• CN:11-2187/TH
  • ISSN:0577-6686

›› 2001, Vol. 37 ›› Issue (5): 78-80,8.

• 论文 • 上一篇    下一篇

栅状阵列器件激光视觉检测系统及共面性评价方法

薛晓洁;叶声华;孙长库   

  1. 天津大学精密测试技术及仪器国家重点实验室
  • 发布日期:2001-05-15

LASER VISUAL INSPECTION SYSTEM AND EVALUATING METHOD FOR GRID ARRAY DEVICE COPLANARITY

Xue Xiaojie;Ye Shenghua;Sun Changku   

  1. Tianjin University
  • Published:2001-05-15

摘要: 应用激光线结构光传感器,将视觉检测成功应用于栅状阵列器件的共面性测量中,建立了测量系统数学模型,提出了以三点法为基础的共面性评价方法,并对BGA芯片进行了相应的试验研究,取得了满意的结果。

关键词: 共面性, 三点法, 栅状阵列器件

Abstract: Adopting line-structured laser sensor, successfully applies the visual inspection to the grid array device coplanarity measurement. With the mathematics model put forward, the evaluating method based on the three-point seating plane is presented, and corresponding experimental studies on the BGA chip coplanarity are carried out, which achieve satisfactory results.

Key words: Coplanarity, Grid array device, Three-point seating plane method

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