基于自转一阶非连续式微小球体超精密加工研究

doi:10.3901/JME.2025.19.352

摘要/Abstract

摘要： 针对微小球体高精度的批量生产需求，提出了一种基于自转一阶非连续式球体加工方法，使球体研磨轨迹发生非周期性并扩展，实现加工高效快速一致性收敛。在此基础上，建立了自转一阶非连续式微小球体加工的运动学模型，分析了微小球体研磨轨迹形成全包络的机理，以及影响球体自转轴变动的主要因素，并通过仿真分析验证了自转一阶非连续式微小球体研磨轨迹的全包络性。通过批量加工试验，分析了不同研磨压力、研磨盘转速、研磨液浓度等参数对微小球体圆度及偏差的影响，并进行工艺参数优化，使微小球体的圆度和表面粗糙度在自转一阶非连续式研磨阶段得到快速改善并且批一致性良好。通过进一步批量抛光加工，使微小球体圆度(RON_t)达到0.09～0.13 μm，表面粗糙度(R_a)达到7.8～10 nm，从而实现了微小球体高效高精度高一致性的加工。

关键词: 自转一阶非连续加工, 微小球体, 运动学分析, 批一致性

Abstract: In order to achieve high-accuracy and high-precision miniature balls in batch machining, a new technique based on a first-order discontinuous self-rotation function is proposed. The technique allows the instantaneous spin axis of the miniature ball to change suddenly during the machining process, which causes the lapping trajectory of the miniature ball to repeat non-periodically and expand. Thus, the precision of miniature balls can be quickly converged in batch machining. On this basis, a geometric kinematics model of the first-order discontinuous rotation function for miniature ball machining is established, and the main factors affecting the motion of miniature ball during lapping are analyzed and identified. The resulting lapping trajectory in miniature ball machining using the first-order discontinuous rotation function is then investigated through Matlab simulation. This is followed by a experimental study, which reveals that the effects of major lapping process parameters, such as lapping pressure, lapping plate speed, and lapping fluid concentration, on the roundness and deviation of the machined balls, with an attempt to optimize the process parameters. It is shows that the roundness, surface roughness and precision of the miniature balls lapped using this technique are significantly improved. After a further batch polishing process, the roundness of the miniature balls reaches 0.09-0.13 μm, and the surface roughness R_a reaches 7.8-10 nm.

Key words: first-order discontinuous self-rotation function technique, miniature balls, kinetic analysis, batch consistency

中图分类号:

TH145
TH140

吕迅, 焦荣辉, 王军. 基于自转一阶非连续式微小球体超精密加工研究[J]. 机械工程学报, 2025, 61(19): 352-362.

Lü Xun, JIAO Ronghui, WANG Jun. A Study of High-precision Machining of Miniature Balls with a First-order Discontinuous Self-rotation Technique[J]. Journal of Mechanical Engineering, 2025, 61(19): 352-362.

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