STUDY ON LASER HETERODYNE INTERFEROMETER FOR POSITIONING A CNC MACHINE TOOL

Abstract

Abstract: A laser heterodyne interferometer with a AOM device is proposed. It employsa new method of processing heterodyne signal, that is to measure the integer and fractional period of the phase difference changing of the signals, to promote measuring resolution which reaches to λ/2000 and measuring range, and to increase allowable speed of the target moving at the same time. This method makes the interferometer be able to measure the displacement with a large range dynamic. The interferometer can be applied to the positioning in a precision/super-precision CNC machine tool.

Key words: CNC machine tool, Heterodyne interferometer, Phase measurement, Positioning

Zhao Yang;Li Dacheng. STUDY ON LASER HETERODYNE INTERFEROMETER FOR POSITIONING A CNC MACHINE TOOL[J]. , 1994, 30(6): 53-57.

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STUDY ON LASER HETERODYNE INTERFEROMETER FOR POSITIONING A CNC MACHINE TOOL

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