• CN:11-2187/TH
  • ISSN:0577-6686

›› 2004, Vol. 40 ›› Issue (9): 84-88,9.

• 论文 • 上一篇    下一篇

超精密磁悬浮工作台及其解耦控制

李黎川;丁玉成;卢秉恒   

  1. 西安交通大学电气工程学院;西安交通大学机械工程学院
  • 发布日期:2004-09-15

HIGH-PRECISION MAGNETICALLY SUSPENDED TABLE AND ITS DECOUPLING CONTROL

Li Lichuan;Ding Yucheng;Lu Bingheng   

  1. School of Electrical Engineering, Xi’an Jiaotong University School of Mechanical Engineering, Xi’an Jiaotong University
  • Published:2004-09-15

摘要: 给出了一个磁悬浮工作台的结构设计、建模、控制器设计、实时控制试验和试验结果。与国际上已有的类似研究相比,给出的方案使磁悬浮部分独立于直线电动机,以避免两者间的耦合问题。此外,在电磁铁的结构和传感器的布置上,均给出了全新的设计,其特点是即便不使用永久磁铁,电磁铁的静态功耗也比较小,以及在驱动和位置检测上安排了冗余。后者的有利之处是可获得结构上的对称性和解耦后各控制通道在噪声性能上的一致性,且能够更大程度地降低位移信号中的噪声,代价是需要增加一路位移传感器和功率放大器,以及需要略多的实时计算以实现解耦和消除冗余。

关键词: 磁悬浮, 磁悬浮轴承, 解耦控制, 精密工作台, 精密运动控制

Abstract: Design, modeling, decoupling control, as well as experiment results of a high-precision magnetically suspended table are presented. Compared with existing designs, the magnetic suspension and the linear drive in our design are electro-magnetically separated, so that the coupling between them is minimized. Presented also are novel designs in the electromag-nets and in the arrangement of sensors, which achieves smaller power consumption even without the use of permanent magnets, and maintains redundancy in driving and sensing. This redun-dancy allows a symmetric structural design that gives uniform (and also improved) noise performance among the control axis.

Key words: Decoupling control, Magnetic bearings, Magnetic suspension, Precision motion control, Precision stage

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