• CN: 11-2187/TH
  • ISSN: 0577-6686
Calibration Methods and Error Analysis of the Lateral Force of Atomic Force Microscope Probes
LANG Haojie, PENG Yitian, BAO Qifan, DING Shuyang, HUANG Yao
Journal of Mechanical Engineering . 2023, (22): 196 -206 .  DOI: 10.3901/JME.2023.22.196