High-quality Terahertz Flexible Metal Metamaterials Fabricated by Femtosecond Laser Direct Writing

doi:10.3901/JME.2025.17.281

Abstract

Abstract: Terahertz metamaterials (THz-MMs) play a crucial role in high-performance terahertz functional devices due to their unique electromagnetic regulatory capabilities. However, the current preparation process for THz-MMs is complex and time-consuming, requiring the combination of various silicon-based micromachining processes and precision equipment, leading to high costs. A femtosecond laser writing method for metal thin films to address these challenges is proposed. By utilizing the minimal thermal diffusion ablation characteristics of femtosecond laser and precise control of pulse energy, the study successfully achieves a single forming process for terahertz flexible metal metamaterials. The effectiveness of the proposed method is demonstrated using a hybrid rectangular aperture flexible metal metamaterial as an example. Experimental results reveal that the femtosecond laser-written metamaterial supports strong coupling between two surface plasma modes and exhibits a high Q value Rabi splitting peak in the transmission spectrum. By adjusting parameter L₂, the frequency of the splitting peak can be tuned from 1.17 THz to 0.97 THz, while the Q value increases from 10.79 to 34.26. These findings suggest that femtosecond laser direct writing technology has the potential to revolutionize the rapid processing of low-cost, high-performance terahertz functional devices.

Key words: terahertz, flexible metal metamaterials, femtosecond laser, strong coupling, localized surface plasmon polaritons

CLC Number:

TH741
TN249

ZENG Qiuming, HUANG Yi, ZHONG Shuncong, CHEN Jianxiong, ZHONG Yujie, LIN Tingling, CHEN Xuefeng. High-quality Terahertz Flexible Metal Metamaterials Fabricated by Femtosecond Laser Direct Writing[J]. Journal of Mechanical Engineering, 2025, 61(17): 281-290.

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