• CN:11-2187/TH
  • ISSN:0577-6686

›› 2008, Vol. 44 ›› Issue (9): 141-147.

• 论文 • 上一篇    下一篇

使用短基准的超精密长导轨直线度误差测量方法

贾立德;郑子文;李圣怡;戴一帆   

  1. 国防科技大学机电工程与自动化学院
  • 发布日期:2008-09-15

Measurement Method of Straightness Error of a Long Ultra-precise Guideway with a Short Benchmark

JIA Lide;ZHENG Ziwen;LI Shengyi;DAI Yifan   

  1. School of Mechatronics Engineering and Automation, National University of Defense Technology
  • Published:2008-09-15

摘要: 在超精密加工与检测技术中,高精度长导轨直线度误差的测量与补偿技术一直是一个研究重点。在系统研究现有各种导轨直线度误差测量方法的基础上,提出一种使用短基准的导轨直线度误差测量方法,将长导轨直线度误差的测量问题分解为具有一定重叠区域的数段较短导轨直线度误差的测量问题。直接利用超精密直线度物理基准测量各段导轨直线度误差,通过将各段导轨直线度误差拼接起来,重构出长导轨的直线度误差。利用空间坐标变换关系建立基于最小二乘法的直线度误差测量算法,以及相对机械运动误差对测量结果影响的数学模型,分析研究重叠区域二次采样点的匹配误差,以及测量误差、采样频率等因素对重叠区域长度选择的影响规律。对长550 mm的气浮导轨进行实际测量试验,仿真与测量试验表明上述方法简单实用,可操作性强。

关键词: 轮廓测量, 气浮导轨, 直线度误差, 最小二乘法

Abstract: The measurement and compensation of straightness error of long guideways is usually difficult to perform in the field of ultra-precise manufacture and measurement. On the basis of systematic study of the existing measurement methods of straightness, a new approach is introduced for the measurement of straightness of long guideways by using a short benchmark. With this method, we divide the global straightness profile into several sections with overlaps, and measure the local straightness profiles respectively with a short ultra-precise physical benchmark. Then the global profile can be reconstructed with the local profiles. With spatial coordinates transforming relations, the least square (LS) reconstruction algorithm and the mathematical model of the effect of the relative mechanical motion errors are built. And the effect of the error of dual-sampling points and the sampling frequency in the overlaps is researched. The straightness error of an ultra-precise air-guideway of 550 mm long is tested by using this method. Both simulation and practical experiments indicate that the technique has a good performance, and is simple and practical.

Key words: Air guideway, Least square method, Profile measurement, Straightness error

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