RESEARCH ON MICRO/NANO – MACHINING USING AN ATOMIC FORCE MICROSCOPE COMBINED WITH DIAMOND TIP

Abstract

Abstract: Through the systemic study on AFM nano-machining of single crystal silicon with a diamond tip, the surface deformation and material removal mechanisms on nanometer scale and at ultralow loads are analyzed. Beyond that, the contact mechanism existed between the AFM diamond tip and the material surface is simulated by finite element method. The experimental results prove the FEM’s validity applied in the contact analysis.

Key words: Atomic force microscope, Diamond tip, FEM, Micro/nano-machining

CLC Number:

TH38

Zhao Qingliang;Dong Shen;Zhang Xiuli. RESEARCH ON MICRO/NANO – MACHINING USING AN ATOMIC FORCE MICROSCOPE COMBINED WITH DIAMOND TIP[J]. , 2000, 36(11): 64-69.

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http://www.cjmenet.com.cn/EN/Y2000/V36/I11/64

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RESEARCH ON MICRO/NANO – MACHINING USING AN ATOMIC FORCE MICROSCOPE COMBINED WITH DIAMOND TIP

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