• CN:11-2187/TH
  • ISSN:0577-6686

›› 2011, Vol. 47 ›› Issue (23): 193-198.

• 论文 • 上一篇    

基于飞秒激光双光子的微齿轮加工技术研究

孙树峰;王萍萍;薛伟   

  1. 温州大学机电工程学院;温州大学国际合作学院
  • 发布日期:2011-12-05

Fabrication Technique Research on Micro Gear Based on Two-photon of Femtosecond Laser

SUN Shufeng;WANG Pingping;XUE Wei   

  1. School of Mechanical and Electrical Engineering, Wenzhou University School of International Cooperation, Wenzhou University
  • Published:2011-12-05

摘要: 针对传统加工方法很难实现微机电系统(Micro electromechanical systems, MEMS)零部件高质量加工的问题,在微细加工技术研究基础上,提出采用飞秒激光双光子聚合加工技术加工标准渐开线微齿轮的方法。采用钛蓝宝石激光器自行搭建的飞秒激光双光子加工系统,能够输出波长为800 nm的飞秒激光用于双光子聚合加工,利用AutoCAD软件设计标准渐开线微齿轮,通过理论和试验两种方法研究激光功率与单个固化点尺寸之间的关系,进而研究扫描步距与加工精度和表面粗糙度之间的关系,结果表明,激光功率越小,加工分辨率越高;扫描步距越小,加工变形越大,但表面质量提高。采用优化后的加工工艺参数加工出高质量的标准渐开线微齿轮,其表面粗糙度Ra27.66 nm。因此,飞秒激光双光子加工技术能够为微齿轮或其他MEMS零部件的加工提供一条有效途径。

关键词: 飞秒激光, 双光子, 微齿轮, 微细加工

Abstract: Pointing to the problem that it is hard for traditional machining methods to manufacture the parts of micro electromechanical systems(MEMS) with high quality, the method that standard involute micro gear is fabricated by polymerization fabrication technique of two-photon of femtosecond laser is provided based on the research of micro fabrication techniques. Fabrication system of two-photon of femtosecond laser is set up by using Ti-sapphire laser. Femtosecond laser whose wavelength is 800 nm may be output by the system for two-photon polymerization fabrication. Standard involute micro gear is designed with AutoCAD software. The relationship between laser power and the size of single voxel, the relationship between scanning step and the fabrication precision, surface roughness are researched through theory analysis and experiment. The results indicate that the machining resolution is higher when the laser power is smaller. When the scanning step is too smaller, the deformation is bigger, but the surface roughness is better. High quality standard involute micro gear with surface roughness Ra27.66 nm is fabricated with optimized fabrication parameters. Therefore, the fabrication technique of two-photon of femtosecond laser provides an effective way for fabrication of micro gear or the other MEMS parts.

Key words: Femtosecond laser, Micro gear, Microfabrication, Two-photon

中图分类号: