纳米孪晶立方氮化硼的飞秒激光材料去除机理

doi:10.3901/JME.2019.09.198

机械工程学报 ›› 2019, Vol. 55 ›› Issue (9): 198-205.doi: 10.3901/JME.2019.09.198

纳米孪晶立方氮化硼的飞秒激光材料去除机理

靳田野¹, 陈俊云², 王金虎¹, 赵清亮¹

1. 哈尔滨工业大学精密工程研究所哈尔滨 150001;
2. 燕山大学车辆与能源学院秦皇岛 066004

收稿日期:2018-04-19 修回日期:2018-10-16 出版日期:2019-05-05 发布日期:2019-05-05
通讯作者: 陈俊云(通信作者),女,1983年出生,副教授,硕士研究生导师,主要研究方向为新型纳米孪晶材料刀具研制和高精度汽车零部件制造技术。E-mail:sophiacjy@ysu.edu.cn
作者简介:靳田野,男,1989年出生,博士研究生,主要从事新型纳米孪晶材料刀具研制方面的研究。E-mail:jintianye3030@163.com
基金资助:
国家自然科学基金（51775482）和河北省自然科学基金（E2016203372）资助项目。

Material Removal Mechanism of Nanotwinned Cubic Boron Nitride by Femtosecond Laser Ablation

JIN Tianye¹, CHEN Junyun², WANG Jinhu¹, ZHAO Qingliang¹

1. Center for Precision Engineering, Harbin Institute of Technology, Harbin 150001;
2. College of Vehicles and Energy, Yanshan University, Qinhuangdao 066004

Received:2018-04-19 Revised:2018-10-16 Online:2019-05-05 Published:2019-05-05

摘要/Abstract

摘要： 为实现能应用于超精密切削的新型超硬纳米孪晶立方氮化硼（nt-cBN）刀具的制备，探索了飞秒激光烧蚀方法对nt-cBN的材料去除特性。使用激光单点烧蚀方法及理论公式计算出了nt-cBN的烧蚀阈值及阈值功率，分别为0.523 J/cm²和4.1 mW；基于烧蚀阈值，对nt-cBN材料在多种烧蚀功率下的单点烧蚀圆孔形貌进行了表征，并分析了不同阶段圆孔内壁多种微结构的形成与演变机理，阐明了随激光功率增加，nt-cBN表面经历了快速热汽化、熔化和相爆炸三种材料去除机理，并形成了纳米驼峰、爆裂和周期性波纹等不同烧蚀显微结构；对nt-cBN块材进行了直线扫描烧蚀加工，提出了基于光束扫描的动态烧蚀过程对材料的破坏形式及去除原理，并与单点烧蚀形成对比；建立了不同烧蚀功率下，飞秒激光扫描速度与加工微槽宽度和深度的关系曲线，并分析了烧蚀功率和扫描速度对加工效率和加工质量的影响规律，提出了能够保证加工效率并同时改善加工质量的激光扫描速度在0.1 mm/s左右。

关键词: 飞秒激光, 纳米孪晶立方氮化硼, 烧蚀阈值, 周期性微结构

Abstract: To fabricate the cutting tool of newly developed nanotwinned cubic boron nitride (nt-cBN) bulk applying for ultra-precision cutting, material removal mechanism of femtosecond ablation is studied. Damage threshold and the corresponding threshold power of nt-cBN are calculated by function relationship computation with single point ablation experiment, namely 0.523 J/cm² and 4.1mW. Based on damage threshold, morphology and formation mechanism of ablation areas by multiple laser powers is analyzed, especially of the microstructure on the wall of micro holes. Rapid evaporation, fusion and phrase explosion are three main material removal mechanisms as accelerating laser power when machining nt-cBN surface. Nano humps, explosive cracks and periodicity ripples are found during different machining stages. Microgrooves are etched on nt-cBN surface by line scanning ablation. Dynamic material damage characteristics and removal mechanism in terms of scanning ablation are studied compared with single point ablation. The relation curve graphs between scanning speeds and the length and depth of microgrooves under different laser power are established respectively. The influence of laser power and scanning speed on ablation surface quality is analyzed. Scanning speed of about 0.1mm/s is proved beneficial for both high processing efficiency and well ablation quality.

Key words: damage threshold, femtosecond laser, nanotwinned cubic boron nitride, periodicity micro structure

中图分类号:

TN249

靳田野, 陈俊云, 王金虎, 赵清亮. 纳米孪晶立方氮化硼的飞秒激光材料去除机理[J]. 机械工程学报, 2019, 55(9): 198-205.

JIN Tianye, CHEN Junyun, WANG Jinhu, ZHAO Qingliang. Material Removal Mechanism of Nanotwinned Cubic Boron Nitride by Femtosecond Laser Ablation[J]. Journal of Mechanical Engineering, 2019, 55(9): 198-205.

