电场驱动复合微纳3D打印低频透明电磁屏蔽玻璃

doi:10.3901/JME.2024.03.305

机械工程学报 ›› 2024, Vol. 60 ›› Issue (3): 305-318.doi: 10.3901/JME.2024.03.305

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电场驱动复合微纳3D打印低频透明电磁屏蔽玻璃

台玉平¹, 朱晓阳¹, 李红珂¹, 于志浩¹, 张厚超¹, 张凡¹, 张广明¹, 赵娟¹, 赵佳伟¹, 黄友奇², 兰红波¹

1. 青岛理工大学山东省增材制造工程技术研究中心青岛 266520;
2. 中国建筑材料科学研究总院有限公司北京 100024

收稿日期:2023-02-15 修回日期:2023-09-01 出版日期:2024-02-05 发布日期:2024-04-28
通讯作者: 朱晓阳,男,1988年出生,博士,副教授,博士研究生导师。主要研究方向为微尺度3D打印工艺及装备研发、微光学器件的设计与制造、透明导电薄膜以及柔性电子3D打印。E-mail:zhuxiaoyang@qtech.edu.cn
作者简介:台玉平,男, 1997 年出生。主要研究方向为 3D 打印与微纳制造。E-mail:taiyuping1@163.com;兰红波,男, 1970 年出生,博士,二级教授,博士研究生导师。主要研究方向为微纳尺度 3D 打印、复合材料 3D 打印、多材料 3D 打印、大面积纳米压印光刻、微纳制造。E-mail:hblan@126.com
基金资助:
国家自然科学基金(52175331)、山东省自然科学基金重大基础研究(ZR2020ZD04)和山东省高等学校青创科技支持计划(2020KJB003)资助项目。

Electric Field Driven Hybrid Micro and Nano 3D Printing of Low Frequency Transparent Electromagnetic Shielding Glass

TAI Yuping¹, ZHU Xiaoyang¹, LI Hongke¹, YU Zhihao¹, ZHANG Houchao¹, ZHANG Fan¹, ZHANG Guangming¹, ZHAO Juan¹, ZHAO Jiawei¹, HUANG Youqi², LAN Hongbo¹

1. Shandong Engineering Research Center for Additive Manufacturing, Qingdao University of Technology, Qingdao 266520;
2. China Building Materials Science Research Institute Co. Ltd., Beijing 100024

Received:2023-02-15 Revised:2023-09-01 Online:2024-02-05 Published:2024-04-28

摘要/Abstract

摘要： 为解决大面积高性能低频透明电磁屏蔽玻璃难以低成本批量化制造的挑战性问题,提出一种基于电场驱动微喷射和电镀的复合增材制造新方法,用于制备银镍复合金属网栅低频透明电磁屏蔽玻璃,阐述了制备银镍复合金属网栅的基本原理和工艺流程;通过实验揭示了主要工艺参数(打印电压、打印速度、打印气压、打印高度、电流密度、电镀时间)对制备银镍复合金属网栅电学性能、光学性能的影响规律; 并结合优化的工艺参数, 制备了线宽 10 μm、方阻 0.76 Ω/sq、网栅透过率 90.2 %、在低频波段(10 kHz~30 MHz)屏蔽效能大于 40 dB 的银镍复合金属网栅透明电磁屏蔽玻璃,复合金属网栅与衬底的黏附力为5B,实现了高屏蔽效能和高透过率电磁屏蔽金属网栅的制造,为高性能低频透明电磁屏蔽玻璃的批量化制造提供了全新的解决方案。

关键词: 透明电磁屏蔽, 微纳 3D 打印, 复合金属网栅, 电场驱动喷射, 电镀

Abstract: In order to solve the challenging problem of large-area high-performance low-frequency transparent electromagnetic shielding glass that is difficult to be manufactured in batch at low cost, a new additive manufacturing method based on electric field-driven micro-jet and electroplating composite is proposed for the preparation of silver-nickel composite metal mesh low-frequency transparent electromagnetic shielding glass, and the basic principle and process flow of preparing silver-nickel composite metal mesh are described; the influence of the main process parameters (printing voltage, printing speed, printing air pressure, printing height, current density, plating time) on the electrical and optical properties of the prepared silver-nickel composite metal grids was revealed through experiments; and with the optimized process parameters, the silver-nickel composite metal grid transparent electromagnetic shielding glass with 10 μm line width, 0.76 Ω/sq square resistance, 90.2 % grid transmittance, and shielding efficiency greater than 40 dB in the low frequency band (10 kHz-30 MHz) has been prepared, and the adhesion between the composite metal grid and the substrate is 5B. It provides a new solution for the mass production of high performance low frequency transparent electromagnetic shielding glass.

Key words: transparent electromagnetic shielding, micro and nano 3D printing, composite metal grids, electric field driven jetting, micro plating

中图分类号:

TG156

台玉平, 朱晓阳, 李红珂, 于志浩, 张厚超, 张凡, 张广明, 赵娟, 赵佳伟, 黄友奇, 兰红波. 电场驱动复合微纳3D打印低频透明电磁屏蔽玻璃[J]. 机械工程学报, 2024, 60(3): 305-318.

TAI Yuping, ZHU Xiaoyang, LI Hongke, YU Zhihao, ZHANG Houchao, ZHANG Fan, ZHANG Guangming, ZHAO Juan, ZHAO Jiawei, HUANG Youqi, LAN Hongbo. Electric Field Driven Hybrid Micro and Nano 3D Printing of Low Frequency Transparent Electromagnetic Shielding Glass[J]. Journal of Mechanical Engineering, 2024, 60(3): 305-318.

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电场驱动复合微纳3D打印低频透明电磁屏蔽玻璃

Electric Field Driven Hybrid Micro and Nano 3D Printing of Low Frequency Transparent Electromagnetic Shielding Glass

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