• CN:11-2187/TH
  • ISSN:0577-6686

›› 2006, Vol. 42 ›› Issue (9): 97-102.

• 论文 • 上一篇    下一篇

基于子结构模型的音叉振动式微机械陀螺的检测电容解析方法

刘广军;王安麟;姜涛;焦继伟;张正福   

  1. 上海交通大学机械与动力工程学院;同济大学机械工程学院;中国科学院上海微系统与信息技术研究所传感技术国家重点实验室
  • 发布日期:2006-09-15

DETECTION CAPACITANCE ANALYSIS METHOD FOR TUNING FORK VIBRATORY MICROMAC-HINED GYROSCOPE BASED ON SUBSTRUCTURE MODEL

LIU Guangjun; WANG Anlin;JIANG Tao; JIAO Jiwei;ZHANG Zhengfu   

  1. School of Mechanical Engineering,Shanghai Jiaotong University School of Mechanical Engineerin, Tongji University State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences
  • Published:2006-09-15

摘要: 为建立加工缺陷对微机械陀螺性能影响的机理性模型,解决高精度微机械结构优化设计的计算时间问题,以微机械加工技术制备的音叉振动式微机械陀螺为研究对象,利用多自由度动态有限元解析理论,提出基于子结构模型的检测电容解析法,实现微陀螺实际工作状态的模拟,并对模拟结果进行试验验证。从实例解析出发,发现微陀螺加工缺陷和工艺误差虽然对其结构固频特性影响不大,但是对其最终输出的电容检测特性具有较大影响这一重要现象。解析方法和结果在提高微机械陀螺解析精度和解析效率的基础上,对多物理场耦合工作环境下音叉振动式微机械陀螺健壮性能的解析和评价具有重要的参考价值。

关键词: 工艺误差, 检测电容, 微机械陀螺, 子结构

Abstract: The detection capacitance analysis method based on substructure model for the tuning fork vibratory micro-mach- ined gyroscope fabricated by the bulk silicon micro-machining technology is put forward by employing the dynamic finite element theory of multi-degree of freedom, and the simulation of the micromachined gyroscope under working state is also realized to establish the mechanism model of fabrication defect to the performance of the micro-machined gyroscope with high precision and solve the problem of long computation time of optimization of micro-machined structure. The simulation is verified by experiments. From the analysis of the illustration, the important phenomena that the process variance and error of micro-machined gyroscope don’t influence the natural frequency much but influence final output characteristic of detectioncapacitance greatly is found. Based on promotion of analysis precision and efficiency, the analysis method and result have important reference value to the analysis and evaluation of robust performance of the tuning fork vibratory micro-machined gyroscope in coupled multiphysics fields environment.

Key words: Detection capacitance, Micromachined gyroscope, Process error, Substructure

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