• CN：11-2187/TH
• ISSN：0577-6686

›› 2006, Vol. 42 ›› Issue (9): 97-102.

• 论文 •

### 基于子结构模型的音叉振动式微机械陀螺的检测电容解析方法

1. 上海交通大学机械与动力工程学院;同济大学机械工程学院;中国科学院上海微系统与信息技术研究所传感技术国家重点实验室
• 发布日期:2006-09-15

### DETECTION CAPACITANCE ANALYSIS METHOD FOR TUNING FORK VIBRATORY MICROMAC-HINED GYROSCOPE BASED ON SUBSTRUCTURE MODEL

LIU Guangjun; WANG Anlin;JIANG Tao; JIAO Jiwei;ZHANG Zhengfu

1. School of Mechanical Engineering,Shanghai Jiaotong University School of Mechanical Engineerin, Tongji University State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences
• Published:2006-09-15

Abstract: The detection capacitance analysis method based on substructure model for the tuning fork vibratory micro-mach- ined gyroscope fabricated by the bulk silicon micro-machining technology is put forward by employing the dynamic finite element theory of multi-degree of freedom, and the simulation of the micromachined gyroscope under working state is also realized to establish the mechanism model of fabrication defect to the performance of the micro-machined gyroscope with high precision and solve the problem of long computation time of optimization of micro-machined structure. The simulation is verified by experiments. From the analysis of the illustration, the important phenomena that the process variance and error of micro-machined gyroscope don’t influence the natural frequency much but influence final output characteristic of detectioncapacitance greatly is found. Based on promotion of analysis precision and efficiency, the analysis method and result have important reference value to the analysis and evaluation of robust performance of the tuning fork vibratory micro-machined gyroscope in coupled multiphysics fields environment.