关键词: 超精密, 弹性变形, 机构, 微位移

Abstract: Based on an ordinary elastic-deformation micro-displacement mechanism, force acting mode for producing micro-displacement is changed Through an elastic rod, and the position of displacement input and output are changed, which guarantees displacement output as against deflection, increases system stiffness and reduces mutual interference. There are two force action modes I. e. fixed hinged end mode and fixed end mode. Among them the fixed end performance is better. If they are combined wish other driving system, the ultraprecision resolution and accuracy can be obtained.

Key words: Elastic-deformation, Mechanism, Micro-displacement, Ultraprecision