关键词: 超精密加工, 超精密数控, 机床, 误差检测

Abstract: The characteristics and the application background of ultra-precision manufacturing is introduced firstly, and the stature of modern development of ultra-precision machine tool, formers international products and research centre are introduced separately. The new research level and results about constructers and components of machine tool, transmission system, measurement and DNC system , and environment condition control system are described emphatically. Finally, form the point view for widely using of ultra-precision manufacturing, same trends of its accuracy goals , modularization and low-price politic are discussed briefly.

Key words: Error measure, Machine tool, Ultra-precise machining, Ultra-precise numeric control