空气中直接测量ZnO纳米线弹性模量的方法及其表层值研究

doi:10.3901/JME.2018.24.027

机械工程学报 ›› 2018, Vol. 54 ›› Issue (24): 27-33.doi: 10.3901/JME.2018.24.027

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空气中直接测量ZnO纳米线弹性模量的方法及其表层值研究

于广滨¹, 卜镜元^1,2, 江诚鸣², 宋金会²

1. 哈尔滨理工大学机械动力工程学院哈尔滨 150080;
2. 大连理工大学机械工程学院大连 116024

收稿日期:2017-11-13 修回日期:2018-06-12 出版日期:2018-12-20 发布日期:2018-12-20
通讯作者: 宋金会(通信作者),男,1975年出生,教授。主要研究方向为纳米材料可控生长、纳米机械、纳米传感器。E-mail:jhsong@dlut.edu.cn
作者简介:于广滨,男,1978年出生,博士,教授。主要研究方向为纳米机械、纳米传感器和数值模拟。E-mail:yu_ccna@163.com;卜镜元,男,1991年出生。主要研究方向为纳米机械、纳米传感器和数值模拟。E-mail:buming666@163.com;江诚鸣,男,1988年出生,副研究员。主要研究方向为纳米材料可控生长、纳米机械、纳米传感器和数值模拟。E-mail:jiangcm@dlut.edu.cn
基金资助:
国家重点研发计划资助项目（2016YFE0110500）。

Direct Measurement of Young's Modulus of ZnO Nanowires in Air and Study of Its Surface Value

YU Guangbin¹, BU Jingyuan^1,2, JIANG Chengming², SONG Jinghui²

1. College of Mechanical Engineering, Harbin University of Science and Technology, Harbin 150080;
2. School of Mechanical Engineering, Dalian University of Technology, Dalian 116024

Received:2017-11-13 Revised:2018-06-12 Online:2018-12-20 Published:2018-12-20

摘要/Abstract

摘要： 提出在大气环境中测量氧化锌纳米线共振频率的方法。通过自制平行微电极施加横置交变电场使纳米线振动，并利用原子力显微镜非接触模式使探针和纳米线顶端间距在分子力作用范围内，探针和纳米线在分子力作用下同步运动。又通过逐渐改变交变电场频率，使纳米线承受频率连续变化的激励作用。通过光电传感器识别探针的位置变化，从而可以通过判断光电传感器信号的激增来确定纳米线共振的发生，得到纳米线共振频率。根据共振频率和几何尺寸的对应关系，由欧拉伯努利梁理论得出氧化锌纳米线弹性模量的变化规律，发现其不等于氧化锌块状材料值且不是常量。由于纳米线尺寸为纳米级别，所以纳米线生长边界的张弛层厚度对纳米线整体性能影响较大。应用有限元多物理场耦合模拟，建立壳-核模型且考虑到在空气中振动的热黏阻尼对试验过程进行模拟，得到共振频率对应的壳部和整体模型弹性模量及其变化规律。

关键词: 大气环境共振法, 弹性模量, 多物理场耦合模拟, 氧化锌纳米线

Abstract: A method for measuring the resonant frequency of zinc oxide nanowires in the atmospheric environment is proposed. The nanowires are vibrated by applying a transverse alternating electric field by self-made parallel microelectrodes. AFM noncontact mode is used to make the probe and nanowire top pitch within the range of molecular forces. The probe and nanowire are synchronized under the action of molecular force. By gradually changing the frequency of the alternating electric field, the nanowires are subjected to the excitation of the frequency continuously. The position of the probe is identified by the photoelectric sensor, so that the measurement system can determine the occurrence of the nanowire resonance by judging the surge of the photoelectric sensor signal. When the resonance occurs, the frequency is the resonant frequency. According to the correspondence between resonant frequency and geometric size, the changing rule of Young's modulus of zinc oxide nanowires is obtained from the Euler Bernoulli theory. It is found that this result is not equal to the zinc oxide block material value and is not constant. Since the nanowire size is nanoscale, the thickness of the relaxation layer at the growth boundary of the nanowires has a great influence on the overall performance of the nanowires. The multiphysics coupling simulation is used to simulate the experimental process. In the simulation, a shell-core model is established, and this simulation takes into account the effect of air thermal damping. Finally, the changing rule and value of Young's modulus of the shell of zinc oxide nanowires and overall nanowires are obtained.

Key words: atmospheric environment resonance method, elastic modulus, multiphysics coupling simulation, ZnO nanowires

中图分类号:

TB383

于广滨, 卜镜元, 江诚鸣, 宋金会. 空气中直接测量ZnO纳米线弹性模量的方法及其表层值研究[J]. 机械工程学报, 2018, 54(24): 27-33.

YU Guangbin, BU Jingyuan, JIANG Chengming, SONG Jinghui. Direct Measurement of Young's Modulus of ZnO Nanowires in Air and Study of Its Surface Value[J]. Journal of Mechanical Engineering, 2018, 54(24): 27-33.

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空气中直接测量ZnO纳米线弹性模量的方法及其表层值研究

Direct Measurement of Young's Modulus of ZnO Nanowires in Air and Study of Its Surface Value

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