Abstract: Micro/nano-scale machining and surface interface mechanical properties measurements that based on atomic force microscopy(AFM) require real-time detection of the lateral force of the AFM probe. Therefore, the calibration of the lateral force directly affects the accuracy of the detection. Here, the same probe is calibrated using three common methods of wedge method, diamagnetic levitation method and non-contact method that based on different principles. The stability, error and practicability of the three calibration methods are compared. The stability of the three calibration methods is relatively high. The calibration error of the diamagnetic levitation method and non-contact method is 13.6% and 20.4%, respectively, compared to the wedge method. The accuracy of the wedge method is affected by the calibration result of normal force and the linearity of the lateral force signal versus the load. The sliding between the tip and the suspended graphite makes the calibration result of the diamagnetic levitation method larger. However, by calculating the sliding distance, the calibration result can be corrected to reduce calibration errors. The calibration results of non-contact method are greatly affected by the probe size, and the calibration accuracy of non-contact method can be improved by characterizing the probe size. The analysis and comparison on the accuracy and differences of probe calibration methods provide a reference for the selection of probe calibration methods in different situations.

Key words: atomic force microscope, probes, lateral force, calibration methods, calibration error