参考文献

[1] TIAN Y J, XU B,YU D L,et al. Ultrahard nanotwinned cubic boron nitride[J]. Nature,2013,493:385-388.
[2] NIKUMB S,CHEN Q,LI C,et al. Precision glass machining,drilling and profile cutting by short pulse lasers[J]. Thin Solid Films,2005,477(1):216-221.
[3] BEATRIZ G,FANNY C. Direct analysis of solid samples by fs-LA-ICP-MS[J]. Trends in Analytical Chemistry,2007,26(10):951-966.
[4] KARL-HERNZ L,BENJAMIN R,YVONNE R,et al. Metal ablation with short and ultrashort laser pulses[J]. Physics Procedia,2011,12:230-238.
[5] ZOPPEL S,FARSARI M,MERZ R,et al. Laser micromachining of 3C-SiC single crystals[J]. Microelectronic Engineering,2000,83:1400-1402.
[6] DONG Y Y,MOLIAN P. Femtosecond pulsed laser ablation of 3C-SiC thin film on silicon[J]. Appl. Phys.A,2003,77:839-846.
[7] 陈洪新,贾天卿,黄敏,等. 飞秒激光的波长对SiC材料烧蚀的影响[J]. 光学学报,2006,26(3):467-470. CHEN Hongxin,JIA Tianqing,HUANG Min,et al. Effect of the wavelength of femtosecond laser on the ablation of SiC materials[J]. Acta Optica Sinica,2006,26(3):467-470.
[8] 赵清亮,姜涛,董志伟,等. 飞秒激光加工SiC的烧蚀阈值及材料去除机理[J]. 机械工程学报,2010,46(21):172-177. ZHAO Qingliang,JIANG Tao,DONG Zhiwei,et al. Ablation threshold and material removal mechanism of femtosecond laser processing SiC[J]. Journal of Mechanical Engineering,2010,46(21):172-177.
[9] AROA M R,KARMELE V,AITOR L,et al. Femtosecond laser micromachining of metallic/ceramic composite material for solid oxide fuel cell devices[J]. International Journal of Hydrogen Energy,2016,41:17053-17063.
[10] EBERLE G,SCHMIDT M,PUDE F,et al. Laser suface and subsurface modification of sapphire using femtosecond pulses[J]. Applied Surface Science,2016,378:504-512.
[11] YASUTAKA N,NIKOLAY N,AKIHIRO T,et al. Fabrication of isolated platinum nanowire gratings and nanoparticles on silica substrate by femtosecond laser irradiation[J]. Applied Surface Science,2017,394:108-114.
[12] SCITI D,TRUCCHI D M,BELLUCCI A,et al. Effect of surface texturing by femtosecond laser on tantalum carbide ceramics for solar receiver applications[J]. Solar Energy Materials & Solar Cells,2017,161:1-6.
[13] 靳田野,陈俊云,赵明慧,等. 纳米孪晶立方氮化硼机械研磨机理研究[J]. 机械工程学报,2016,52(5):95-100. JIN Tianye,CHEN Junyun,ZHAO Minghui,et al. Study on mechanical grinding mechanism of nano twin crystal cubic boron nitride[J]. Journal of Mechanical Engineering,2016,52(5):95-100.
[14] CHEN Junyun,JIN Tianye,WANG Jinhu,et al. Study on machining mechanism of nanotwinned CBN cutting tool[C]//7th International Symposium on Advanced Optical Manufacturing and Testing Technologies,2014,SPIE 92811D:1-7.
[15] HIRLEMAN E D,STEVENSON W H. Intensity distribution properties of a Gaussian laser beam focus[J]. Applied Optics,1978,17(21):3496-3499.
[16] GO O,RYOSUKE S,KENTO H,et al. Generation of nanoparticles at a fluence less than the ablation threshold using femtosecond laser pulses[J]. Applied Surface Science,2013,282:638-641.
[17] GO O,RYOSUKE S,KENTO H,et al. Effect of air on debris formation in femtosecond laser ablation of crystalline Si[J]. Applied Surface Science,2013,282:525-530.
[18] RICARDAS B,MINDAUGAS M,SAULIUS J. Surface and bulk structuring of materials by ripples with long and short laser pulses:Recen advances[J]. Progress in Quantum Electronics,2014,38:119-156.
[19] LAURA G,MASAKI H,MASAHIRO S,et al. Metal-like self-organization of periodic nanostructures on silicon and silicon carbide under femtosecond laser pulses[J]. Journal of Applied Physics,2013,114(194903):1-5.
[20] HUANG Min,ZHAO Fuli,CHENG Ya,et al. Subwavelength ripples:Interference between surface plasmons and incident laser[J]. ACS Nano,2009,3(12):4062-4070.
[21] SHUJI S,MASAKI H,SHIGEKI T,et al. Mechanism for self-formation of periodic grating structures on a metal surface by a femtosecond laser puls[J]. Physical Review B,2009,79(00349):1-4.
[22] VOROBYEV A Y,MAKIN V S,GUO Chunlei. Periodic ordering of random surface nanostructures induced by femtosecond laser pulses on metals[J]. Journal of Applied Physics,2007,101(034903):1-4.

纳米孪晶立方氮化硼的飞秒激光材料去除机理

Material Removal Mechanism of Nanotwinned Cubic Boron Nitride by Femtosecond Laser Ablation

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