电子纸、LCD、透明显示、透明电磁屏蔽等诸多光电子产品领域有着非常广泛的应用，然而，如何实现大面积银网格透明电极的低成本、批量化制造是学术界和产业界共同面临的一项挑战性难题和亟待突破的技术。结合电场驱动熔融沉积直写和液桥微转印技术，提出一种实现大面积透明电极低成本、批量化制造的新方法，通过试验揭示了主要工艺参数（打印床温度、功能材料表面张力、固化条件）对所制造透明电极分辨率和质量的影响及其规律，利用提出的方法并结合优化的工艺参数，实现了图案化面积20 mm×20 mm，线宽4 μm，周期200 μm，透光率88.15%、方阻约12 Ω/sq的纳米银网格透明电极的制造。结果表明，基于电场驱动熔融沉积直写和微转印的大面积透明电极制造方法具有成本低、精度高、一致性好、效率高的显著优势，为大面积透明电极规模化制造提供了一种具有工业化应用前景的全新解决方案。

关键词: 透明电极, 电场驱动, 直写技术, 微转印, 增材制造

Abstract: Transparent conductive electrodes(TCEs) have a wide range of applications in touch screens, OLED, organic solar cells, electronic paper, LCD, transparent display, transparent electromagnetic shielding, etc. However, how to realize the low-cost and mass production of large-area TCEs is a challenging issue in academia and industry. A novel large-area TCEs manufacturing method by combining the electric-field driven fusion deposition direct writing and the liquid bridge transfer is proposed. A series of experiments are conducted to reveal the influence laws of process parameters (printing bed temperature, surface tension of functional materials, and curing parameters) for TCEs fabricated. Based on the proposed method and the optimized process parameters, a high-resolution mesh TCE which has a 20 mm×20 mm area, an average line width of 4 μm, a period of 200 μm, the transmittance of 88.15%, and sheet resistance of 12 Ω/sq has been successfully manufactured. The results show that the proposed method provides a promising solution for mass producing large-area TCEs with high resolution, low cost.

Key words: transparent conductive electrode, electric-field-drive, direct writing, micro-transfer printing, additive manufacturing

中图分类号:

TG156

许权, 兰红波, 赵佳伟, 杨昆, 朱晓阳. 基于电场驱动熔融沉积直写和微转印大面积透明电极制造[J]. 机械工程学报, 2019, 55(23): 216-225.

XU Quan, LAN Hongbo, ZHAO Jiawei, YANG Kun, ZHU Xiaoyang. Large-area Transparent Electrodes Fabricated by Combining the Electric-field-driven Fusion Deposition Direct Writing and Micro-transfer[J]. Journal of Mechanical Engineering, 2019, 55(23): 216-225.

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基于电场驱动熔融沉积直写和微转印大面积透明电极制造

Large-area Transparent Electrodes Fabricated by Combining the Electric-field-driven Fusion Deposition Direct Writing and Micro-transfer

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