• CN：11-2187/TH
  • ISSN：0577-6686
机械工程学报

›› 2005, Vol. 41 ›› Issue (8): 213-217.

• 论文 • 上一篇    下一篇

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表面轮廓测定用扫描探针测头研究

黄强先;高桥健;初泽毅   

  1. 合肥工业大学仪器仪表学院;东京工业大学精密工学研究所
  • 发布日期:2005-08-15

STUDY ON SCANNING PROBE STYLUSES FOR SURFACE PROFILE MEASUREMENT

Huang Qiangxian;Takahashi Ken;;Hatsuzawa Takeshi   

  1. College of Instrumentation, Hefei University of Technology Precision and Intelligence Laboratory, Tokyo Institute of Technology
  • Published:2005-08-15

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摘要： 利用压电聚偏氟乙烯(PVDF, Polyvinilidene fluoride)薄膜和压电微音叉(Micro-fork)，分别与钨探针结合，构成了三种新型的表面轮廓扫描测头。该新型测头与x-y压电工作台结合，采用与TM-AFM（Tapping mode atomic force microscope）相同的工作原理，构成了扫描探针显微镜。分别介绍了这些测头的构成及特点，给出了所构成测量系统所获得的试验结果，证明了这几种新型扫描测头的有效性。

关键词: 测头, 聚偏氟乙烯, 扫描探针, 扫描探针显微镜, 微音叉

Abstract: Using piezo-electrical PVDF (Polyvinilidene fluor- ide) and micro-fork, and combining with tungsten probes respectively, three kinds of surface scanning probe styluses were developed. Cooperating with x-y piezo-electrical driving stage, these new styluses constitute scanning probe microscopes based on the same operating mechanism of the tapping mode AFM. The schematic structures and characteristics of these styluses were introduced, and then the measurement results obtained by the developed system were given. The results proved the effectiveness of the new scanning styluses.

Key words: Micro-fork, PVDF, Scanning probe, SPM, Stylus

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