关键词: 参数设计, 大行程, 刚度, 微定位平台, 有限元分析

Abstract: Micro-mechanism is one of the key technologies for micro-positioning. High resolution and enough movement range are both necessary for micro-mechanism. A multi-functional micro-drive module is introduced and the non-linear relationship between the actual displacement magnification and ratio of output arm to input arm is studied as well. Some other factors affecting this actual displacement magnification are also analyzed. By introducing multi-functional micro-drive module and multi-folded-beam into 2-PPr (P denotes prismatic pair, Pr denotes parallelogram structure) mechanism, a novel two degrees of freedom micro-positioning mechanism with large travel range is brought forth. And then, the influence principle of micro-displacement magnification is investigated considering the key structure parameters including intersection angle for parallelogram bars and platform thickness. The concrete design method is also given on the basis of the above analysis. By combining the drive point rigidity with the whole machine rigidity, the relation matrix between the PZT actuations and the amount of motion of this micro-positioning mechanism is set up. The result shows validity of mechanism parameters designation by finite element analysis method and provides theoretical basis for the design of movement resolution, traveling range and control system.

Key words: Finite element analysis, Large travel, Micro-positioning mechanism, Parameter design, Rigidity