STUDY ON LASER HETERODYNE INTERFEROMETER FOR POSITIONING A CNC MACHINE TOOL

Abstract

Abstract: A laser heterodyne interferometer with a AOM device is proposed. It employsa new method of processing heterodyne signal, that is to measure the integer and fractional period of the phase difference changing of the signals, to promote measuring resolution which reaches to λ/2000 and measuring range, and to increase allowable speed of the target moving at the same time. This method makes the interferometer be able to measure the displacement with a large range dynamic. The interferometer can be applied to the positioning in a precision/super-precision CNC machine tool.

Key words: CNC machine tool, Heterodyne interferometer, Phase measurement, Positioning

Zhao Yang;Li Dacheng. STUDY ON LASER HETERODYNE INTERFEROMETER FOR POSITIONING A CNC MACHINE TOOL[J]. , 1994, 30(6): 53-57.

Add to citation manager EndNote|Reference Manager|ProCite|BibTeX|RefWorks

URL: http://www.cjmenet.com.cn/EN/

http://www.cjmenet.com.cn/EN/Y1994/V30/I6/53

[1]	LIU Tianyu, XU Shuo, WANG Haolong, ZHAO Hanlei, LI Tiejun, LIU Jinyue. Modeling Method of Mobile Manipulators Considering Flexible Tire-ground Interactions [J]. Journal of Mechanical Engineering, 2025, 61(9): 252-263.
[2]	SUN Guangming, HAN Bing, ZHANG Dawei, TIAN Wenjie, GUO Xin, ZHAO Jian, HE Gaiyun, GAO Weiguo, SU Zhe. Research Progress on Spatial Error Modeling and Identification Methods for CNC Machine Tools Based on Error Compensation [J]. Journal of Mechanical Engineering, 2025, 61(19): 202-228.
[3]	WANG Buyun, SHI Yukun, JIANG Jincheng, CHENG Jun, YANG Ou, DING Huiqin. Positioning Error Modeling & Compensation Method for Stacking Forklift Mobile Robot [J]. Journal of Mechanical Engineering, 2025, 61(17): 90-104.
[4]	TAO Yong, TAN Donghua, GAO He, WAN Jiahao, WANG Xiaotong, DENG Changyi, WEI Hongxing, WANG Tianmiao. A Collaborative Robot Welding Trajectory Correction Method for Highly Reflective Narrow Welds under Human Advance Guidance [J]. Journal of Mechanical Engineering, 2025, 61(15): 148-161.
[5]	LIU Zhifeng, CHEN Chuanhai, GUO Jinyan, LI Zhijie. New Paradigm for Reliable Manufacturing of CNC Machine Tools：Upgrading from “Functional Possibilities” to “Performance Reliability” [J]. Journal of Mechanical Engineering, 2025, 61(12): 293-304.
[6]	WANG Shoukun, XU Yongkang, CHEN Zhihua, SI Jinge, LI Bin, WANG Junzheng. Mobile Autonomous Recovery Landing Principle and Control Method for Unmanned Aerial Vehicle [J]. Journal of Mechanical Engineering, 2024, 60(3): 34-46.
[7]	LIU Qiang, GAO Qingli, WANG Wei, HAN Bangcheng, NIU Pingjuan, WANG Zixi. Lorentz Magnetic Bearings for Laser Massive Transfer Composite Motion Platforms [J]. Journal of Mechanical Engineering, 2024, 60(1): 198-209.
[8]	ZHOU Jian, ZHENG Lianyu, FAN Wei, ZHANG Xuexin, CAO Yansheng. Adaptive Online Compensation for Industrial Robot Positioning Error [J]. Journal of Mechanical Engineering, 2023, 59(5): 53-66.
[9]	RAN Yan, TIAN Ke, DOU Yifan, JIN Chuanxi, ZHANG Genbao, MU Zongyi. Kinematic Error Transfer and Integrated Precision Modeling of the Meta-action Chain for CNC Machine Tools [J]. Journal of Mechanical Engineering, 2023, 59(23): 211-220.
[10]	TANG Hao, ZHANG He, ZHANG Dong, GAO Guibing, ZHENG Yu. Repeatability Characterization and Compensation in Micro-scale Displacement for Precise Linear Stage Based on Micro-dynamics Analysis [J]. Journal of Mechanical Engineering, 2023, 59(21): 110-120.
[11]	ZHANG Xianmin, ZHU Benliang, LI Hai, CHEN Zhong, WANG Rixin, ZANG Haoyan. Recent Advances in Compliant Precision Positioning and Manipulating Mechanisms [J]. Journal of Mechanical Engineering, 2023, 59(19): 24-43.
[12]	YANG Zhaojun, HE Jialong, LIU Zhifeng, LI Guofa, CHEN Chuanhai. Recent Progress in Reliability Technology of CNC Machine Tools [J]. Journal of Mechanical Engineering, 2023, 59(19): 152-163.
[13]	CHEN Xin, CHEN Yun, YANG Zhijun, GAO Jian, CHEN Xun. Research Advances in Several Key Technologies for High Precision and High Efficiency Manufacturing of Electronic Devices [J]. Journal of Mechanical Engineering, 2023, 59(19): 164-175.
[14]	LIU Wei, LIU Shun, DENG Zhaohui, GE Jimin. Research Progress on Positioning Error Compensation Technology of Industrial Robot [J]. Journal of Mechanical Engineering, 2023, 59(17): 1-16.
[15]	TANG Hao, ZHANG Dong, ZHANG He, GAO Guibing, ZHENG Yu. Positioning Accuracy Characterization Approach in Micro-scale Displacement for Precise Linear Stage Based on Stream of Variation Theory [J]. Journal of Mechanical Engineering, 2023, 59(13): 49-58.

STUDY ON LASER HETERODYNE INTERFEROMETER FOR POSITIONING A CNC MACHINE TOOL

Knowledge

Abstract

Cite this article

share this article

References

Related Articles 15

Recommended Articles

Metrics

Comments