关键词: 力学分析, 平动微位移机构, 柔性铰链, 有限元法, 正交试验

Abstract: In flexure-hinged micro-displacement mechanism, the relations of rotating/linear distortion of flexure hinge under loads and its geometry parameters are studied. After the mechanical performance of flexure-hinged single direction translation micro-displacement mechanism has meticulously been analyzed, its closed-form compliance equation is formul- ated. Thus, the translation displacement of stage in this single direction translation mechanism could be concluded. Finally, the displacement formula is checked through finite element method orthogonal tests, which shows the theoretic analysis is according with simulative results on the whole.

Key words: Finite element method, Flexure hinge, Mechanical analysis, Orthogonal tests, Translation micro-displacement mechanism