关键词: 隔振, 广义预测控制, 模糊控制, 微制造平台, 振动主动控制

Abstract: A 6-degree-of-freedom microvibration isolation system for a micro-manufacturing platform is developed. This system uses four air springs as passive vibration isolation elements and eight giant magnetostrictive actuators as active vibration isolation elements. An improved adaptive generalized predictive control approach is put forward. Considering the merit and defect of the generalized predictive control and fuzzy control, the hybrid control of the improved adaptive generalized predictive control approach and fuzzy control is used in the active vibration control of the micro-manufacturing platform. The simulation and experiment results show that the developed fuzzy generalized predictive control system of the micro- manufacturing platform has good robust stable, anti-jamming ability and time domain performance, and has good isolation performance against the floor disturbance over wide frequency area.

Key words: Active vibration control, Fuzzy control, Generalized predictive control, Micro-manufacturing platform, Vibration isolation