Abstract: Ultra-fine micro grinding refers to the grinding process in which the diameter of grinding tools is less than or equal to 100 μm.It has great potential in manufacturing microstructure components made of various materials.By means of simulation and theoretical analysis of abrasive trajectory, the machined surface quality, grinding force and grinding tool wear characteristics in ultra-fine micro grinding is systematically studied.It is found that the abrasive grain with the largest grain size must be effective abrasive grain, and the abrasive grain with the largest grain size will play a major role in the formation of machined surface in ultra-fine micro grinding.The undeformed chip thickness model and grinding force model considering the difference of the abrasive grain size are established, and finally the grinding force model is verified by ultra-fine micro grinding experiments on titanium alloy.It is found in experiment that the surface quality of ultra-fine micro grinding becomes worse with the increase of feeding velocity and radial cutting depth, and the surface roughness also increases with the increase of feeding velocity and radial cutting depth.For the ultra-fine micro grinding process, it is found that ultra-fine micro grinding tools wear rapidly, and the main reason for the rapid wear of grinding tools is that the number of effective abrasive grains involved in machining is very small.When the radial cutting depth is 1 μm, the abrasive grains involved in cutting on the grinding tools only account for 12% of the total abrasive grains.In large radial cutting depth, in addition to few effective abrasive grains, another important reason for the rapid wear of grinding tools is that the undeformed chip thickness is very large, which exceeds the limit that abrasive grains can bear.

Key words: ultra-fine micro grinding, grinding tool wear, grinding force, machined surface quality